Patents by Inventor Shigeto Isakozawa
Shigeto Isakozawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8134131Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.Type: GrantFiled: December 8, 2008Date of Patent: March 13, 2012Assignee: Hitachi, Ltd.Inventors: Shohei Terada, Kazutoshi Kaji, Shigeto Isakozawa
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Patent number: 7928376Abstract: There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately.Type: GrantFiled: September 23, 2005Date of Patent: April 19, 2011Assignee: Hitachi, Ltd.Inventors: Kazutoshi Kaji, Kazuhiro Ueda, Koji Kimoto, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
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Patent number: 7923701Abstract: Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.Type: GrantFiled: April 24, 2008Date of Patent: April 12, 2011Assignee: Hitachi High-Technologies CorporationInventors: Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato, Atsushi Takane, Satoshi Yamaguchi
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Publication number: 20090302234Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.Type: ApplicationFiled: December 8, 2008Publication date: December 10, 2009Inventors: Shohei Terada, Kazutoshi Kaji, Shigeto Isakozawa
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Publication number: 20090242794Abstract: Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.Type: ApplicationFiled: April 24, 2008Publication date: October 1, 2009Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato, Atsushi Takane, Satoshi Yamaguchi
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Patent number: 7476872Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.Type: GrantFiled: July 11, 2007Date of Patent: January 13, 2009Assignee: Hitachi Ltd.Inventors: Shohei Terada, Kazutoshi Kaji, Shigeto Isakozawa
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Patent number: 7462830Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.Type: GrantFiled: August 6, 2004Date of Patent: December 9, 2008Assignee: Hitachi Ltd.Inventors: Shohei Terada, Kazutoshi Kaji, Shigeto Isakozawa
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Patent number: 7375330Abstract: Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodica structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.Type: GrantFiled: April 4, 2006Date of Patent: May 20, 2008Assignee: Hitachi High-Technologies CorporationInventors: Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato, Atsushi Takane, Satoshi Yamaguchi
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Patent number: 7372047Abstract: A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.Type: GrantFiled: January 21, 2005Date of Patent: May 13, 2008Assignee: Hitachi High-Technologies CorporationInventors: Mitsugu Sato, Atsushi Takane, Shigeto Isakozawa, Takashi Iizumi, Tatsuya Maeda, Hiromi Inada
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Publication number: 20070252091Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.Type: ApplicationFiled: July 11, 2007Publication date: November 1, 2007Inventors: Shohei Terada, Kazutoshi Kaji, Shigeto Isakozawa
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Patent number: 7250601Abstract: An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.Type: GrantFiled: March 10, 2006Date of Patent: July 31, 2007Assignee: Hitachi High-Technologies CorporationInventors: Kazutoshi Kaji, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
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Patent number: 7146872Abstract: Provision of a 3-DOF micro manipulator easy to operate and capable of executing accurate positioning, wherein the link mechanisms of the micro manipulator whose main operation is parallel 3-DOF operation are implemented by cutting, folding, and moding a sheet of metal plate. Base and end effector are connected by three link mechanisms. The three link mechanisms are manufactured by cutting and folding a flexible plate material, and are equipped with plate-like arm portions each having a spread in the axially peripheral direction of the end effector, with hinge portions that are formed longitudinally across each arm portion in order to function as revolving joints R, and with a hinge portion also formed at the middle position of the arm portion in order to function as revolving joints R. Also, a parallelogrammatic link is formed between one longitudinal end of the arm portion and the middle portion thereof in order to function as a prismatic joint pair P.Type: GrantFiled: August 8, 2002Date of Patent: December 12, 2006Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd., National Institute of Advanced Industrial Science and TechnologyInventors: Kazuhiro Morita, Motohide Ukiana, Kazuhiro Fujii, Shigeto Isakozawa, Hidemi Koike, Tamio Tanikawa
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Publication number: 20060219908Abstract: Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.Type: ApplicationFiled: April 4, 2006Publication date: October 5, 2006Inventors: Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato, Atsushi Takane, Satoshi Yamaguchi
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Publication number: 20060163479Abstract: An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.Type: ApplicationFiled: March 10, 2006Publication date: July 27, 2006Inventors: Kazutoshi Kaji, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
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Patent number: 7067805Abstract: An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.Type: GrantFiled: February 17, 2004Date of Patent: June 27, 2006Assignee: Hitachi High-Technologies CorporationInventors: Kazutoshi Kajl, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
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Publication number: 20060011836Abstract: There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately.Type: ApplicationFiled: September 23, 2005Publication date: January 19, 2006Inventors: Kazutoshi Kaji, Kazuhiro Ueda, Koji Kimoto, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
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Publication number: 20050189501Abstract: A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.Type: ApplicationFiled: January 21, 2005Publication date: September 1, 2005Inventors: Mitsugu Sato, Atsushi Takane, Shigeto Isakozawa, Takashi Iizumi, Tatsuya Maeda, Hiromi Inada
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Patent number: 6933501Abstract: The present invention provides an ultimate analyzer which displays an element distribution image of an object with high contrast and high accuracy. A scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer is also provided. The ultimate analyzer comprises a scattered electron beam detector for detecting an electron beam scattered by an object; an electron spectrometer for energy dispersing an electron beam transmitted through the object; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector.Type: GrantFiled: March 12, 2004Date of Patent: August 23, 2005Assignee: Hitachi, Ltd.Inventors: Kazutoshi Kaji, Takashi Aoyama, Shunroku Taya, Hiroyuki Tanaka, Shigeto Isakozawa
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Patent number: 6930306Abstract: A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.Type: GrantFiled: March 24, 2004Date of Patent: August 16, 2005Assignee: Hitachi High-Technologies CorporationInventors: Kazutoshi Kaji, Yoshifumi Taniguchi, Shigeto Isakozawa
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Publication number: 20050061971Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.Type: ApplicationFiled: August 6, 2004Publication date: March 24, 2005Inventors: Shohei Terada, Kazutoshi Kaji, Shigeto Isakozawa