Patents by Inventor Shankun DONG

Shankun DONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film vibration device and fabrication method thereof, and cleaning device including the same
    Patent number: 11969771
    Abstract: A method of fabricating a film vibration device, including: photoetching a surface of a silicon wafer to form a circular-hole array; etching an aluminum layer on the silicon wafer; etching the silicon wafer to form a through-hole array to obtain a porous silicon wafer; attaching a polyethylene terephthalate (PET) sheet to a side of the porous silicon wafer; ablating the PET sheet to obtain a porous PET film; attaching a polyvinylidene fluoride (PVDF) film to a lower side of the porous silicon wafer; performing vacuumization above the porous silicon wafer, while heating the PVDF film below the porous silicon wafer to create dome micro-structures on the PVDF film; and laminating the porous PET film on each of two sides of the PVDF film to obtain the film vibration device. This application also provides a cleaning device having the film vibration device.
    Type: Grant
    Filed: July 26, 2023
    Date of Patent: April 30, 2024
    Assignee: Guangdong University of Technology
    Inventors: Yun Chen, Biao Li, Aoke Song, Shankun Dong, Shengbao Lai, Maoxiang Hou, Xin Chen
  • FILM VIBRATION DEVICE AND FABRICATION METHOD THEREOF, AND CLEANING DEVICE INCLUDING THE SAME
    Publication number: 20230364657
    Abstract: A method of fabricating a film vibration device, including: photoetching a surface of a silicon wafer to form a circular-hole array; etching an aluminum layer on the silicon wafer; etching the silicon wafer to form a through-hole array to obtain a porous silicon wafer; attaching a polyethylene terephthalate (PET) sheet to a side of the porous silicon wafer; ablating the PET sheet to obtain a porous PET film; attaching a polyvinylidene fluoride (PVDF) film to a lower side of the porous silicon wafer; performing vacuumization above the porous silicon wafer, while heating the PVDF film below the porous silicon wafer to create dome micro-structures on the PVDF film; and laminating the porous PET film on each of two sides of the PVDF film to obtain the film vibration device. This application also provides a cleaning device having the film vibration device.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 16, 2023
    Inventors: Yun CHEN, Biao LI, Aoke SONG, Shankun DONG, Shengbao LAI, Maoxiang HOU, Xin CHEN