Patents by Inventor She Hyun OH

She Hyun OH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Purge nozzle module for load port
    Patent number: 11201072
    Abstract: A purge nozzle module for supplying nitrogen (N2) to a semiconductor wafer processing apparatus includes a nozzle body with a purge hole formed at a center thereof, and a vacuum pad combined with an upper side of the nozzle body, having a through hole connected to the purge hole formed therethrough, and making close contact with a bottom of a FOUP (Front Opening Unified Pod) by a vacuum pressure.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: December 14, 2021
    Assignee: AE CO., LTD.
    Inventors: She Hyun Oh, Joung Youn Kim
  • PURGE NOZZLE MODULE FOR LOAD PORT
    Publication number: 20200321231
    Abstract: A purge nozzle module for supplying nitrogen (N2) to a semiconductor wafer processing apparatus includes a nozzle body with a purge hole formed at a center thereof, and a vacuum pad combined with an upper side of the nozzle body, having a through hole connected to the purge hole formed therethrough, and making close contact with a bottom of a FOUP (Front Opening Unified Pod) by a vacuum pressure.
    Type: Application
    Filed: December 20, 2019
    Publication date: October 8, 2020
    Inventors: She Hyun OH, Joung Youn KIM