Patents by Inventor Shi K. Yao

Shi K. Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition of ordered crystalline films
    Patent number: 4297189
    Abstract: Deposition of ordered polycrystalline films of zinc oxide and other materials having a strongly preferred crystal growth direction and a high degree of symmetry about the preferred direction is achieved consistently by disposing a charged electrode in a sputtering chamber to limit bombardment of the film and underlying substrate by charged particles.
    Type: Grant
    Filed: June 27, 1980
    Date of Patent: October 27, 1981
    Assignee: Rockwell International Corporation
    Inventors: Elroy C. Smith, Jr., Shi K. Yao