Abstract: A vapor deposition method for depositing evaporated materials on a substrate using a mask includes arranging a mask frame and correcting a deflection of the mask frame in the direction of gravity after the mask frame is placed. The mask frame faces the substrate so that a first side is higher than a second side in a direction of gravity. The mask frame is provided with a mask and has the first side and the second side facing each other.

Abstract: A vapor deposition method for depositing evaporated materials on a substrate using a mask includes arranging a mask frame and correcting a deflection of the mask frame in the direction of gravity after the mask frame is placed. The mask frame faces the substrate so that a first side is higher than a second side in a direction of gravity. The mask frame is provided with a mask and has the first side and the second side facing each other.

Abstract: According to one embodiment, a laser annealing apparatus includes a laser device configured to emit a pulse laser beam, an anneal chamber including a stage on which a process substrate, on which an amorphous silicon thin film is formed, is placed, an optical module disposed between the laser device and the anneal chamber and configured to guide the pulse laser beam, which is emitted from the laser device, to the anneal chamber, a platform frame on which the laser device, the anneal chamber and the optical module are mounted, and an elastic body configured to lift the platform frame from a building floor.

Abstract: For the purpose of reducing noise entering from outside and cross talk to a practically negligible extent even when using covered conducting wire made of only conducting wires and insulators, a multi-probe unit has a plurality of probes for contact with a plurality of conductor patterns to be inspected which are aligned side by side, in which every two adjacent ones of the probes for contact with odd-numbered one and even-numbered one of the conductor patterns are positioned in upper and lower levels distant in the thickness direction, and a shield plate of a conductive material having an electrically shielding function is interposed between the upper and lower probes.

Abstract: An LC aligning substrate (3) is used for an LCD. The substrate is rubbed with a roller (5). The roller has irregularities on the surface thereof, or instead, one of the roller and substrate is vertically vibrated. As a result, the orientation of molecules at the surface of the substrate is finely changed to conceal sharp changes in the orientation of the surface molecules, thereby preventing the LCD from displaying defective rubbing stripes.