Abstract: An ozone generator (100) includes: a flow path (1) through which gas flows from an inlet (5) to an outlet (6); an ozone generation unit (3) disposed in the flow path (1); and an ozone sensor (4) disposed in the flow path (1) and upstream of the ozone generation unit (3). The flow path (1) has an upstream-side flow path (130) that forms a gas passing space (AR) located upstream of the ozone generation unit (3) and through which the gas flows from one side to another side in a predetermined direction. The inlet (5) is disposed closer to an outer circumferential portion (131) of the upstream-side flow path (130) than the ozone sensor (4).

Abstract: A semiconductor device includes: a semiconductor substrate including a support substrate, a buried insulating film, and an active layer stacked in the stated order; a trench isolation portion disposed in the active layer and dividing the active layer into a plurality of regions including an extracting region; and a contact electrode disposed in a through hole that is provided from a main surface of the semiconductor substrate to reach the support substrate in the extracting region, and electrically connected to the support substrate. A minimum width of a portion of the contact electrode being in contact with the support substrate is wider than a minimum width of a portion of the contact electrode located in the active layer.

Abstract: A process for producing an aryloxy-substituted phosphazene derivative represented by the formula(N.dbd.P).sub.n (OAr).sub.l Cl.sub.m-l R.sup.1.sub.p (III)which comprises reacting a chlorophosphazene derivative represented by the general formula(N.dbd.P).sub.n Cl.sub.m R.sup.1.sub.p (I)with, a hydroxy aryl compound represented by the general formulaHOAr (II)whereR.sup.1 represents hydroxy group, NH.sub.2 group, --OR.sup.4 group, --SR.sup.4 group or ##STR1## group, where R.sup.4, R.sup.5 and R.sup.6 represent independently an alkyl group, an alkenyl group, alkynyl group or an aryl group or one of R.sup.5 or R.sup.6 may be hydrogen or R.sup.5 and R.sup.

Abstract: Various kinds of organophosphazene polymers are produced by reacting dichlorophosphezene polymer with hydroxy compounds using a tertiary amine such as triethyl amine as an acid acceptor in the presence of pyridine derivative such as 4-dimethylaminopyridine as a catalyst under mild reaction conditions to substitute substantially all the chlorine atoms with organic groups.

Abstract: This invention relates to a process for producing phosphonitrile oligomers containing maleimido phenoxy groups.

Abstract: Phosphonitrile chloride oligomer, particularly, phosphonitrile chloride trimer, is produced in high yield while suppressing the formation of by-product phosphonitrile chloride tetramer, by reacting phosphorus pentachloride with ammonium chloride in an inert organic solvent, in the presence of a catalytic amount of a compound selected from the group consisting of quinoline, isoquinoline and their drivatives represented by the general formulae: ##STR1## wherein R stands for an alkyl group or a halogen atom and n stands for zero or an integer of 1 to 7,and pyridine derivatives represented by the general formula: ##STR2## wherein Q stands for a halogen atom or a hydroxyl group; R' stands for an alkyl group; m stands for an integer of 1 to 5 and p stands for zero of an integer of 1 to 4 with the proviso that the total number of m and p is from 1 to 5,and in the presence of a catalytic amount of a polyvalent metal compound.

Abstract: A process for preparing alkoxyphosphonitrile compounds.

Abstract: A process for the preparation of phosphonitrile chloride oligomer, particularly, phosphonitrile chloride trimer at a high yield while suppressing the by-production of phosphonitrile chloride tetramer by reacting phosphorus pentachloride and ammonium chloride in an inert organic solvent under the presence of a polyvalent metal compound catalyst, wherein a catalytic amount of a compound selected from the group consisting of pyridine and alkyl-substituted pyridine derivatives capable of forming chloropyridinium salts in reaction with phosphorus pentachloride is present in the reaction system.

Abstract: A process for completely separating tri(phosphonitrile chloride) from tetra(phosphonitrile chloride) and/or phosphonitrile chloride oligomer which includes vacuum distillation of the phosphonitrile chloride mixture together with an inert mixture of hydrocarbons as solvent.