Abstract: A substrate processing method is provided. The substrate processing method comprises loading a substrate onto a substrate support inside a chamber, forming a plasma inside the chamber, providing a first DC pulse signal to an electromagnet that generates a magnetic field inside the chamber and processing the substrate with the plasma, wherein the first DC pulse signal is repeated at a first period including a first section and a second section subsequent to the first section, the first DC pulse signal has a first level during the first section, and the first DC pulse signal has a second level different from the first level during the second section.

Abstract: An electrified vehicle includes a motor including a plurality of windings, a first inverter connected to a first end of each of the plurality of windings and configured to drive the motor, a second inverter connected to a second end of each of the plurality of windings and configured to drive the motor in a second driving mode of a first driving mode and the second driving mode, a first controller configured to determine one of first and second output limit lines as an output limit line of the first driving mode, depending on whether a preset condition is satisfied, and a second controller configured to bidirectionally switch the first driving mode and the second driving mode within an operating point range according to the output limit line of the first driving mode in accordance with a value of a torque command for the motor and counter magnetic flux of the motor.

Abstract: The inventive concept provides a substrate treating method. The substrate treating method includes pre-treating a substrate by cleaning the substrate; etching the substrate by supplying an etchant and heating a substrate supplied with the etchant; and post-treating the substrate after the etching the substrate, and wherein the pre-treating the substrate, the etching the substrate, and the post-treating the substrate are each performed in different chambers, a substrate on which the pre-treating the substrate is completed is transferred in a dry state to a chamber at which the etching the substrate is performed, and a substrate on which the etching the substrate is completed is transferred in a wetted state with a liquid to a chamber at which the post-treating the substrate is performed.

Abstract: In a control method of a motor drive system, when a first motor corresponding to a first drive wheel is being driven in a second drive mode among a first drive mode in which the first motor is driven by a first inverter of the motor drive system and connected to a first end of each of coils of the first motor and the second drive mode in which the first motor is driven by the first inverter and a second inverter connected to a second end of each of the coils and configured to selectively operate, whether or not the second inverter malfunctions is determined. When the second inverter malfunctions, a drive mode is changed so that the first motor is driven in the first drive mode. An output limit of the first motor in the first drive mode is relaxed.

Abstract: A motor driving apparatus includes a motor having a plurality of windings, a first inverter which is connected to a first end of each of the plurality of windings and drives the motor, a second inverter which is connected to a second end of each of the plurality of windings and selectively drives the motor according to a motor drive mode, and a controller which generates a current command for the motor according to a torque command and a voltage utilization rate control value, determines whether to perform linearization control for the current command based on a present counter magnetic flux of the motor and a switching reference counter magnetic flux for the motor drive mode, and adjusts the voltage utilization rate control value such that a value of the current command is linearized in a section in which the linearization control is performed.

Abstract: The present disclosure relates to a system for controlling a motor of a vehicle for increasing control accuracy of the motor for driving the vehicle, and an object of the present disclosure is to provide a system for controlling a motor of a vehicle, which may accurately perform a motor control even when a battery voltage (i.e., motor voltage) applied to the motor upon the driving control of the motor is changed.

Abstract: A functional safety system of a robot according to an exemplary embodiment of the present disclosure can duplicate modules so as to satisfy a performance level d (pl-d) required for the functional satisfy of a robot.

Abstract: A functional safety system of a robot according to an exemplary embodiment of the present disclosure can duplicate modules so as to satisfy a performance level d (pl-d) required for the functional satisfy of a robot.

Abstract: A functional safety system of a robot according to an exemplary embodiment of the present disclosure can generate a safety zone which is a zone to sense whether an obstacle is present.

Abstract: Provided is a method of automatically combining a farm vehicle with a work machine including confirming a current position of the work machine, moving a farm vehicle into a range having a predetermined radius around the current position, and controlling the farm vehicle, on the basis of a current position and direction of a first coupling unit included in the work machine, so that the first coupling unit and a second coupling unit included in the farm vehicle are coupled to each other.

Abstract: Disclosed herein are a system and a method including receiving a request for changing a delivery date of a purchased vehicle, and selecting, among a plurality of planned vehicles for which production planning and delivery dates have been previously determined, a target vehicle. Exchanging the delivery date of the purchased vehicle with a delivery date of the target vehicle may not affect delivery dates of other planned vehicles of the plurality of planned vehicles. The system and method may further include exchanging the delivery date of the purchased vehicle with the delivery date of the target vehicle, and adjusting a vehicle production schedule according to the exchanged delivery dates.

Abstract: An integrated production planning system of a vehicle includes an information storage unit configured to accumulate and store basic information and work history information of each of a plurality of workers, the work history information including a type of a work performed by the worker in the past and required time for the work. The integrated production planning system also includes a production plan establishment unit configured to establish a vehicle production plan constituted of a work type and a work sequence, to calculate expected hours required for work for each worker based on the basic information and work history information for each worker of the information storage unit, and to establish the vehicle production plan or modify a previously generated production plan by reflecting the calculated expected hours required for the work.

Abstract: The present disclosure relates to an apparatus and a method for personal identification based on a deep neural network. According to an exemplary embodiment of the present disclosure, a personal identification method includes receiving a plurality of wireless signals including spatial information and identification information of an object to be identified, by means of a plurality of receivers in different positions, by a wireless signal collecting unit, generating a manipulation signal from the wireless signal by processing the spatial information by means of a first deep neural network model which is trained in advance, by a manipulation signal generating unit, and identifying the object to be identified in a specific space with identification information of the object to be identified of the manipulation signal as an input of the second deep neural network model, by a personal identification processing unit.

Abstract: An embodiment method of operating a cell-based mobility production system for producing various types of mobilities includes assigning works required in each cell of a plurality of cells connected in series or in parallel that vehicle bodies need to go through based on the type of the mobility to be produced, determining a feeding order of the vehicle bodies based on the assigned works, and reassigning the works required in each cell that the vehicle bodies to be fed need to go through based on the determined feeding order, wherein each of assigning the works, determining the feeding order, and reassigning the works is performed by a processor.

Abstract: A calibration apparatus for a wheelchair dynamometer include a body, a motor, a sensor, a wheel and a controller. The motor may be installed at the body to generate a torque. The sensor may be configured to measure a torque or a revolution per minute (RPM) generated from the motor. The wheel may be rotated by the torque. The controller may be configured to control the torque or the RPM generated from the motor and display a torque or a RPM measured by the sensor.

Abstract: Provided is a control moment gyroscope, in which a pair of momentum wheels are symmetrically disposed, thereby reducing torque noise and vibration, increasing output torque, and reducing its size. The control moment gyroscope includes a gimbal rim, a wheel frame having a first wheel frame located inside the gimbal rim and a second wheel frame having the same structure as the first wheel frame and symmetrically coupled with the first wheel frame, a first momentum wheel coupled to the first wheel frame, a second momentum wheel coupled to the second wheel frame corresponding to the first momentum wheel, a gimbal motor installed on an outer circumference of the gimbal rim and connected with first ends of the first and second wheel frames, and an angular velocity sensor installed on the outer circumference of the gimbal rim, connected with second ends of the first and second wheel frames.

Abstract: An apparatus and method for interconnecting pipes, and a method for manufacturing a jaw of a jaw holder An apparatus/method are provided. The pipe connecting apparatus includes a pipe connecting member installed at a location where two pipes are interconnected, one or more jaw holder that are fixedly inserted into respective opposite end portions of the pipe connecting member in a state where they are respectively interposed between the pipe connecting member and the pipe and between the pipe connecting member and the pipe and provided with a plurality of jaw mounting holes that are formed along an outer circumference and spaced apart from each other at predetermined intervals, one or more jaws that are pivotally inserted into the respective jaw mounting holes and press and fix the pipes inserted into the jaw holders by being depressed by an inner wall of the pipe connecting member, and one or more elastic members that are installed in the pipe connecting member to elastically support the jaws.

Abstract: Provided is a control moment gyroscope, in which a pair of momentum wheels are symmetrically disposed, thereby reducing torque noise and vibration, increasing output torque, and reducing its size. The control moment gyroscope includes a gimbal rim, a wheel frame having a first wheel frame located inside the gimbal rim and a second wheel frame having the same structure as the first wheel frame and symmetrically coupled with the first wheel frame, a first momentum wheel coupled to the first wheel frame, a second momentum wheel coupled to the second wheel frame corresponding to the first momentum wheel, a gimbal motor installed on an outer circumference of the gimbal rim and connected with first ends of the first and second wheel frames, and an angular velocity sensor installed on the outer circumference of the gimbal rim, connected with second ends of the first and second wheel frames.