Patents by Inventor Shagun P. MAHESHWARI

Shagun P. MAHESHWARI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11359722
    Abstract: A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.
    Type: Grant
    Filed: July 19, 2019
    Date of Patent: June 14, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Shagun P. Maheshwari, Yao-Hung Yang, King F. Lee, Andrew Yu, Aniruddha Pal, Tom K. Cho, Chien-Min Liao
  • Patent number: 11090893
    Abstract: A method of reclaiming a used seal includes boiling the used seal in a liquid, and after boiling the used seal in the liquid, baking the used seal. The boiling the used seal may include boiling for a predetermined boiling time in the liquid, and the baking the used seal may include baking the used seal for a predetermined bake time at a predetermined temperature.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: August 17, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Shagun P. Maheshwari, Yao-Hung Yang, Tom K. Cho, Yu-Chi Yeh, Andrew Yu, Aniruddha Pal, Siamak Salimian
  • Publication number: 20200079044
    Abstract: A method of reclaiming a used seal includes boiling the used seal in a liquid, and after boiling the used seal in the liquid, baking the used seal. The boiling the used seal may include boiling for a predetermined boiling time in the liquid, and the baking the used seal may include baking the used seal for a predetermined bake time at a predetermined temperature.
    Type: Application
    Filed: September 6, 2018
    Publication date: March 12, 2020
    Inventors: Shagun P. MAHESHWARI, Yao-Hung YANG, Tom K. CHO, Yu-Chi YEH, Andrew YU, Aniruddha PAL, Siamak SALIMIAN
  • Publication number: 20200025292
    Abstract: A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose non-damaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.
    Type: Application
    Filed: July 19, 2019
    Publication date: January 23, 2020
    Inventors: Shagun P. MAHESHWARI, Yao-Hung YANG, King F. LEE, Andrew YU, Aniruddha PAL, Tom K. CHO, Chien-Min LIAO