Abstract: The control device includes a storage configured to store two or more functions indicating a relationship between the power source output and the ozone concentration corresponding to the power source output in accordance with different gas flow rates in the ozone generator. The control device obtains a first power source output corresponding to the set ozone concentration and a second power source output corresponding to the detected ozone concentration based on the set ozone concentration of the ozone generator, an index indicating the gas flow rate of the ozone generator, the detected ozone concentration, and the two or more functions, and executing feedback control of controlling the power source output based on a difference between the first power source output and the second power source output.

Abstract: Oxygen gas having a high purity is supplied to an electric discharge type ozonizer to generate ozone. An ozone density is prevented from decreasing without the use of nitrogen gas by adding moisture to the high-purity oxygen gas via a humidifier when the high-purity oxygen gas is supplied to an ozonizer from an oxygen gas source. Through the addition, the moisture volume in the high-purity oxygen gas supplied to the ozonizer is adjusted to be within the range of 0.05-40 ppm.

Abstract: A plate-type-ozonizer discharge cell including a pair of planar electrodes separated by a dielectric to ozonize a material gas circulating through a discharge space formed between one of the planar electrodes and the dielectric by way of discharge. In addition, the dielectric includes at least one ceramic block having a plurality of ceramic layers integrally superimposed on each other in a layer thickness direction. Also included is a method of manufacturing an ozonizer discharge cell, which includes providing a plurality of ceramic sheets to be baked, and superimposing the ceramic sheets in a layer thickness direction. Then the plurality of ceramic layers are baked so as to form a ceramic block.