Abstract: A conveyance machine that conveys a load, the conveyance machine includes: a traveling unit; a vehicle body arranged above the traveling unit; a vessel provided on the vehicle body; a first detecting unit that detects a loading machine that loads a load on the vessel; and a processing unit that adjusts a position of the vessel according to a detected result of the first detecting unit so as the vessel to be positioned at a loading point where the loading machine performs loading.

Abstract: A mine management system (1) is used to mine ore from a vein in a mine including mining areas provided at the downside of the vein, a first mine shaft provided at the downside of the vein, and second mine shafts connecting the mining areas to the first mine shaft and includes: a transporting machine which loads the ore mined in the mining area and transports the ore to a soil discharge area while traveling in the first mine shaft; a loading machine which stays in the second mine shaft while a space used for the transporting machine to travel therein is left inside the first mine shaft, excavates the ore in the mining area, conveys the mined ore from the mining area in the opposite direction, and loads the ore on the transporting machine; and a management device which determines the mining area toward which the transporting machine is directed so that the operability of the loading machine becomes maximal or the operability of the transporting machine becomes maximal.

Abstract: A transport machine is provided with a traveling device, a vehicle body, a vessel, a support device and a load detection device. At least a portion of the vehicle body is arranged above the traveling device. The vessel is provided on the vehicle body. The support device includes a slide mechanism that moves the vessel in a lateral direction with respect to the vehicle body, the lateral direction intersecting with a traveling direction of the traveling device when the transport machine travels straight. The load detection device detects a state of a load on the vessel. The slide mechanism is controlled based on a result of detection by the load detection device.

Abstract: A mine mining system mining ore from a vein in a mine including a mining area provided inside an ore body, a first mine shaft provided inside the ore body, and a second mine shaft connecting the mining area and the first mine shaft to each other, the mine mining system includes: a transporting machine which loads the ore mined in the mining area and transports the ore to a soil discharge area while traveling in the first mine shaft; and a loading machine which stays in the second mine shaft, excavates the ore in the mining area, conveys the excavated ore in a direction moving away from the mining area, and loads the ore on the transporting machine.

Abstract: A mine management system to mine ore in a mine including a mining area, a first mine shaft, and a second mine shaft connecting the mining area and the first mine shaft, the mine management system includes: a transporting machine loading the ore mined in the mining area and transporting the ore to a soil discharge area while traveling in the first mine shaft; a loading machine staying in the second mine shaft while a space for the transporting machine to travel therein is left inside the first mine shaft, excavating the ore in the mining area, conveying the mined ore from the mining area in an opposite direction, and loading the mined ore on the transporting machine; and a management device determining a mining area in which the loading machine is disposed based on a difference between a production plan and an actual production amount of the mine.

Abstract: This tunnel excavation method includes a step of excavating three first tunnels that are substantially parallel to each other in a first excavation step. Second tunnels are excavated that intersect the first tunnels in a second excavation step. A boring machine is used that performs excavation in a state in which a gripper pushes against the side wall of the tunnel.

Abstract: An auxiliary tunneling apparatus includes a reaction force receiver and first and second split components. In the excavation of a second tunnel by a boring machine, the reaction force receiver forms a replacement face of a side wall of the second tunnel on a first tunnel side where the first and second tunnels intersect each other, and a gripper of the boring machine pushes against the replacement face. The first and second split components are installed to push against the side wall of the first tunnel, support the reaction force receiver within the first tunnel, and move back and forth with respect to the side wall of the first tunnel.

Abstract: This tunnel excavation method includes a step of excavating three first tunnels that are substantially parallel to each other in a first excavation step. Second tunnels are excavated that intersect the first tunnels in a second excavation step. A boring machine is used that performs excavation in a state in which a gripper pushes against the side wall of the tunnel.

Abstract: A pore- or particle-size distribution measurement apparatus is provided. When the size of a pore existing in a porous insulator film or the size of a particle in a thin film is measured, a specimen having the insulator film on the surface of a substrate is irradiated, from the surface side thereof, with X-rays at a specified incident angle larger than the total reflection critical angle of the insulator film but less than 1.3 times the total reflection critical angle of the substrate. In the irradiated X-rays, among components exiting from the insulator film without entering the pore and scattering of reflection component of the X-rays reflected on the surface of the substrate after having entered the insulator film, the scattered component whose exit angle is larger than that of a component of the reflection component which exits from the insulator film without entering the pore is detected.

Abstract: An apparatus and method for accurately analyzing transition metal such as iron and copper contained as impurities in a hafnium-containing film on a semiconductor substrate, which is a sample, is provided. Ir-L? rays selected and split by a monochromator from X rays generated from an X-ray tube having an anode containing iridium, is applied to the sample so as to totally reflect on a hafnium film of the sample, and the fluorescent X rays generated in a direction other than the total reflection direction are detected by a detector. This makes it possible not only to detect Fe—K? rays, but also to suppress generation of Hf-L? rays which interferes with detection of Cu—K rays, and to shift the upper limit energy of the Raman scattering to be small so as to cancel overlapping with Cu—K rays.

Abstract: A pore- or particle-size distribution measurement apparatus capable of measuring the size of a pore or a particle in a short time with high accuracy, is provided. When the size of a pore (Y) existing in a porous insulator film (3) or the size of a particle in a thin film is measured, a specimen (5) having the insulator film (3) formed on the surface of a substrate (4) is irradiated, from the surface side thereof, with X-rays R at a specified incident angle ?i larger than the total reflection critical angle of the insulator film (3) but not exceeding 1.3 times the total reflection critical angle of the substrate (4).

Abstract: An apparatus and method for accurately analyzing transition metal such as iron and copper contained as impurities in a hafnium-containing film on a semiconductor substrate, which is a sample, is provided. Ir-L? rays selected and split by a monochromator from X rays generated from an X-ray tube having an anode containing iridium, is applied to the sample so as to totally reflect on a hafnium film of the sample, and the fluorescent X rays generated in a direction other than the total reflection direction are detected by a detector. This makes it possible not only to detect Fe—K? rays, but also to suppress generation of Hf-L? rays which interferes with detection of Cu—K rays, and to shift the upper limit energy of the Raman scattering to be small so as to cancel overlapping with Cu—K rays.

Abstract: Measurement technique and apparatus for examining a region of a patterned surface such as an integrated circuit (IC). Excitation x-ray, neutron, particle-beam or gamma ray radiation is directed toward a two-dimensional sample area of the IC. Emissions (e.g., x-ray fluorescence—XRF) from the sample area are detected. A mask is placed in a planar radiation path formed by the source, detector and the sample area, and in one embodiment moveable relative to the sample area. The mask includes an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area. The invention allows predictive measurement of feature characteristics in active circuit regions of the IC, using sample areas outside of these regions.

Abstract: Measurement technique and apparatus for examining a region of a patterned surface such as an integrated circuit (IC). Excitation x-ray, neutron, particle-beam or gamma ray radiation is directed toward a two-dimensional sample area of the IC. Emissions (e.g., x-ray fluorescence—XRF) from the sample area are detected. A mask is placed in a planar radiation path formed by the source, detector and the sample area, and in one embodiment moveable relative to the sample area. The mask includes an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area. The invention allows predictive measurement of feature characteristics in active circuit regions of the IC, using sample areas outside of these regions.

Abstract: An X-ray analyzing apparatus includes an X-ray tube, a monochromator crystal for making an X-ray monochromic, a slit, a moving table for supporting a product to be tested such as a semiconductor wafer, a detector for detecting the intensity of the X-ray beam, a table controller for setting a three-dimensional position and an angle of the moving table, and another detector for detecting scattered X-rays or fluorescent X-rays from the test product. A slit is provided so as to be vertically movable between the test product and the detector and to define a pass position of the X-ray beam which enters the detector. Thus, an X-ray irradiation angle to the test product can be set quickly and at high precision.

Abstract: A tunneling machine intended to stably carry out gripper replacement by restricting the load imposed on gripper jacks for the main gripper as much as possible during excavation of an inclined shaft. Such a tunneling machine comprises (1) a main beam that extends along a tunnel wall, (2) a nose gripper disposed in front of the main beam for gripping the main beam against the wall of a pilot shaft and a main gripper disposed behind the main beam for gripping the main beam against the wall of a reamed shaft, (3) a main frame supported by the main beam so as to be slidable back and forth and supporting a cutter head at the front portion thereof, (4) a holding gripper (composed of a roof support, side support, vertical support) for gripping the main frame against the wall of the reamed shaft, (5) thrust jacks coupling the main frame to gripper shoes for the main gripper, and (6) retaining jacks coupling the main frame to a carrier.

Abstract: In an electronic image reproduction system, a halftone dot film of a density distribution of a specific pattern is produced by obtaining a value l expressed by an equation l=f(x)+g(y) representative of the specific pattern corresponding to the density value. By superimposing a density signal corresponding to the value l on an image signal developed by scanning an original, a reproduction image of the original, modulated by the density signal of a specific pattern, is obtained.