Patents by Inventor Seung Seok Yoo

Seung Seok Yoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME, AND THIN FILM DEPOSITION METHOD
    Publication number: 20240158942
    Abstract: A substrate supporting plate that may prevent deposition on a rear surface of a substrate and may easily unload the substrate. The substrate supporting plate may include a substrate mounting portion and a peripheral portion surrounding the substrate mounting portion. An edge portion of a top surface of the substrate mounting portion may be anodized. A central portion of the top surface of the substrate mounting portion may not be anodized.
    Type: Application
    Filed: January 17, 2024
    Publication date: May 16, 2024
    Inventors: Yong Min Yoo, Seung Woo Choi, Dong Seok Kang, Jong Won Shon
  • Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
    Patent number: 11965262
    Abstract: A substrate supporting plate that may prevent deposition on a rear surface of a substrate and may easily unload the substrate. The substrate supporting plate may include a substrate mounting portion and a peripheral portion surrounding the substrate mounting portion. An edge portion of a top surface of the substrate mounting portion may be anodized. A central portion of the top surface of the substrate mounting portion may not be anodized.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: April 23, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Yong Min Yoo, Jong Won Shon, Seung Woo Choi, Dong Seok Kang
  • Mask for recycling and fabrication method thereof
    Patent number: 6340541
    Abstract: A recyclable mask which includes: a substrate which is optically transparent; a thin film having non-transparent-layer patterns on the substrate; a pair of mask frames placed on each marginal portion of upper and lower surface of the thin film; at least one mask frame holder fixing the mask frames and the thin film as a single body; a pellicle frame which is attached to a portion of top and bottom surfaces of each mask frame; and a pellicle attached to top and bottom surfaces of each pellicle frame and thus covering a center part of the thin film.
    Type: Grant
    Filed: August 26, 1998
    Date of Patent: January 22, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventor: Seung Seok Yoo
  • Viscous fluid discharging apparatus for manufacturing semiconductors having a removable bubble capturing portion
    Patent number: 5931349
    Abstract: A viscous fluid discharging apparatus is provided for removing air bubbles introduced during the passing of the viscous fluid before being supplied to the substrate. A viscous fluid discharging apparatus according to the present invention includes a viscous fluid storing container, a viscous fluid supplying pump, a viscous fluid filter, and a viscous fluid discharging mechanism provided with a final air bubble filtering means. The fluid material discharging mechanism includes a connecting portion formed on an end of a temperature adjusting mechanism connected to an outlet of the fluid material supplying pump, and a discharging gun. The discharging gun has a sealed joining portion for being sealed and joined to the connecting portion, an air bubble capturing portion for capturing air bubbles from within the viscous fluid, and a viscous fluid path for moving the viscous fluid to an outlet in a sealed state.
    Type: Grant
    Filed: May 9, 1996
    Date of Patent: August 3, 1999
    Assignee: LG Semicon, Ltd.
    Inventor: Seung-Seok Yoo