Patents by Inventor Shaun T. Smith

Shaun T. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for plasma ignition with a self-resonating device
    Patent number: 10076020
    Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: September 11, 2018
    Assignee: MKS Instruments, Inc.
    Inventors: Shaun T. Smith, Steven R. Walther, Chen Wu
  • Apparatus and Method for Plasma Ignition with a Self-Resonating Device
    Publication number: 20170303382
    Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.
    Type: Application
    Filed: July 6, 2017
    Publication date: October 19, 2017
    Inventors: Shaun T. Smith, Steven R. Walther, Chen Wu
  • Apparatus and method for plasma ignition with a self-resonating device
    Patent number: 9736920
    Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.
    Type: Grant
    Filed: February 6, 2015
    Date of Patent: August 15, 2017
    Assignee: MKS Instruments, Inc.
    Inventors: Shaun T. Smith, Steven R. Walther, Chen Wu
  • Apparatus and Method for Plasma Ignition with a Self-Resonating Device
    Publication number: 20160234924
    Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.
    Type: Application
    Filed: February 6, 2015
    Publication date: August 11, 2016
    Inventors: Shaun T. Smith, Steven R. Walther, Chen Wu