Abstract: The process fault analyzer includes a process data editing part for extracting a process characteristic quantity from process data in a time series stored in a process data storing part, a fault analysis rule data storing part for storing a fault analysis rule for performing fault detection on a product manufactured in a manufacturing system and on manufacturing equipment, based on the process characteristic quantity, and a fault determining part for determining existence/absence of a fault in a product and in manufacturing equipment based on the process characteristic quantity. A partial least square regression (PLS) model is used as an estimation model used for the fault analysis rule. Also, Q statistics and T2 statistics are used, and the fault determining part determines a fault in manufacturing equipment when values of the statistics are the same as set value or more.

Abstract: A process fault analyzer, capable of analyzing fault caused due to a process performed by a plurality of process equipments, is provided. The analyzer includes: a plurality of process data storing units which store process data of the respective process equipments; a process data editing unit which calculates process characteristic quantity from various kinds of process data stored on the process data storing units; a plurality of process characteristic quantity data storing units which store process characteristic quantity of the respective process equipments calculated by the process data editing unit; a process characteristic quantity integration unit which accesses the process characteristic quantity data storing units, extracts process characteristic quantity of the same wafer, and integrates them; and a fault determination unit which determines presence or absence of fault according to the integrated process characteristic quantity data integrated by the process characteristic quantity integration unit.

Abstract: A process fault analysis apparatus according to the present invention includes a process data editing unit which extracts process features from process data stored in a process data storage unit and stores the process features in a process feature data storage unit, a fault analysis rule data storage unit in which a fault analysis rule for performing fault detection and fault factor analysis from the process features is stored, a fault judgment unit which performs fault detection and fault factor analysis from the process features using the fault analysis rule, and a unit which outputs fault notification information when the fault judgment unit judges that the fault is generated. In the fault factor analysis, a contribution ratio indicating which process feature has how much influence on the fault is determined, and the process feature having the higher contribution ratio is set at the fault factor.

Abstract: A model generating apparatus includes: a first input device for inputting process state information; a second input device for inputting test result information; a characteristic quantity extracting device for extracting a process characteristic quantity from the process state information in each of the areas; and an analyzing device for generating a process-quality model by executing an analysis of data mining using the process characteristic quantity and the test result information associated with each other. The model generating apparatus further includes: a third input device for inputting process position information so that the process position information can be associated with the process state information; and a fourth input device for inputting test position information so that the test position information can be associated with test result information.