Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: In order to be able to take an image of a specimen emitting low light in a short exposure time by a cooled CCD at about 0° C., a low-light specimen image pickup unit has an imaging optical system forming a specimen image of a specimen having a point light source emitting a low light, and the low-light specimen image pickup unit further has an image pickup unit having a plurality of pixels receiving incident light, for taking an image corresponding to the specimen image. In the low-light specimen image pickup unit, the imaging optical system is telecentric to a side of the specimen image of the imaging optical system, and condenses the low light emitted from the point light source to form an Airy disk of a size which is substantially the same as a pixel of the pixels, or which is smaller than the pixel. Here, the pixel receives the low light emitted from the point light source.

Abstract: An apparatus for performing surface measurement of an inspection-object surface and profile irregularity measurement and surface defect observation of an inspection-object lens using a Fizeau interferometric optical system.

Abstract: In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen.

Abstract: In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen.

Abstract: There is disclosed a method of irradiating a specimen which is laid on a substrate and which includes a cell with a laser beam to remove an unnecessary specimen portion other than a cell portion from the substrate, next inserting the cell portion into one opening in a cylindrical member to dispose the cylindrical member onto the substrate, next injecting a stripping agent into a container formed by the substrate and cylindrical member to strip the cell portion from the substrate, and sampling the cell portion which floats in the stripping agent.

Abstract: In order to be able to take an image of a specimen emitting low light in a short exposure time by a cooled CCD at about 0° C., a low-light specimen image pickup unit has an imaging optical system forming a specimen image of a specimen having a point light source emitting a low light, and the low-light specimen image pickup unit further has an image pickup unit having a plurality of pixels receiving incident light, for taking an image corresponding to the specimen image. In the low-light specimen image pickup unit, the imaging optical system is telecentric to a side of the specimen image of the imaging optical system, and condenses the low light emitted from the point light source to form an Airy disk of a size which is substantially the same as a pixel of the pixels, or which is smaller than the pixel. Here, the pixel receives the low light emitted from the point light source.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: There is disclosed a method of irradiating a specimen which is laid on a substrate and which includes a cell with a laser beam to remove an unnecessary specimen portion other than a cell portion from the substrate, next inserting the cell portion into one opening in a cylindrical member to dispose the cylindrical member onto the substrate, next injecting a stripping agent into a container formed by the substrate and cylindrical member to strip the cell portion from the substrate, and sampling the cell portion which floats in the stripping agent.

Abstract: A fluorescence reader of the present invention detects fluorescence from a sample present on a carrier or in a solution, and the fluorescence reader includes a light source which radiates parallel light, a projection lens which converges the light from the light source, an objective lens which irradiates the sample with the light converged in a rear-side focal position, an image forming lens which forms fluorescence emitted from the sample and passed through the objective lens into an image, a light receiving pinhole disposed in an image forming position of the image forming lens, and detector which detects the fluorescence passed through the light receiving pinhole.

Abstract: The present invention improves the observation efficiency and makes possible detecting predetermined data from cells in a culture by a small scale and simple scanning optical system. The invention provides a cell cultivating and detecting unit comprising a stationary light source that generates a collimated light, an irradiation unit that irradiates the cells with the collimated light incident from the light source and emits the light emitted from the cells; a detecting unit that detects the light emitted from the irradiation unit, and wherein the irradiation unit can move in a direction parallel to the collimated light.

Abstract: A fluorescence reader of the present invention detects fluorescence from a sample present on a carrier or in a solution, and the fluorescence reader includes a light source which radiates parallel light, a projection lens which converges the light from the light source, an objective lens which irradiates the sample with the light converged in a rear-side focal position, an image forming lens which forms fluorescence emitted from the sample and passed through the objective lens into an image, a light receiving pinhole disposed in an image forming position of the image forming lens, and detector which detects the fluorescence passed through the light receiving pinhole.

Abstract: There is disclosed a method of irradiating a specimen which is laid on a substrate and which includes a cell with a laser beam to remove an unnecessary specimen portion other than a cell portion from the substrate, next inserting the cell portion into one opening in a cylindrical member to dispose the cylindrical member onto the substrate, next injecting a stripping agent into a container formed by the substrate and cylindrical member to strip the cell portion from the substrate, and sampling the cell portion which floats in the stripping agent.

Abstract: The automatic focusing apparatus of this invention focuses the measuring beam emitted from a light source on a sample through one side of the pupil of an objective lens, causes light reflected by the sample to pass through the pupil of the objective lens again, focuses the light passing through the pupil of the objective lens on a light-receiving unit, and detects the spot position of the focused light. Especially, this automatic focusing apparatus has a first light-shielding member for shielding light reflected by the lower surface of a transparent thin plate in the vicinity of the focal point of the light reflected by the lower surface of the transparent thin plate, or a second light-shielding member for transmitting therethrough only light reflected by the upper surface of the transparent thin plate in the vicinity of the focal point of the light reflected by the upper surface of the transparent thin plate.

Abstract: A stereomicroscope comprising a pair of observation systems each comprising an objective lens and an eyepiece lens, a pair of light sources disposed above the objective lens for emitting a pair of light beams through a pair of beam splitters into the observation systems coaxially therewith, pairs of polarizers disposed on the side of the eyepiece lenses and the side of the light sources respectively so as to have polarizing surfaces perpendicular to each other, a quarter wavelength plate interposed between the objective lens and a sample to be observed, and a pair of light beam deflecting members disposed between the beam splitters and the objective lens.

Abstract: A stage driving device for optical examining apparatus has a pair of moving beds capable of traveling in directions perpendicular to each other, straight guide members mounted on the moving beds, driving knobs coaxially arranged to move the moving beds, and a transmission mechanism converting a rotary motion of each of the driving knobs into a rectilinear motion of each of the moving beds. By the operation of the transmission mechanism, the movements of the moving beds can be made in two directions perpendicular to each other, independently or simultaneously. Additionally, the wear of parts of the straight guide members and the transmission mechanism is minimal and the use of inexpensive parts and the ease of assembly makes it possible to reduce the cost of the entire device.

Abstract: A microscope apparatus in which an arm and a focusing adjustment are arranged to be detachable with respect to a foot base to make possible to change the length of the arm from an optical axis of an objective provided in the arm and an inner surface of a stand portion of the arm; a height of the arm; a stiffness of the focusing adjustment. In the apparatus according to the invention, since the arm having a different length or a different height and the focusing adjustment having a different stiffness can be selectively adapted to the foot base, it is possible to examine by one apparatus specimens having different dimensions.

Abstract: A turret condenser for microscopes is equipped with two turrets which are capable of interposing combinations of numerous types of optical elements on the optical axis and rotatably arranged in overlapped positions in the vicinity of the pupil of a condenser lens. Most of the optical elements are removably accommodated in each of the turrets. This turret condenser makes it possible to perform microscopy in various modes by simple operations.

Abstract: There is an indicating device constituted so as to be apt to indicate the data such as the magnification ratio of an objective lens, the value of NA, the data or the like in the visual field of a microscope and at the same time to record these data in photograph. This indicating device is provided with a display means (17) able to indicate various sorts of data informations through the data processor (16) and polarizing prisms (10, 11) arranged between the objective lens (9), display means (17), photographing lens (14) and eyepiece (13) to divide the light bundle from the objective lens (9) and the light bundle from the data display means (17) respectively and to make them advance to the eyepiece (13) and photographing lens (14), and the data informations displayed on the display means (17) are imaged on the image forming face (12) inside the eyepiece (13) and on the dry-plate (15).