Abstract: An optical information recording and reproducing apparatus relating to the invention employs a two-beam interference method. In the optical information recording and reproducing apparatus, a moving device moves an information recording medium between a recording and reproducing position and a retracting position, and a mirror moves together with the information recording medium. When the information recording medium moves to the recording and reproducing position, the mirror moves to a position which is displaced from the at least one of the reference beam and the information beam. When the information recording medium moves to the retracting position, the mirror moves to a position where the mirror can reflect the at least one of the reference beam and the information beam toward a detector for detecting a deviation of the at least one of the reference beam and the information beam.

Abstract: An optical information recording and reproducing apparatus relating to the invention employs a two-beam interference method. In the optical information recording and reproducing apparatus, a moving device moves an information recording medium between a recording and reproducing position and a retracting position, and a mirror moves together with the information recording medium. When the information recording medium moves to the recording and reproducing position, the mirror moves to a position which is displaced from the at least one of the reference beam and the information beam. When the information recording medium moves to the retracting position, the mirror moves to a position where the mirror can reflect the at least one of the reference beam and the information beam toward a detector for detecting a deviation of the at least one of the reference beam and the information beam.

Abstract: In the optical information recording reproducing apparatus that makes a reference light beam to interfere with an information light beam so as to record the information of the information light beam in a recording medium based on a two light beam interference method, or irradiates the reference light beam to a recording medium so as to emit a light beam and reproduces information stored in the recording medium by leading the light beam emitted from the recording medium an the image light receiving element, the optical information recording reproducing apparatus comprises a detector to detect positional deviation of at least one of the reference light beam and the information light beam from a predetermined optical path; and a correcting mechanism to correct the positional deviation based on an output from the detector.

Abstract: A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.

Abstract: In a projection exposure apparatus and method in which a substrate is exposed with a projected image of a mask through a projection optical system, a table which is movable in a direction of an optical axis of the projection optical system in arranged at an image side of the projection optical system to hold the substrate. A tilt amount of the table is monitored, and position information of a mark on the table is detected, which changes in accordance with the tilt of the table. Information on the relationship between a displacement amount of the substrate and a plane perpendicular to the optical axis and the tilt angle of the substrate is obtained, based on the monitored tilt amount and the position information of the mark.

Abstract: A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.

Abstract: A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.

Abstract: An interferometric distance measuring interferometer comprises a light source (11) for irradiating a main light beam (L), a beam splitting member (56) for splitting the main light beam into a first light beam (MR1, MR2) and a second light beam (MM1, MM2), a first reflection member (28) and second reflection member (14) for reflecting the first light beam and the second light beam, respectively, an optical composition member (25) for compositing the first light beam reflected by the first reflection member (28) and the second light beam reflected by the second reflection member (14), and a photoelectric converter (19) for receiving the composited light beam from the optical composition member. Whereby, a relative displacement between the first reflection member (28) and the second reflection member (14) is detected based on a photoelectric conversion signal from the photoelectric converter (19).

Abstract: A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.