Patents by Inventor Shang-Chih Chen

Shang-Chih Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240128252
    Abstract: The present application discloses a semiconductor structure. The semiconductor structure a top die and a bottom die, and the maximum die size is constrained to reticle dimension. Each die includes (1) core: computation circuits, (2) phy: analog circuit connecting to memory, (3) I/O: analog circuit connecting output elements, (4) SERDES: serial high speed analog circuit, (5) intra-stack connection circuit, and (6) cache memory. This semiconductor structure can be chapleted design for high wafer yield with least tape out masks for cost saving. The intra-stack connection circuit connects the top die and the bottom die in the shortest distance (about tens of micrometers), so as to provide high signal quality and power efficiency.
    Type: Application
    Filed: October 17, 2022
    Publication date: April 18, 2024
    Inventors: TZU-WEI CHIU, CHUN-WEI CHANG, SHANG-PIN CHEN, WEI-CHIH CHEN, CHE-YEN HUANG
  • Publication number: 20240120282
    Abstract: The present application discloses a semiconductor structure and methods for manufacturing semiconductor structures. The semiconductor structure includes a plurality of bottom dies and a top die stacked on the bottom dies. The bottom dies receive power supplies through tiny through silicon vias (TSVs) formed in backside substrates of the bottom dies, while the top die receives power supplies through dielectric vias (TDVs) formed in a dielectric layer that covers the bottom dies. By enabling backside power delivery to the bottom die, more space can be provided for trace routing between stacked dies. Therefore, greater computation capability can be achieved within a smaller chip area with less power loss.
    Type: Application
    Filed: February 20, 2023
    Publication date: April 11, 2024
    Inventors: TZU-WEI CHIU, CHUN-WEI CHANG, SHANG-PIN CHEN, WEI-CHIH CHEN, CHE-YEN HUANG
  • Patent number: 11937932
    Abstract: An acute kidney injury predicting system and a method thereof are proposed. A processor reads the data to be tested, the detection data, the machine learning algorithm and the risk probability comparison table from a main memory. The processor trains the detection data according to the machine learning algorithm to generate an acute kidney injury prediction model, and inputs the data to be tested into the acute kidney injury prediction model to generate an acute kidney injury characteristic risk probability and a data sequence table. The data sequence table lists the data to be tested in sequence according to a proportion of each of the data to be tested in the acute kidney injury characteristics. The processor selects one of the medical treatment data from the risk probability comparison table according to the acute kidney injury characteristic risk probability.
    Type: Grant
    Filed: July 8, 2022
    Date of Patent: March 26, 2024
    Assignees: TAICHUNG VETERANS GENERAL HOSPITAL, TUNGHAI UNIVERSITY
    Inventors: Chieh-Liang Wu, Chun-Te Huang, Cheng-Hsu Chen, Tsai-Jung Wang, Kai-Chih Pai, Chun-Ming Lai, Min-Shian Wang, Ruey-Kai Sheu, Lun-Chi Chen, Yan-Nan Lin, Chien-Lun Liao, Ta-Chun Hung, Chien-Chung Huang, Chia-Tien Hsu, Shang-Feng Tsai
  • Patent number: 9711413
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer.
    Type: Grant
    Filed: October 12, 2015
    Date of Patent: July 18, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Publication number: 20160035627
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer.
    Type: Application
    Filed: October 12, 2015
    Publication date: February 4, 2016
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Patent number: 9159629
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: October 13, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Patent number: 8759185
    Abstract: A MOSFET includes a gate having a high-k gate dielectric on a substrate and a gate electrode on the gate dielectric. The gate dielectric protrudes beyond the gate electrode. A deep source and drain having shallow extensions are formed on either side of the gate. The deep source and drain are formed by selective in-situ doped epitaxy or by ion implantation and the extensions are formed by selective, in-situ doped epitaxy. The extensions lie beneath the gate in contact with the gate dielectric. The material of the gate dielectric and the amount of its protrusion beyond the gate electrode are selected so that epitaxial procedures and related procedures do not cause bridging between the gate electrode and the source/drain extensions. Methods of fabricating the MOSFET are described.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: June 24, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Yen-Ping Wang, Hsien-Kuang Chiu, Liang-Gi Yao, Chenming Hu
  • Publication number: 20130323899
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer.
    Type: Application
    Filed: August 7, 2013
    Publication date: December 5, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Patent number: 8507951
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant than the buffer layer.
    Type: Grant
    Filed: December 9, 2008
    Date of Patent: August 13, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Patent number: 8256813
    Abstract: A suction head including a first transmission part, a second transmission part and a suction nozzle is provided. The second transmission part is magnetically attracted by the first transmission part to permit a displacement of the second transmission part relative to the first transmission part. The suction nozzle is disposed on the second transmission part and transmitted by the first transmission part via the second transmission part. Additionally, a transporting machine including a shuttle, a transporting mechanism and the aforementioned suction nozzle is provided. The shuttle is capable of carrying an object being transported, and the suction head is driven by the transporting mechanism to take the object being transported. The suction head and the transporting machine applying the same provide high transporting efficiency and ensuring a normal operation in transporting process.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: September 4, 2012
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventors: Jung-Lin Hsieh, Shang-Chih Chen, Hung-Tsung Chung
  • Publication number: 20120083076
    Abstract: A MOSFET includes a gate having a high-k gate dielectric on a substrate and a gate electrode on the gate dielectric. The gate dielectric protrudes beyond the gate electrode. A deep source and drain having shallow extensions are formed on either side of the gate. The deep source and drain are formed by selective in-situ doped epitaxy or by ion implantation and the extensions are formed by selective, in-situ doped epitaxy. The extensions lie beneath the gate in contact with the gate dielectric. The material of the gate dielectric and the amount of its protrusion beyond the gate electrode are selected so that epitaxial procedures and related procedures do not cause bridging between the gate electrode and the source/drain extensions. Methods of fabricating the MOSFET are described.
    Type: Application
    Filed: December 13, 2011
    Publication date: April 5, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Yen-Ping Wang, Hsien-Kuang Chiu, Liang-Gi Yao, Chenming Hu
  • Patent number: 8097924
    Abstract: A MOSFET includes a gate having a high-k gate dielectric on a substrate and a gate electrode on the gate dielectric. The gate dielectric protrudes beyond the gate electrode. A deep source and drain having shallow extensions are formed on either side of the gate. The deep source and drain are formed by selective in-situ doped epitaxy or by ion implantation and the extensions are formed by selective, in-situ doped epitaxy. The extensions lie beneath the gate in contact with the gate dielectric. The material of the gate dielectric and the amount of its protrusion beyond the gate electrode are selected so that epitaxial procedures and related procedures do not cause bridging between the gate electrode and the source/drain extensions. Methods of fabricating the MOSFET are described.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: January 17, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Yen-Ping Wang, Hsien-Kuang Chiu, Liang-Gi Yao, Chenming Hu
  • Publication number: 20110176900
    Abstract: A suction head including a first transmission part, a second transmission part and a suction nozzle is provided. The second transmission part is magnetically attracted by the first transmission part to permit a displacement of the second transmission part relative to the first transmission part. The suction nozzle is disposed on the second transmission part and transmitted by the first transmission part via the second transmission part. Additionally, a transporting machine including a shuttle, a transporting mechanism and the aforementioned suction nozzle is provided. The shuttle is capable of carrying an object being transported, and the suction head is driven by the transporting mechanism to take the object being transported. The suction head and the transporting machine applying the same provide high transporting efficiency and ensuring a normal operation in transporting process.
    Type: Application
    Filed: March 12, 2010
    Publication date: July 21, 2011
    Applicant: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Jung-Lin Hsieh, Shang-Chih Chen, Hung-Tsung Chung
  • Patent number: 7829978
    Abstract: An N-MOS and/or P-MOS device having enhanced performance such as an FET suitable for use in a CMOS circuit. The device comprises both an “L-like” shaped layer or spacer on the side walls of a gate structure as well as a CESL (contact-etch stop layer) that covers the gate structure and surrounding substrate to induce increase tensile stresses in the N-MOS device and increased compressive stresses in the P-MOS device.
    Type: Grant
    Filed: June 29, 2005
    Date of Patent: November 9, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shang-Chih Chen, Shih-Hsieng Huang, Chih-Hao Wang
  • Patent number: 7763945
    Abstract: A semiconductor device pair is provided. The semiconductor device pair comprises a semiconductor substrate comprising a first gate structure with a first type polarity and a second gate structure with a second type polarity, the first and the second gate structures comprise a high-K gate dielectric. A plurality of oxygen-free offset spacer portions are adjacent either side of the respective first and second gate structures, each comprising a stressed dielectric layer, to induce a desired strain on a respective channel region while sealing respective high-K gate dielectric sidewall portions, wherein the oxygen-free offset spacer portions adjacent either side of the first gate structure and the oxygen-free offset spacer portions adjacent either side of the second gate structure are formed with different shapes.
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: July 27, 2010
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen
  • Patent number: 7564108
    Abstract: A MOSFET having a nitrided gate dielectric and its manufacture are disclosed. The method comprises providing a substrate and depositing a non-high-k dielectric material on the substrate. The non-high-k dielectric comprises two layers. The first layer adjacent the substrate is essentially nitrogen-free, and the second layer includes between about 1015 atoms/cm3 to about 1022 atoms/cm3 nitrogen. The MOSFET further includes a high-k dielectric material on the nitrided, non-high-k dielectric. The high-k dielectric preferably includes HfSiON, ZrSiON, or nitrided Al2O3. Embodiments further include asymmetric manufacturing techniques wherein core and peripheral integrated circuit areas are separately optimized.
    Type: Grant
    Filed: April 27, 2005
    Date of Patent: July 21, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Ta-Wei Wang, Shang-Chih Chen, Ching-Wei Tsai
  • Publication number: 20090090935
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer.
    Type: Application
    Filed: December 9, 2008
    Publication date: April 9, 2009
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Patent number: 7465972
    Abstract: A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer.
    Type: Grant
    Filed: April 27, 2005
    Date of Patent: December 16, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Shang-Chih Chen, Ching-Wei Tsai, Ta-Wei Wang, Pang-Yen Tsai
  • Publication number: 20080258227
    Abstract: A semiconductor device pair is provided. The semiconductor device pair comprises a semiconductor substrate comprising a first gate structure with a first type polarity and a second gate structure with a second type polarity, the first and the second gate structures comprise a high-K gate dielectric. A plurality of oxygen-free offset spacer portions are adjacent either side of the respective first and second gate structures, each comprising a stressed dielectric layer, to induce a desired strain on a respective channel region while sealing respective high-K gate dielectric sidewall portions, wherein the oxygen-free offset spacer portions adjacent either side of the first gate structure and the oxygen-free offset spacer portions adjacent either side of the second gate structure are formed with different shapes.
    Type: Application
    Filed: April 18, 2007
    Publication date: October 23, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Hao Wang, Shang-Chih Chen
  • Patent number: 7355235
    Abstract: A semiconductor device and process including a high-k gate dielectric is described. A substrate is provided, and a high-k gate dielectric material, preferably amorphous HfSiON, is deposited over the substrate. In preferred embodiments, the high-k dielectric material includes nitrogen. In a preferred embodiment, a silicon nitride layer is deposited using jet vapor deposition (JVD) on the high-k dielectric material. When the JVD nitride layer is deposited according to preferred embodiments, the layer has a low density of charge traps, it maintains comparable carrier mobility and provides better EOT compared to oxide or oxynitride. A second nitrogen-containing layer formed between the high-k dielectric and the gate electrode acts as a diffusion barrier. It also reduces problems relating to oxygen vacancy formation in high-k dielectric and therefore minimizes Fermi-level pinning.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: April 8, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Ching-Wei Tsai, Shang-Chih Chen