Abstract: An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

Abstract: An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

Abstract: A plasma etching apparatus has a processing chamber in which a manufacturing process takes place, a monitoring window made of transparent material and disposed in one side of the chamber, and an optical end point detector that detects the end point of the process through the monitoring window. The monitoring window has a flute at an inner surface thereof facing the inside of the chamber. A heater supplies heat concentrated at the flute. The end point detector is optically aligned with the flute of the monitoring window. The geometry of the monitoring window, and the heat from the heater inhibit polymer created during the process within the chamber from depositing at the area of the window through which the process is observed by the end point detector, namely at the flute.

Abstract: A full time four wheel drive system has a housing in the vicinity of an engine and a transmission, a central differential gear assembly and a viscous coupling assembly containing a front differential gear assembly. The central differential gear, front wheel differential gear, and viscous coupling assemblies are disposed in parallel relationship within the housing for uniformly distributing the load of axle and drive shafts according to the road conditions. The system has a simple structure and economically uses the space in the engine compartment.