Patents by Inventor Shin-Yeh HUANG
Shin-Yeh HUANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9871137Abstract: The semiconductor device structures are provided. The semiconductor device structure includes a gate stack structure formed on a substrate and an isolation structure formed in the substrate. The semiconductor device structure further includes a source/drain stressor structure formed between the gate stack structure and the isolation structure and a metal silicide layer formed on the source/drain stressor structure. A portion of the metal silicide layer is below a top surface of the isolation structure.Type: GrantFiled: October 24, 2016Date of Patent: January 16, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shin-Yeh Huang, Kai-Hsiang Chang, Chih-Chen Jiang, Yi-Wei Peng, Kuan-Yu Lin, Ming-Shan Tsai, Ching-Lun Lai
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Patent number: 9716091Abstract: A fin field effect transistor (FinFET) including a first insulation region and a second insulation region and fin there between. A gate stack is disposed over a first portion of the fin. A strained source/drain material is disposed over a second portion of the fin. The strained source/drain material has a flat top surface extending over the first and second insulation regions. The first insulation region may include a tapered top surface.Type: GrantFiled: June 27, 2016Date of Patent: July 25, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ta Lin, Chu-Yun Fu, Hung-Ming Chen, Shu-Tine Yang, Shin-Yeh Huang
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Publication number: 20170040451Abstract: The semiconductor device structures are provided. The semiconductor device structure includes a gate stack structure formed on a substrate and an isolation structure formed in the substrate. The semiconductor device structure further includes a source/drain stressor structure formed between the gate stack structure and the isolation structure and a metal silicide layer formed on the source/drain stressor structure. A portion of the metal silicide layer is below a top surface of the isolation structure.Type: ApplicationFiled: October 24, 2016Publication date: February 9, 2017Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO.,Inventors: Shin-Yeh HUANG, Kai-Hsiang CHANG, Chih-Chen JIANG, Yi-Wei PENG, Kuan-Yu LIN, Ming-Shan TSAI, Ching-Lun LAI
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Publication number: 20160379977Abstract: A fin field effect transistor (FinFET) including a first insulation region and a second insulation region and fin there between. A gate stack is disposed over a first portion of the fin. A strained source/drain material is disposed over a second portion of the fin. The strained source/drain material has a flat top surface extending over the first and second insulation regions. The first insulation region may include a tapered top surface.Type: ApplicationFiled: June 27, 2016Publication date: December 29, 2016Inventors: Hung-Ta LIN, Chu-Yun FU, Hung-Ming CHEN, Shu-Tine YANG, Shin-Yeh HUANG
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Patent number: 9478617Abstract: Methods for forming a semiconductor device structure are provided. The method includes providing a substrate and forming an isolation structure in the substrate. The method also includes forming a gate stack structure on the substrate and etching a portion of the substrate to form a recess in the substrate, and the recess is adjacent to the gate stack structure. The method includes forming a stressor layer in the recess, and a portion of the stressor layer is grown along the (311) and (111) crystal orientations.Type: GrantFiled: October 29, 2015Date of Patent: October 25, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shin-Yeh Huang, Kai-Hsiang Chang, Chih-Chen Jiang, Yi-Wei Peng, Kuan-Yu Lin, Ming-Shan Tsai, Ching-Lun Lai
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Patent number: 9379215Abstract: A method of fabricating a fin field effect transistor (FinFET) including forming a first insulation region and a second insulation region and fin there between. The method further includes forming a gate stack over a portion of the fin and over a portion of the first and second insulation regions. The method further includes tapering the top surfaces of the first and second insulation regions not covered by the gate stack.Type: GrantFiled: December 7, 2015Date of Patent: June 28, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ta Lin, Chu-Yun Fu, Hung-Ming Chen, Shu-Tine Yang, Shin-Yeh Huang
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Publication number: 20160087079Abstract: A method of fabricating a fin field effect transistor (FinFET) including forming a first insulation region and a second insulation region and fin there between. The method further includes forming a gate stack over a portion of the fin and over a portion of the first and second insulation regions. The method further includes tapering the top surfaces of the first and second insulation regions not covered by the gate stack.Type: ApplicationFiled: December 7, 2015Publication date: March 24, 2016Inventors: Hung-Ta Lin, Chu-Yun Fu, Hung-Ming Chen, Shu-Tine Yang, Shin-Yeh Huang
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Publication number: 20160064486Abstract: Methods for forming a semiconductor device structure are provided. The method includes providing a substrate and forming an isolation structure in the substrate. The method also includes forming a gate stack structure on the substrate and etching a portion of the substrate to form a recess in the substrate, and the recess is adjacent to the gate stack structure. The method includes forming a stressor layer in the recess, and a portion of the stressor layer is grown along the (311) and (111) crystal orientations.Type: ApplicationFiled: October 29, 2015Publication date: March 3, 2016Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shin-Yeh HUANG, Kai-Hsiang CHANG, Chih-Chen JIANG, Yi-Wei PENG, Kuan-Yu LIN, Ming-Shan TSAI, Ching-Lun LAI
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Patent number: 9209300Abstract: A fin field effect transistor including a first insulation region and a second insulation region over a top surface of a substrate. The first insulation region includes tapered top surfaces, and the second insulation region includes tapered top surfaces. The fin field effect transistor further includes a fin extending above the top surface between the first insulation region and the second insulation region. The fin includes a first portion having a top surface below the tapered top surfaces of the first insulation region. The fin includes a second portion having a top surface above the tapered top surfaces of the first insulation region.Type: GrantFiled: July 22, 2014Date of Patent: December 8, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ta Lin, Chu-Yun Fu, Shin-Yeh Huang, Shu-Tine Yang, Hung-Ming Chen
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Patent number: 9202916Abstract: Embodiments for forming a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a gate stack structure formed on the substrate. The semiconductor device structure also includes gate spacers formed on sidewalls of the gate stack structure. The semiconductor device structure further includes an isolation structure formed in the substrate and a source/drain stressor structure formed adjacent to the isolation structure. The source/drain stressor structure includes a capping layer which is formed along the (311) and (111) crystal orientations.Type: GrantFiled: December 27, 2013Date of Patent: December 1, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shin-Yeh Huang, Kai-Hsiang Chang, Chih-Chen Jiang, Yi-Wei Peng, Kuan-Yu Lin, Ming-Shan Tsai, Ching-Lun Lai
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Publication number: 20150187940Abstract: Embodiments for forming a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a gate stack structure formed on the substrate. The semiconductor device structure also includes gate spacers formed on sidewalls of the gate stack structure. The semiconductor device structure further includes an isolation structure formed in the substrate and a source/drain stressor structure formed adjacent to the isolation structure. The source/drain stressor structure includes a capping layer which is formed along the (311) and (111) crystal orientations.Type: ApplicationFiled: December 27, 2013Publication date: July 2, 2015Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shin-Yeh HUANG, Kai-Hsiang CHANG, Chih-Chen JIANG, Yi-Wei PENG, Kuan-Yu LIN, Ming-Shan TSAI, Ching-Lun LAI
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Publication number: 20140327091Abstract: A fin field effect transistor including a first insulation region and a second insulation region over a top surface of a substrate. The first insulation region includes tapered top surfaces, and the second insulation region includes tapered top surfaces. The fin field effect transistor further includes a fin extending above the top surface between the first insulation region and the second insulation region. The fin includes a first portion having a top surface below the tapered top surfaces of the first insulation region. The fin includes a second portion having a top surface above the tapered top surfaces of the first insulation region.Type: ApplicationFiled: July 22, 2014Publication date: November 6, 2014Inventors: Hung-Ta LIN, Chu-Yun FU, Shin-Yeh HUANG, Shu-Tine YANG, Hung-Ming CHEN
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Patent number: 8809940Abstract: A FinFET is described, the FinFET includes a substrate including a top surface and a first insulation region and a second insulation region over the substrate top surface comprising tapered top surfaces. The FinFET further includes a fin of the substrate extending above the substrate top surface between the first and second insulation regions, wherein the fin includes a recessed portion having a top surface lower than the tapered top surfaces of the first and second insulation regions, wherein the fin includes a non-recessed portion having a top surface higher than the tapered top surfaces. The FinFET further includes a gate stack over the non-recessed portion of the fin.Type: GrantFiled: April 9, 2013Date of Patent: August 19, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ta Lin, Chu-Yun Fu, Shin-Yeh Huang, Shu-Tine Yang, Hung-Ming Chen
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Patent number: 8440517Abstract: The disclosure relates to a fin field effect transistor (FinFET). An exemplary structure for a FinFET comprises a substrate comprising a top surface; a first insulation region and a second insulation region over the substrate top surface comprising tapered top surfaces; a fin of the substrate extending above the substrate top surface between the first and second insulation regions, wherein the fin comprises a recessed portion having a top surface lower than the tapered top surfaces of the first and second insulation regions, wherein the fin comprises a non-recessed portion having a top surface higher than the tapered top surfaces; and a gate stack over the non-recessed portion of the fin.Type: GrantFiled: October 13, 2010Date of Patent: May 14, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ta Lin, Chu-Yun Fu, Shin-Yeh Huang, Shu-Tine Yang, Hung-Ming Chen
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Publication number: 20120091538Abstract: The disclosure relates to a fin field effect transistor (FinFET). An exemplary structure for a FinFET comprises a substrate comprising a top surface; a first insulation region and a second insulation region over the substrate top surface comprising tapered top surfaces; a fin of the substrate extending above the substrate top surface between the first and second insulation regions, wherein the fin comprises a recessed portion having a top surface lower than the tapered top surfaces of the first and second insulation regions, wherein the fin comprises a non-recessed portion having a top surface higher than the tapered top surfaces; and a gate stack over the non-recessed portion of the fin.Type: ApplicationFiled: October 13, 2010Publication date: April 19, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hung-Ta LIN, Chu-Yun FU, Shin-Yeh HUANG, Shu-Tine YANG, Hung-Ming CHEN