Abstract: Disclosed is a method for measuring the characteristics of the surface of the object to be measured by means of a measuring apparatus for measuring the characteristics of the surface of the object to be measured by measuring an interaction between a tip and the surface of the object to be measured. The method, according to an embodiment of the present invention is a method for measuring the characteristics of the surface of the object to be measured by repeating an approaching operation of bringing the tip close to and in contact with the surface of the object to be measured and a lifting operation. The approaching operation is performed by controlling such that a characteristic value reaches a set point, and the set point is variably set on the basis of the state of the point on which the approaching operation is performed.

Abstract: The present invention relates to a method for measuring, by a measurement device, characteristics of a surface of an object to be measured. The method includes an approach step of positioning the tip to come into contact with a specific position of the surface of the object to be measured and a lift step of separating the contacted tip from the surface of the object are repeatedly performed with respect to a plurality of positions of the surface of the object. The tip is controlled to vibrate in a portion or the entirety of the approach step and the lift step, and a movement characteristic of the tip is controlled according to a change of the vibration characteristic of the tip.

Abstract: The present invention relates to a method for acquiring a surface characteristic of a measuring object using a tilted tip, an atomic force microscope for carrying out the method, and a computer program stored on a storage medium for carrying out the method, capable of acquiring an image deeply to the inside of an undercut structure and easily separating a tip from the inside of the undercut structure. The method according to an exemplary embodiment of the present invention is a method for acquiring a surface characteristic of a measuring object using a measuring device including a tip interacting with the surface of the measuring object.