Abstract: The present invention provides a TMR element manufacturing apparatus capable of reducing contamination of impurities in magnetic films. According to an embodiment of the present invention, a tunnel magneto-resistance element manufacturing apparatus includes: a load lock device to load and unload a substrate from and to an outside; a first substrate transfer device that is connected to the load lock device, at least one substrate process device being connected to the first substrate transfer device; a first evacuation unit provided in the first substrate transfer device; a second substrate transfer device that is connected to the first substrate transfer device, multiple substrate process devices being connected to the second substrate transfer device; and a second evacuation unit provided in the second substrate transfer device. At least one of the multiple substrate process devices connected to the second substrate transfer device is an oxidation device.

Abstract: A timepiece display plate, while obtaining reflection light having metal texture, allows partial light as a transmissive light to transmit to a solar cell and easily adapt to various types of dial plates. A timepiece display plate (150) for a timepiece (200) having a plate-like solar cell (130), includes a light transmissive dial plate (151) and a brightness improving film (brightness improving plate) separately disposed between the light transmissive dial plate (151) and the solar cell (130).

Abstract: A single-wafer substrate processing apparatus includes a substrate transfer chamber including a substrate transfer robot, a process chamber, connected to the substrate transfer chamber, for processing a substrate, and a plurality of port sets including (i) a load port, connected to the substrate transfer chamber for receiving an unprocessed substrate to be supplied to the substrate transfer robot, and (ii) an unload port connected to the substrate transfer chamber, as a member different from the load port, for receiving a processed substrate to be retrieved by the substrate transfer robot. Each of the plurality of port sets, the load port and the unload port are arranged adjacent to each other. The plurality of port sets is arranged apart from one another and around the substrate transfer chamber, and the load port and the unload port are adapted to be capable of vacuum exhaust and vacuum break independently of each other.

Abstract: This invention is directed to a microporous film comprising a 40 to 90 volume percent polyolefin having a number average molecular weight of 15,000 or more and a weight average molecular weight of less than 300,000 and a 10 to 60 volume percent inorganic filler and having a void space rate or porosity of 30 to 75 volume percent based on the volume of the film. The microporous film of such specific composition and structure has a desired wettability and a much reduced electrical resistance. Said resistance being as low as 0.0006 .OMEGA.dm.sup.2 /sheet. Said film has sufficient flexibility and mechanical strength to make it useful in wide variety of applications, especially as separators in batteries or electrolytical apparatuses etc.

Abstract: A microporous film which comprises a matrix comprising 40 to 90 volume percent of a polyolefin having a number average molecular weight of 15,000 or more and 10 to 60 volume percent of an inorganic filler, said matrix having therein void spaces at a rate of 30 to 75 volume percent based on the volume of the film; and 2 to 20 weight percent, based on the total weight of the polyolefin and the inorganic filler, of an organic substance which is substantially insoluble in and inert to sulfuric acid and has a solubility parameter ranging from 7.3 inclusive to 8.4 exclusive; said organic substance, in its majority, adhering to the overall surface of the film including the outer surfaces of the film and the surfaces of the polyolefin walls defining said void spaces in cooperation with said inorganic filler.

Abstract: A microporous film which comprises a matrix comprising 40 to 90 volume percent of a polyolefin having a number average molecular weight of 15,000 or more and 10 to 60 volume percent of an inorganic filler, said matrix having therein void spaces at a rate of 30 to 75 volume percent based on the volume of the film; and 2 to 20 weight percent, based on the total weight of the polyolefin and the inorganic filler, of an organic substance which is substantially insoluble in and inert to sulfuric acid and has a solubility parameter ranging from 7.3 inclusive to 8.4 exclusive; said organic substance, in its majority, adhering to the overall surface of the film including the outer surfaces of the film and the surfaces of the polyolefin walls defining said void spaces in cooperation with said inorganic filler.