Patents by Inventor Shalomo Sarel

Shalomo Sarel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, system and medium for controlling manufacture process having multivariate input parameters
    Patent number: 7966087
    Abstract: A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes calculating a set of predicted output values, and obtaining a prediction model based on a set of input parameters, the set of predicted output values, and empirical output values. Each input parameter causes a change in at least two outputs. The method also includes optimizing the prediction model by minimizing differences between the set of predicted output values and the empirical output values, and adjusting the set of input parameters to obtain a set of desired output values to control the manufacturing apparatus. Obtaining the prediction model includes transforming the set of input parameters into transformed input values using a transformation function of multiple coefficient values, and calculating the predicted output values using the transformed input values.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: June 21, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel, Arulkumar P. Shanmugasundram, Alexander T. Schwarm, Young Jeen Paik
  • Method, system and medium for controlling manufacture process having multivariate input parameters
    Publication number: 20080021571
    Abstract: A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes calculating a set of predicted output values, and obtaining a prediction model based on a set of input parameters, the set of predicted output values, and empirical output values. Each input parameter causes a change in at least two outputs. The method also includes optimizing the prediction model by minimizing differences between the set of predicted output values and the empirical output values, and adjusting the set of input parameters to obtain a set of desired output values to control the manufacturing apparatus. Obtaining the prediction model includes transforming the set of input parameters into transformed input values using a transformation function of multiple coefficient values, and calculating the predicted output values using the transformed input values.
    Type: Application
    Filed: July 31, 2007
    Publication date: January 24, 2008
    Inventors: Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel, Arulkumar Shanmugasundram, Alexander Schwarm, Young Paik
  • Method, system and medium for controlling manufacture process having multivariate input parameters
    Patent number: 7272459
    Abstract: A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs. The method also includes the step of storing values of the identified inputs and corresponding empirical output values along with predicted output values. The predicted output values are calculated based on, in part, the values of the identified inputs. The method also includes the step of calculating a set of transform coefficients by minimizing a score equation that is a function of differences between one or more of the empirical output values and their corresponding predicted output values.
    Type: Grant
    Filed: November 14, 2003
    Date of Patent: September 18, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel, Arulkumar P. Shanmugasundram, Alexander T. Schwarm, Young Jeen Paik
  • Method, system and medium for controlling manufacture process having multivariate input parameters
    Publication number: 20040225377
    Abstract: A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs. The method also includes the step of storing values of the identified inputs and corresponding empirical output values along with predicted output values. The predicted output values are calculated based on, in part, the values of the identified inputs. The method also includes the step of calculating a set of transform coefficients by minimizing a score equation that is a function of differences between one or more of the empirical output values and their corresponding predicted output values.
    Type: Application
    Filed: November 14, 2003
    Publication date: November 11, 2004
    Inventors: Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel, Arulkumar P. Shanmugasundram, Alexander T. Schwarm, Young Jeen Paik