Abstract: A gas flow metrology system for a substrate processing system includes N primary valves selectively flowing gas from N gas sources, respectively, where N is an integer. N mass flow controllers are connected to the N primary valves, respectively, to flow N gases from the N gas sources, respectively. N secondary valves selectively flow gas from the N mass flow controllers, respectively. A gas flow path connects the N secondary valves to a flow metrology system located remote from the N secondary valves, wherein the gas flow path includes a plurality of gas lines. A controller is configured to perform a hybrid flow metrology by selectively using a first flow metrology and a second flow metrology that is different from the first flow metrology to determine an actual flow rate for a selected gas at a desired flow rate from one of the N mass flow controllers.

Abstract: A gas flow metrology system for a substrate processing system includes N primary valves selectively flowing gas from N gas sources, respectively, where N is an integer. N mass flow controllers are connected to the N primary valves, respectively, to flow N gases from the N gas sources, respectively. N secondary valves selectively flow gas from the N mass flow controllers, respectively. A gas flow path connects the N secondary valves to a flow metrology system located remote from the N secondary valves, wherein the gas flow path includes a plurality of gas lines. A controller is configured to perform a hybrid flow metrology by selectively using a first flow metrology and a second flow metrology that is different from the first flow metrology to determine an actual flow rate for a selected gas at a desired flow rate from one of the N mass flow controllers.

Abstract: The present invention discloses an architecture for a concurrent dual-band high-frequency receiver. The invention combines a concurrent dual-band front-end subsystem having a dual-band antenna, dual-band pre-amplifier filter and concurrent dual-band LNA with a novel image rejection downconverter to provide the functions of a typical receiver, including reception, amplification and downconversion of a signal in two discrete desired frequency bands simultaneously.

Abstract: The present invention relates to a concurrent multi-band amplifiers and to a monolithic, concurrent multi-band low noise amplifier (LNA). The inventive LNA includes a three-terminal active device, such as a transistor with a characteristic transconductance, gm, disposed on a semiconductor substrate. The active device has a control input terminal, an output terminal, and a current source terminal. The amplifier also includes an input impedance matching network system, Zin, and an output load network. Zin simultaneously and independently matches the frequency-dependent input impedance of the three-terminal active device to a predetermined characteristic impedance at two or more discrete frequency bands. The output load network simultaneously provides a voltage gain, Av, to an input signal at the amplifier input at each of the two or more discrete frequency bands.

Abstract: The present invention relates to a concurrent multi-band amplifiers and to a monolithic, concurrent multi-band low noise amplifier (LNA). The inventive LNA includes a three-terminal active device, such as a transistor with a characteristic transconductance, gm, disposed on a semiconductor substrate. The active device has a control input terminal, an output terminal, and a current source terminal. The amplifier also includes an input impedance matching network system, Zin, and an output load network. Zin simultaneously and independently matches the frequency-dependent input impedance of the three-terminal active device to a predetermined characteristic impedance at two or more discrete frequency bands. The output load network simultaneously provides a voltage gain, Av, to an input signal at the amplifier input at each of the two or more discrete frequency bands.

Abstract: The present invention discloses an architecture for a concurrent dual-band high-frequency receiver. The invention combines a concurrent dual-band front-end subsystem having a dual-band antenna, dual-band pre-amplifier filter and concurrent dual-band LNA with a novel image rejection downconverter to provide the functions of a typical receiver, including reception, amplification and downconversion of a signal in two discrete desired frequency bands simultaneously.

Abstract: The present invention relates to a concurrent multi-band amplifiers and to a monolithic, concurrent multi-band low noise amplifier (LNA). The inventive LNA includes a three-terminal active device, such as a transistor with a characteristic transconductance, gm, disposed on a semiconductor substrate. The active device has a control input terminal, an output terminal, and a current source terminal. The amplifier also includes an input impedance matching network system, Zin, and an output load network. Zin simultaneously and independently matches the frequency-dependent input impedance of the three-terminal active device to a predetermined characteristic impedance at two or more discrete frequency bands. The output load network simultaneously provides a voltage gain, Av, to an input signal at the amplifier input at each of the two or more discrete frequency bands.