Abstract: The present invention provides a method and apparatus for forming a zinc oxide thin film with high transparency and high conductivity on a surface of a flexible substrate such as plastic without the indispensable requirement of doping impurities. In the method of forming a zinc oxide thin film by reacting oxygen radicals and zinc atoms on a surface of a substrate placed in a film-forming chamber evacuated to a vacuum, the density of crystal defects that are defects of the atomic arrangement of the zinc oxide thin film is controlled by the temperature of the substrate, and the zinc oxide thin film is thereby formed. It is suitable to form the film while maintaining the temperature of the substrate at 400° C. or less to intentionally disturb the regularity of the atomic arrangement of the zinc oxide thin film.

Abstract: The present invention provides a method and apparatus for forming a zinc oxide thin film with high transparency and high conductivity on a surface of a flexible substrate such as plastic without the indispensable requirement of doping impurities. In the method of forming a zinc oxide thin film by reacting oxygen radicals and zinc atoms on a surface of a substrate placed in a film-forming chamber evacuated to a vacuum, the density of crystal defects that are defects of the atomic arrangement of the zinc oxide thin film is controlled by the temperature of the substrate, and the zinc oxide thin film is thereby formed. It is suitable to form the film while maintaining the temperature of the substrate at 400° C. or less to intentionally disturb the regularity of the atomic arrangement of the zinc oxide thin film.

Abstract: A three-dimensional laminated product forming apparatus and method for forming a three-dimensional laminated product from a photo-curable liquid by progressively superposing solid laminae one on top of another by photo-curing a surface layer of the photo-curable liquid and converting it to a solid lamina. A product table is provided on which a three-dimensional solid product is built up in progressive steps and which is incrementally advanced into the photo-curable liquid by a specified depth each step. A liquid surface leveling device works as a capillary to draw up a photo-curable liquid by capillary action while it is in contact with the surface of the photo-curable liquid contained in the container.

Abstract: A three-dimensional laminated product forming apparatus and method for forming a three-dimensional laminated product from a photo-curable liquid by progressively superposing solid laminae one on top of another by photo-curing a surface layer of the photo-curable liquid and converting it to a solid lamina. A product table is provided on which a three-dimensional solid product is built up in progressive steps and which is incrementally advanced into the photo-curable liquid by a specified depth each step. A liquid surface leveling device works as a capillary to draw up a photo-curable liquid by capillary action while it is in contact with the surface of the photo-curable liquid contained in the container.

Abstract: A three-dimensional laminated product forming apparatus and method for forming a three-dimensional laminated product from a photo-curable liquid by progressively superposing solid laminae one on top of another by photo-curing a surface layer of the photo-curable liquid and converting it to a solid lamina. A product table is provided on which a three-dimensional solid product is built up in progressive steps and which is incrementally advanced into the photo-curable liquid by a specified depth each step. A liquid surface leveling device works as a capillary to draw up a photo-curable liquid by capillary action while it is in contact with the surface of the photo-curable liquid contained in the container.