Patents by Inventor Shinichi Horibe
Shinichi Horibe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7402473Abstract: A process of producing a semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step. The device is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: GrantFiled: April 19, 2005Date of Patent: July 22, 2008Assignees: Renesas Technology Corp., Hitachi ULSI Systems Co., Ltd.Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Patent number: 7397104Abstract: A semiconductor integrated circuit device is provided which includes an active region, a shallow groove isolation adjacent to the active region, and a semiconductor element formed in the active region and having a gate. The sum of a width of the active region and a width of the shallow groove isolation constitutes a minimum pitch in the direction of a gate width of the gate, and the width of the active region is set larger than one-half of the minimum pitch.Type: GrantFiled: February 17, 2004Date of Patent: July 8, 2008Assignee: Elpida Memory, Inc.Inventors: Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Keiji Okamoto, Shinichi Horibe, Kozo Watanabe, Yasuko Yoshida, Shuji Ikeda, Akira Takamatsu, Norio Ishitsuka, Atsushi Ogishima, Maki Shimoda
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Patent number: 7163871Abstract: A manufacturing method of a semiconductor device having a trench is provided to form, at a corner portion of the trench, an oxide film which is greater in thickness and smaller in stress than at other portions. When the trench formed in the semiconductor substrate is oxidized, it is oxidized in an oxygen environment containing dichloroethylene at a predetermined weight percent to allow the formation of an oxide film having a greater thickness at the corner portion of the trench than thickness at other portions, whereby the semiconductor device improving dielectric breakdown characteristics can be obtained.Type: GrantFiled: January 26, 2004Date of Patent: January 16, 2007Assignee: Elpida Memory, Inc.Inventors: Taishi Kubota, Yoshihiro Kitamura, Takuo Ohashi, Susumu Sakurai, Takayuki Kanda, Shinichi Horibe
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Publication number: 20050196935Abstract: A process of producing a semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step. The device is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: ApplicationFiled: April 19, 2005Publication date: September 8, 2005Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Patent number: 6881646Abstract: A process of producing a semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step. The device is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: GrantFiled: March 21, 2003Date of Patent: April 19, 2005Assignees: Renesas Technology Corp., Hitachi ULSI Systems Co., Ltd.Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Patent number: 6821854Abstract: A protection film is formed on a silicon oxide film 6 formed on the surface of a semiconductor substrate, a silicon oxide film is removed from a region where a thin gate-insulating film is to be formed by using, as a mask, a photoresist pattern that covers a region where a thick gate-insulating film is to be formed, and, then, the photoresist pattern is removed followed by washing. Then, the semiconductor substrate is heat-oxidized or a film is deposited thereon to form gate-insulating films having different thicknesses.Type: GrantFiled: August 5, 2002Date of Patent: November 23, 2004Assignee: Renesas Technology Corp.Inventors: Takayuki Kanda, Atsushi Hiraiwa, Norio Suzuki, Satoshi Sakai, Shuji Ikeda, Yasuko Yoshida, Shinichi Horibe
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Publication number: 20040214404Abstract: A manufacturing method of a semiconductor device having a trench is provided to form, at a corner portion of the trench, an oxide film which is greater in thickness and smaller in stress than at other portions. When the trench formed in the semiconductor substrate is oxidized, it is oxidized in an oxygen environment containing dichloroethylene at a predetermined weight percent to allow the formation of an oxide film having a greater thickness at the corner portion of the trench than thickness at other portions, whereby the semiconductor device improving dielectric breakdown characteristics can be obtained.Type: ApplicationFiled: January 26, 2004Publication date: October 28, 2004Inventors: Taishi Kubota, Yoshihiro Kitamura, Takuo Ohashi, Susumu Sakurai, Takayuki Kanda, Shinichi Horibe
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Publication number: 20040159883Abstract: A semiconductor integrated circuit device is provided which includes an active region, a shallow groove isolation adjacent to the active region, and a semiconductor element formed in the active region and having a gate. The sum of a width of the active region and a width of the shallow groove isolation constitutes a minimum pitch in the direction of a gate width of the gate, and the width of the active region is set larger than one-half of the minimum pitch.Type: ApplicationFiled: February 17, 2004Publication date: August 19, 2004Inventors: Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Keiji Okamoto, Shinichi Horibe, Kozo Watanabe, Yasuko Yoshida, Shuji Ikeda, Akira Takamatsu, Norio Ishitsuka, Atsushi Ogishima, Maki Shimoda
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Patent number: 6720234Abstract: Grooves are defined in a substrate having device isolation regions by dry etching using silicon nitride films and side wall spacers as masks. Thereafter, the side wall spacers lying on side walls of the silicon nitride films are removed and the substrate is subjected to thermal oxidation, whereby the surface of the substrate at a peripheral portion of each active region is subjected to so-called round processing so as to have a sectional shape having a convex rounded shape.Type: GrantFiled: February 14, 2003Date of Patent: April 13, 2004Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Keiji Okamoto, Shinichi Horibe, Kozo Watanabe, Yasuko Yoshida, Shuji Ikeda, Akira Takamatsu, Norio Ishitsuka, Atsushi Ogishima, Maki Shimoda
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Patent number: 6713353Abstract: A protection film is formed on a silicon oxide film 6 formed on the surface of a semiconductor substrate, a silicon oxide film is removed from a region where a thin gate-insulating film is to be formed by using, as a mask, a photoresist pattern that covers a region where a thick gate-insulating film is to be formed, and, then, the photoresist pattern is removed followed by washing. Then, the semiconductor substrate is heat-oxidized or a film is deposited thereon to form gate-insulating films having different thicknesses.Type: GrantFiled: March 28, 2000Date of Patent: March 30, 2004Assignee: Hitachi, Ltd.Inventors: Takayuki Kanda, Atsushi Hiraiwa, Norio Suzuki, Satoshi Sakai, Shuji Ikeda, Yasuko Yoshida, Shinichi Horibe
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Publication number: 20030181020Abstract: A process of producing a semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step. The device is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: ApplicationFiled: March 21, 2003Publication date: September 25, 2003Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Publication number: 20030148587Abstract: Grooves are defined in a substrate having device isolation regions by dry etching using silicon nitride films and side wall spacers as masks. Thereafter, the side wall spacers lying on side walls of the silicon nitride films are removed and the substrate is subjected to thermal oxidation, whereby the surface of the substrate at a peripheral portion of each active region is subjected to so-called round processing so as to have a sectional shape having a convex rounded shape.Type: ApplicationFiled: February 14, 2003Publication date: August 7, 2003Inventors: Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Keiji Okamoto, Shinichi Horibe, Kozo Watanabe, Yasuko Yoshida, Shuji Ikeda, Akira Takamatsu, Norio Ishitsuka, Atsushi Ogishima, Maki Shimoda
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Publication number: 20030119276Abstract: A semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step, there is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: ApplicationFiled: May 6, 2002Publication date: June 26, 2003Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Patent number: 6562695Abstract: Grooves are defined in a substrate having device isolation regions by dry etching using silicon nitride films and side wall spacers as masks. Thereafter, the side wall spacers lying on side walls of the silicon nitride films are removed and the substrate is subjected to thermal oxidation, whereby the surface of the substrate at a peripheral portion of each active region is subjected to so-called round processing so as to have a sectional shape having a convex rounded shape.Type: GrantFiled: July 10, 2001Date of Patent: May 13, 2003Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Keiji Okamoto, Shinichi Horibe, Kozo Watanabe, Yasuko Yoshida, Shuji Ikeda, Akira Takamatsu, Norio Ishitsuka, Atsushi Ogishima, Maki Shimoda
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Patent number: 6559027Abstract: A semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step, there is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: GrantFiled: May 1, 2001Date of Patent: May 6, 2003Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Publication number: 20030003639Abstract: A protection film is formed on a silicon oxide film 6 formed on the surface of a semiconductor substrate, a silicon oxide film is removed from a region where a thin gate-insulating film is to be formed by using, as a mask, a photoresist pattern that covers a region where a thick gate-insulating film is to be formed, and, then, the photoresist pattern is removed followed by washing. Then, the semiconductor substrate is heat-oxidized or a film is deposited thereon to form gate-insulating films having different thicknesses.Type: ApplicationFiled: August 5, 2002Publication date: January 2, 2003Inventors: Takayuki Kanda, Atsushi Hiraiwa, Norio Suzuki, Satoshi Sakai, Shuji Ikeda, Yasuko Yoshida, Shinichi Horibe
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Publication number: 20010026996Abstract: A semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step, there is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: ApplicationFiled: May 1, 2001Publication date: October 4, 2001Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Patent number: 6242323Abstract: A semiconductor device having a highly reliable groove isolation structure with a desired radius of curvature formed at the groove upper edge and without formation of any step, there is produced by reducing the stress generation around the groove upper edge of an element isolation groove on a semiconductor substrate, thereby optimizing the shape of an element isolation groove and making the device finer and improving the device electric characteristics.Type: GrantFiled: August 16, 1999Date of Patent: June 5, 2001Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda, Yasuko Yoshida, Hirohiko Yamamoto, Masamichi Kobayashi, Akira Takamatsu, Hirofumi Shimizu, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe
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Patent number: 6057241Abstract: A silicon oxide film 2 which is exposed from a side wall of a groove 4a is etched to displace the silicon oxide film 2 backward toward an active region. The displacement amount is set to be equal to or more than a film thickness (Tr) of a silicon oxide film 5 to be formed on an inner wall of the groove 4a in a later thermal oxidation step and equal to or less than twice the film thickness (Tr) thereof. A shoulder portion of the groove 4a can be rounded by a low-temperature heat treatment at 1000.degree. C. or less, by controlling a heat treatment period such that the film thickness (Tr) of the silicon oxide film 5 is more than the film thickness (Tp) of the silicon oxide film 2 and equal to or less than three times the film thickness (Tr) thereof (Tp<Tr.ltoreq.Type: GrantFiled: April 27, 1998Date of Patent: May 2, 2000Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Yasushi Matsuda, Hideo Miura, Hirohiko Yamamoto, Masamichi Kobayashi, Shuji Ikeda, Akira Takamatsu, Norio Suzuki, Hirofumi Shimizu, Yasuko Yoshida, Kazushi Fukuda, Shinichi Horibe, Toshio Nozoe