Abstract: An in-vehicle control device includes: a requested torque calculation unit which calculates a requested torque on the basis of a driving state of a vehicle; a requested torque change amount calculation unit which calculates the amount of change in requested torque per unit time as a requested torque change amount; an estimated generation torque calculation unit which calculates estimated generation torque estimated as being generated by an engine; an estimated generation torque change amount calculation unit which calculates the amount of change in estimated generation torque per unit time as an estimated generation torque change amount; and an abnormality detection unit which detects an abnormality of the engine on the basis of the integrated value of a difference between the requested torque change amount and the estimated generation torque change amount, and outputs abnormality determination for the engine.

Abstract: It has been difficult to appropriately determine the abnormality of a drive source due to the influence of variation in driving operation amount and operation state of a vehicle.

Abstract: A monitoring system for a sealing apparatus, the sealing apparatus configured to seal a substrate treatment apparatus by a housing and fill a space sealed by the housing with a predetermined gas atmosphere, the monitoring system includes: a laser sensor for a region, which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and a controller configured to output a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by the laser sensor or output a notification signal based on the detection result.

Abstract: An onboard control device has a drive manipulated variable detection unit (101) for determining a drive manipulated variable manipulated by a driver to impart a propulsive force to a vehicle, a command value calculation unit (109) for calculating a command value for a drive source of the vehicle based on the drive manipulated variable, a propulsive force control unit (115) for controlling the propulsive force based on the command value, operating state detection units (102, 103) for determining the operating states of the drive source, a drive manipulation rate of change calculation unit (110) for calculating the rate of change in drive manipulation, an operating state rate of change calculation unit (111) for calculating the rate of change in the operating state, and an abnormality detection unit (112) for detecting abnormalities in the drive source based on the rates of change in drive manipulation and the operating state.

Abstract: An onboard control device has a drive manipulated variable detection unit (101) for determining a drive manipulated variable manipulated by a driver to impart a propulsive force to a vehicle, a command value calculation unit (109) for calculating a command value for a drive source of the vehicle based on the drive manipulated variable, a propulsive force control unit (115) for controlling the propulsive force based on the command value, operating state detection units (102, 103) for determining the operating states of the drive source, a drive manipulation rate of change calculation unit (110) for calculating the rate of change in drive manipulation, an operating state rate of change calculation unit (111) for calculating the rate of change in the operating state, and an abnormality detection unit (112) for detecting abnormalities in the drive source based on the rates of change in drive manipulation and the operating state.

Abstract: To quickly determine whether or not the propulsive force of a vehicle drive source is abnormal.

Abstract: A substrate holding unit of a liquid processing apparatus holds a circular substrate horizontally and rotates the substrate about a vertical axis, and a chemical liquid nozzle supplies a chemical liquid to the peripheral edge of the substrate while the substrate is being rotated in order to remove a film of the peripheral edge. An image capture unit captures an image of the peripheral edge, and a determination unit calculates an actually removed value for a removed width of the film based on a result of the image capturing and determines whether the removed width is suitable or not.

Abstract: To quickly determine whether or not the propulsive force of a vehicle drive source is abnormal.