Abstract: A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.

Abstract: A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together.

Abstract: A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.

Abstract: A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates.

Abstract: A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together.

Abstract: A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.

Abstract: A signal processor (5) is coupled to a detector (6) for detecting a physical quantity. The signal processor has a zero adjustment memory (14) and a sensitivity adjustment memory (16). The zero adjustment memory and the sensitivity adjustment memory have a number of switches (20, 20A, 20', 20"), respectively. These switches are changed over digitally using a zener zapping method or a polysilicon fuse method at each switch to adjust the characteristics of the detector.

Abstract: An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.

Abstract: In a capacitance type accelerometer used for an air bag system etc., a plurality of grooves crossing each other are provided on the surface of a movable electrode which is arranged to face a fixed electrode at a portion having a gap thereinbetween, and end portions of each groove open to an outside space at the portion between the movable electrode and the fixed electrode. The grooves can be provided on surface of the fixed electrodes. Ventilation between inside and outside of the facing portion is improved by opening of the grooves to outside space, and air damping which is caused at operation of the movable electrode at the gap between the electrodes is reduced, and, consequently, response speed of the movable electrode is increased.

Abstract: A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap.

Abstract: Disclosed is an acceleration detector which has an electrically conductive mass portion formed at a free end of a cantilever, and fixed electrodes arranged opposite to the mass portion through a gap so that the value of acceleration is detected on the basis of the change of capacitance between the mass portion and the fixed electrodes, and in which at least one space is formed in the inside of the mass portion to lighten the weight of the mass portion to thereby widen the range of measurement.

Abstract: A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibrating signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accordance with the amount of the change in the response.

Abstract: A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate forming a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode and lead wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates.

Abstract: An accelerometer having a movable electrode which is moved according to acceleration with respect to a fixed electrode disposed in opposition to the movable electrode. An output device generates an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode. A pulse width modulator generates pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback device feeds back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulator between the movable electrode and the fixed electrode. As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.

Abstract: Light equipment is provided for irradiating the measuring object and forming light spot on it through the collimate lens. Reflected light from the measuring object is incident to the spatial filter through the objective lens for detecting the incidence position of the reflected light. A distance measuring circuit calculates contiuously the distance (d) between the objective lens and the measuring object by optical triangulation based on the output signal from the spatial filter. The frequency detecting circuit is connected to the spatial filter. When the sought running speed is V, the pitch between each equivalent light receiving element p, and the magnification of the optical image of the measuring object M, the frequency detecting circuit measures the frequency f which is given by the formula of F=MV/p. The calculator calculates the velocity V based on the output signal from the distance measuring circuit and on the output signal from the frequency detecting circuit.

Abstract: The present invention relates to an optical functional device of an optical waveguide type, particularly to an optical waveguide type with an organic nonlinear optical material suitable for the use in the fields of optical communication or optical information processing. In other words, the present invention provides an optical functional device having an organic nonlinear optical material as an optical waveguide embedded into the surface of a substrate and being an organic nonlinear optical material charged into a hollow part which is composed of a channel as a slit provided on the surface of said substrate and a further substrate for covering the upper part of the channel.

Abstract: An optical interconnection in a semiconductor integrated circuit includes an opaque coating provided on a surface of the integrated circuit chip. The opaque coating has therein an opening which is positioned above a light receiving element incorporated in the chip and is filled with a transparent material layer. The transparent layer may have a lens action and/or a wavelength-selectivity.

Abstract: The humidity-sensitive element of this invention is composed of an insulating substrate (1), a pair of electrodes (2, 3) mounted thereon, and a humidity-sensitive material (8) covering the electrodes. The humidity-sensitive material (8) has a property to change its electric resistance depending on the moisture content in the atmosphere and is formed from fine particles each having a hydrophobic core and a hydrophilic group-containing surface layer covering the core. This humidity-sensitive element exhibits a nearly linear relationship between logarithum of electric resistance and relative humidity and small hysteresis, permitting a precise measurement of relative humidity. Insulating substrate (1) and electrodes (2,3) are preferred to form from an insulating layer of silicon semiconductor and conductive monosilicon formed on it, respectively. This permits size reduction of humidity-sensitive elements or devices.

Abstract: The invention relates to a humidity sensor of electric resistance type whose electric resistance changes in accordance with an ambient humidity, characterized by a protective film of silicone resin provided on the surface of a humidity-sensitive material, and to a method for preparing the same. The protective film of silicone resin is formed by applying a varnish of siloxanes to the humidity-sensitive material and subjecting the varnish to reaction. The varnish can be of one-part curing system or two-part curing system, and desirably the reaction of siloxanes is a cross-linking reaction. The formed protective film is not influenced by swelling or shrinking of the humidity-sensitive material, and is prevented from flowing off due to a temperature rise, or from deposition of dusts, etc.