Abstract: A frame member for an electron beam lithography device of the present disclosure includes a frame body comprising sapphire or aluminum oxide-based ceramics having an open porosity of 0.2% or less and a conductive film disposed at least on a main surface of an electron gun side of the frame body.

Abstract: A frame member for an electron beam lithography device of the present disclosure includes a frame body comprising sapphire or aluminum oxide-based ceramics having an open porosity of 0.2% or less and a conductive film disposed at least on a main surface of an electron gun side of the frame body.

Abstract: A method of producing a flat tube T by bending a band-like material M to be worked, wherein the material M to be worked is pre-bent to form a pre-formed groove Md in the material M along the longitudinal center axis thereof. Thereafter, the material M to be worked is gradually moved so that both edge portions of the material M to be worked in the lengthwise direction thereof gradually approach each other with the pre-formed groove Md as a center to form a tubular shape.

Abstract: A ceramic substrate according to one aspect of the invention comprises a main surface wherein a diameter of a first imaginary circle inscribed in a circumference of the main surface is represented by C (m), a thickness of the ceramic substrate is represented by h (m), a Poisson ratio of the ceramic substrate is represented by ?, a density of the ceramic substrate is represented by ?(kg/m3), a Young's modulus of the ceramic substrate is represented by E(Pa), a deflection of the ceramic substrate is represented by X (m), the deflection being measured in a condition that the ceramic substrate is supported in a region between the first imaginary circle and a second imaginary circle which is a concentric circle of the first imaginary circle and has a diameter of C-0.01 (m), wherein X?1.5×(C4/h2)×A and A={3×9.807×?×(1??2)×(5+?)}/{28×(1+?)×E} are satisfied.

Abstract: A method of producing a flat tube T by bending a band-like material M to be worked, wherein the material M to be worked is pre-bent to form a pre-formed groove Md in the material M along the longitudinal center axis thereof. Thereafter, the material M to be worked is gradually moved so that both edge portions of the material M to be worked in the lengthwise direction thereof gradually approach each other with the pre-formed groove Md as a center to form a tubular shape.

Abstract: A ceramic substrate according to one aspect of the invention comprises a main surface wherein a diameter of a first imaginary circle inscribed in a circumference of the main surface is represented by C (m), a thickness of the ceramic substrate is represented by h (m), a Poisson ratio of the ceramic substrate is represented by ?, a density of the ceramic substrate is represented by ?(kg/m3), a Young's modulus of the ceramic substrate is represented by E(Pa), a deflection of the ceramic substrate is represented by X (m), the deflection being measured in a condition that the ceramic substrate is supported in a region between the first imaginary circle and a second imaginary circle which is a concentric circle of the first imaginary circle and has a diameter of C-0.01 (m), wherein X?1.5×(C4/h2)×A and A={3×9.807×?×(1??2)×(5+?)}/{28×(1+?)×E} are satisfied.

Abstract: A pinch valve of the invention comprising an elastic tube body 1, a cylinder body 4 having a cylinder portion 2 and a cylinder cover 3, a piston 11 sliding on the inner periphery of the cylinder body, a pressing piece 15 fixed to a connecting portion 13 suspended from the piston, a body 16 joined to the cylinder body and having a groove 17 receiving the tube body 1, a pair of connecting body carriers 20 engaged with grooves of the body and having a through-hole 26 receiving the tube body 1, a first and a second space portions 8, 7 formed above and under the piston 11, respectively, and a pair of air ports 10, 9 respectively communicating with the first and second space portions 8, 7. The whole pinch valve is made compact in construction.

Abstract: A pinch valve includes a body containing an elastic tube, a cylinder body having a first cylinder portion at the upper interior part and a larger diameter second cylinder portion at the lower interior part, a first piston sliding on the inner periphery of the first cylinder portion, and a second piston sliding on the inner periphery of the second cylinder portion. The first piston is installed with a first interlocking rod having a first pressing piece at its lower end and the second piston is provided with second interlocking rods having a second pressing piece at their lower ends. The pressing pieces press the tube body from the upper and lower sides, a spring is disposed between the second piston and the first pressing piece, and an opening in the cylinder body communicates with a space enclosed by the pistons and the cylinder body.

Abstract: A pinch valve of the invention comprising an elastic tube body 1, a cylinder body 4 having a cylinder portion 2 and a cylinder cover 3, a piston 11 sliding on the inner periphery of the cylinder body, a pressing piece 15 fixed to a connecting portion 13 suspended from the piston, a body 16 joined to the cylinder body and having a groove 17 receiving the tube body 1, a pair of connecting body carriers 20 engaged with grooves of the body and having a through-hole 26 receiving the tube body 1, a first and a second space portions 8, 7 formed above and under the piston 11, respectively, and a pair of air ports 10, 9 respectively communicating with the first and second space portions 8, 7.

Abstract: A pinch valve according to the invention comprising a body 18 containing an elastic tube 1; a cylinder body 6 having a first cylinder portion 3 at the upper part of the interior thereof and a second cylinder portion 4 with a diameter larger than that of the first cylinder portion at the lower part of the interior thereof; a first piston 7 sliding on the inner periphery of the first cylinder portion; and a second piston 12 sliding on the inner periphery of the second cylinder portion; wherein the first piston is installed with a first interlocking rod 8 having a first pressing piece 10 at the lower end thereof, the second piston is provided with second interlocking rods 13, 13 having a second pressing piece 14 at the lower ends thereof, the first and second pressing pieces are arranged to press the tube body from the upper and lower sides, a spring 15 urging the first pressing piece is disposed between the second piston and the first pressing piece, and the cylinder body is provided with an opening 27 communic

Abstract: A multi-purpose container which is constructed by easily assemblying standing main frame members, a bottom frame member, standing side frame members and a roof frame member. The multi-purpose container is easily disassembled, to small size, for recovery. The multi-purpose container further includes door members attached to the side frame members to thereby load and unload a variety of cargo.

Abstract: Disclosed is a novel roll-cargo transporting container which securely holds roll cargo in position by provision of sliding frame member below the top frame member and by effect of bracket members set to the bottom frame member and sliding frame member.

Abstract: Disclosed is a novel roll-cargo transporting container which securely holds roll cargo in position by provision of sliding frame member below the top frame member and by effect of bracket members set to the bottom frame member and sliding frame member.