Abstract: An apparatus including a structure which separates a first transport robot (high temperature robot), which accesses a first processing part group including the thermal processing parts, from a second transport robot (low temperature robot) which accesses the only non-thermal processing parts. During circulating transportation of substrates to be processed, heat created at thermal processing parts is prevented from flowing into non-thermal processing parts. Semiconductor wafers are circulated one by one between the first processing part group which includes a hot plate and a second processing part group which does not include a hot plate and processed one at a time at each processing part. The high temperature robot accesses the first processing part group while the low temperature robot accesses the second processing part group. Transfer of a semiconductor wafer between the two robots is performed at a transfer part which is formed using a cool plate.

Abstract: An image scanning and recording method for compensating for a pyramidal error of a mirror surface of a rotating body having at least two reflective mirror surfaces by fine-adjusting an angle of a light beam incident on the rotating body. A scanning lens is put in such a manner that an optical axis of the scanning lens is orthogonal to a rotating axis of the rotating body. An angle made of the incident light beam and a main scanning plate is controlled so that equations (I) and (II) are selectively fulfilled, the main scanning plane being orthogonal to the rotating axis and including the optical axis:tan .alpha.=tan2.delta..multidot.cos(a-b) (I).alpha.=2.delta..multidot.cos(a-b) (II)where a: a rotating angle of a normal line standing on each mirror surface with respect to the optical axis of the scanning lens, b: an angle made of the incident beam and the optical axis of the scanning lens on the main scanning plane, and .delta.: the pyramidal error of each mirror surface with respect to the rotating axis.

Abstract: An image scanning and recording method and apparatus for compensating for a pyramidal error of a rotating body having at least two reflective mirror surfaces by fine-adjusting an angle of a light beam incident on the rotating body. A scanning lens having a scanning characteristic of f.multidot.sin.theta. is provided on an optical path of the light beam reflected on the rotating body in such a manner that an optical axis of the scanning lens is substantially orthogonal to a rotating axis of the rotating body. The angle of the light beam incident on the rotating body is deflected by a deflecting device within a plane including the rotating axis and the optical axis for each reflective mirror surface based on an equation:sin.alpha.=cos a.multidot.sin 2.delta..multidot.cos(i+.DELTA.)-cos 2.delta..multidot.sin(i+.DELTA.)wherein.alpha.: an angle made of the light beam reflected on the rotating body and a plane including the optical axis and being orthogonal to the rotating axis,.delta.

Abstract: A light beam deflection scanning method including the steps of: (a) finding data for cancelling distortion of a scanning track to be made on a surface of an object by a light beam focussed on the surface by a scanning lens, the distortion being caused by the lens; (b) directing the light beam at the surface through a scanning lens and deflecting the light beam in a main scanning direction; (c) detecting the position of the light beam on the surface; and the deflecting in step (b), deflecting the light beam in a subscanning direction by an amount based on the data, to thereby cancel the distortion of the scanning track.

Abstract: A linear light diffusing apparatus is formed of a transparent cylindrical rod. A white layer is formed on the outer periphery of the cylindrical rod along the longitudinal direction thereof. A plurality of elongated saw tooth shaped grooves are formed on the opposite side of the outer periphery. Light entering from one end of the transparent cylindrical rod is irregularly reflected by the white layer. The irregularly reflected light is refracted by the saw tooth shaped grooves to be linearly condensed at a prescribed position.

Abstract: Color separation image signals (Y, M, C, K) are converted into halftone dot image signals (Y.sub.d, M.sub.d, C.sub.d, K.sub.d) by a halftone block circuit (29). Red, green, blue and white beams are obtained from red, green and blue light sources (31R, 31G, 31B) or from a single white light source. These beams are modulated by acousto-optical modulators (32R, 32G, 32B, 35) responsive to the halftone dot image signals (Y.sub.d, M.sub.d, C.sub.d, K.sub.d) and thereafter converged onto a color photosensitive material (23), to produce a halftone dot color image on the color photosensitive material (23).

Abstract: Three linear image sensors (14B, 14G and 14R) read the image of an original (1) being moved along the subscanning direction (-Y), by receiving lights (L.sub.B, L.sub.G and L.sub.R) from respective instantaneous reading lines (W.sub.B, W.sub.G and W.sub.R), respectively. Scanning line switching clocks serving as sensor drive timing signals are supplied from a control circuit (20) to the linear image sensors, respectively. These clocks are time-shifted from each other by the time shift values calculated from deviations between the instantaneous reading positions and scanning line pitch, thereby the linear image sensors read common scanning lines.

Abstract: An optical system, useful for a flying-spot scanning apparatus includes a laser tube, an acousto-optical modulator, a deflecting mirror directing the laser beam in a first direction, and an objective lens having the characteristic of h=f.multidot.sin .theta., where h is the distance on an object between the optical axis and the point upon which the laser beam impinges, f is the focal length of the objective lens and .theta. is the angle formed by the beam entering the objective lens with respect to the optical axis. The objective lens includes a first optical unit having the negative focal length and a second optical unit having a positive focal length. The third-order distortion coefficient of the objective lens is approximately "1". Straight and parallel scanning loci can be effected on a recording medium, as the recording medium is fed in a second direction.

Abstract: An image scanning apparatus comprises a linear light source being arranged in parallel with a picture plane to be scanned. The linear light source is composed of a cylindrical rod made of a transparent material on which light diffusing reflecting layer of stripe-shaped is provided along a longitudinal axis of the cylindrical, rod and a lighting means for entering light fluxes into the inside of the rod at least from one end thereof to emit light fluxes each having directivity from the outer surface of the rod.

Abstract: A movable table system comprises a base horizontally mounted on a foundation with an intermediate base engaged with the base through first guides so as to be movable reciprocatively in one linear direction. A movable table is engaged with the intermediate base through second guides similar to the first guides so as to be movable reciprocatively in the same linear direction. A direct-acting type drive is interposed between the movable table and the intermediate base for providing relative movement between the table and the intermediate base. Preferably, the base is mounted on the foundation through vibration absorbers.

Abstract: Disclosed is a masking tape suitable for use in manufacturing a printed circuit board. The masking tape comprises a water soluble paper as a tape base material, and a water soluble adhesive agent applied to one side of the paper. A method of filling through-holes employing such a water soluble masking tape in a process of manufacturing a printed circuit board is also disclosed.