Patents by Inventor Seon Ok KIM

Seon Ok KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support unit and substrate treating apparatus including the same
    Patent number: 11915905
    Abstract: A support unit provided in an apparatus for treating a substrate using plasma includes a dielectric plate on which the substrate is placed, an electrode plate disposed under the dielectric plate, a power supply rod that applies power to the electrode plate, and a flange that has a shape surrounding the power supply rod and that is spaced apart from the power supply rod.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: February 27, 2024
    Assignee: SEMES CO., LTD.
    Inventors: Hyoungkyu Son, Yu Dong Han, Hyeon Gyu Kim, Seon Ok Kim
  • SHOWER HEAD UNIT AND SYSTEM FOR TREATING SUBSTRATE WITH THE SHOWER HEAD UNIT
    Publication number: 20210005424
    Abstract: Provided is a shower head unit for control temperature for each area using a planar heating element and a substrate treating system having the same. The substrate treating system includes a housing, a shower head unit installed on an inner upper side of the housing and for entering a process gas for etching a substrate into the housing, and an electrostatic chuck installed on an inner lower side of the housing and for seating the substrate, wherein the shower head unit is installed as a planar heating element in a plurality of areas to control temperature for each area.
    Type: Application
    Filed: June 29, 2020
    Publication date: January 7, 2021
    Inventors: Hyoungkyu Son, Hyeon Gyu Kim, Seon Ok Kim, Yu Dong Han
  • SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
    Publication number: 20210005419
    Abstract: A support unit provided in an apparatus for treating a substrate using plasma includes a dielectric plate on which the substrate is placed, an electrode plate disposed under the dielectric plate, a power supply rod that applies power to the electrode plate, and a flange that has a shape surrounding the power supply rod and that is spaced apart from the power supply rod.
    Type: Application
    Filed: July 1, 2020
    Publication date: January 7, 2021
    Applicant: SEMES CO., LTD.
    Inventors: Hyoungkyu SON, Yu Dong HAN, Hyeon Gyu KIM, Seon Ok KIM