Abstract: Method and apparatus are set forth for providing a reactive radical species at a substrate surface. A wall structure defines an interior chamber. A substrate is mounted in the chamber at a target position therein with a surface region of the substrate oriented in a selected direction. A first vaporous chemical is introduced to the chamber with the first vaporous chemical flowing toward the surface region of the substrate. A first radical species is generated from the first vaporous chemical intermediate the position of introduction of the first vaporous chemical and the substrate surface region and at a pressure of no more than about 0.1 Torr without producing significant amounts of ionized species. The first radical species flows toward the surface region of the substrate. The chamber is evacuated and maintained at a pressure of .ltoreq.10.sup.-7 Torr during the introduction of the first vaporous chemical.

Abstract: A flexible electrically conducting cloth is described which comprises a plurality of intermingled or interwoven refractory fibers the sheet resistance of which exceeds 1,000 ohms per square inch and a conducting coating encapsulating a majority of the fibers, the coating including at least about 70 atomic percent carbon and being applied in sufficient quantity to render the cloth electrically conducting with a sheet resistance which lies between about 0.1 ohm per square inch and about 1,000 ohms per suqare inch. The cloth is useful as an electrical resistance heater, an electromagnetic shield, an electromagnetic reflector, or as an antenna. It is formulated by contacted substantially the entire surfaces of the intermingled or interwoven fibers with a carbon containing precursor, the fibers being at a temperature between about 700.degree. C. and 1200.degree. C., whereby the fibers are covered with a pyrolyzed coating formed from the precursor in an amount of at least about 0.001 weight percent.

Abstract: A conductive polymer is set forth which comprises a plurality of interconnected units. Each unit comprises a generally centrally positioned moiety and a ligand or set of ligands having a total dentation capability of three or more non-coplanar dentations and being positioned about the centrally positioned moiety, at least two of the dentations being parts of conjugated systems. The units are interconnected by having at least one ligand in common and the conjugation of the conjugated systems extend from one centrally positioned moiety to an adjacent centrally positioned moiety. Through proper selection of ligands and centrally positioned moieties, conductive polymers of various desired characters including intrinsically conductive polymers, p-type semiconductor polymers, n-type semiconductor polymers, p-type metal conducting polymers and a n-type metal conducting polymers can be constructed.