Patents by Inventor Shingo Shimogama

Shingo Shimogama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of modifying electrostatic chuck and plasma processing apparatus
    Patent number: 9558919
    Abstract: A method of modifying an electrostatic chuck that electrostatically attracts a processing object is provided. The method includes a gas supplying step of supplying a gas containing hydrogen (H) and oxygen (O) into a chamber accommodating the electrostatic chuck having a surface that is fluorinated; and a modifying step of turning the gas supplied to the chamber into plasma using a high frequency power, exposing the electrostatic chuck to the plasma, and modifying the fluorinated surface of the electrostatic chuck.
    Type: Grant
    Filed: December 9, 2013
    Date of Patent: January 31, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takamitsu Kondo, Shingo Shimogama
  • METHOD OF MODIFYING ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS
    Publication number: 20140158154
    Abstract: A method of modifying an electrostatic chuck that electrostatically attracts a processing object is provided. The method includes a gas supplying step of supplying a gas containing hydrogen (H) and oxygen (O) into a chamber accommodating the electrostatic chuck having a surface that is fluorinated; and a modifying step of turning the gas supplied to the chamber into plasma using a high frequency power, exposing the electrostatic chuck to the plasma, and modifying the fluorinated surface of the electrostatic chuck.
    Type: Application
    Filed: December 9, 2013
    Publication date: June 12, 2014
    Applicant: Tokyo Electron Limited
    Inventors: Takamitsu KONDO, Shingo Shimogama