Patents by Inventor Seong-Oh Woo

Seong-Oh Woo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for improving low k FSG film gap-fill characteristics
    Patent number: 7390757
    Abstract: The present invention relates to fluorinated silicate glass (FSG) with low dielectric constant and improved gap-fill characteristics. In the present method, a fluorinated silicon source, an optional fluorine source, an optional carbon source, a hydrogen source, and an oxygenator are used as the reactant gases. Inert or carrier gas(es) may also be used. In accordance with the present invention, the reactant gas mixture does not comprise a silane compound having the general formula SixHy, wherein x has a range of 1 to 2, y has a range of 4 to 6. The material deposited is thus referred to herein alternatively as “SixFy-only FSG” or “SixFy-only fluorinated oxide” (“SOFO”).
    Type: Grant
    Filed: November 15, 2005
    Date of Patent: June 24, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Seong-Oh Woo, Jun Tae Choi
  • Methods for improving low k FSG film gap-fill characteristics
    Publication number: 20070111543
    Abstract: The present invention relates to fluorinated silicate glass (FSG) with low dielectric constant and improved gap-fill characteristics. In the present method, a fluorinated silicon source, an optional fluorine source, an optional carbon source, a hydrogen source, and an oxygenator are used as the reactant gases. Inert or carrier gas(es) may also be used. In accordance with the present invention, the reactant gas mixture does not comprise a silane compound having the general formula SixHy, wherein x has a range of 1 to 2, y has a range of 4 to 6. The material deposited is thus referred to herein alternatively as “SixFy-only FSG” or “SixFy-only fluorinated oxide” (“SOFO”).
    Type: Application
    Filed: November 15, 2005
    Publication date: May 17, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Seong-oh Woo, Jun Choi