Abstract: An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2) of which inside is held in vacuum, a placing section (3) that is disposed inside the vacuum section (2) and is capable of placing a workpiece thereon, a linear motor 4) that includes coils (415) and makes the placing section (3) travel within the vacuum section, wherein air is placed inside the placing section (3) while being isolated from the vacuum section (2), and the coils (415) of the linear motor (4) are disposed inside the placing section (3).

Abstract: A processing apparatus for processing a substrate G includes a processing chamber for processing the substrate; a depressurizing mechanism reducing an internal pressure of the processing chamber; and a transfer mechanism disposed in the processing chamber to transfer the substrate, wherein the transfer mechanism includes: a guide member; a stage for holding the substrate; a driving member for moving the stage; and a movable member supporting the stage and moving along the guide member. The guide member and the movable member are maintained so as not to contact each other by a repulsive force of magnets.

Abstract: There is provided a substrate processing system having high maintainability by widening a gap between various processing apparatuses connected with side surfaces of transfer modules and capable of achieving sufficient productivity by avoiding deterioration in throughput. The substrate processing system for manufacturing an organic EL device by forming a multiple number of layers including, e.g., an organic layer on a substrate includes at least one transfer module configured to be evacuable and arranged along a straight transfer route. Within the transfer module, a multiple number of loading/unloading areas for loading/unloading the substrate with respect to a processing apparatus and at least one stocking area positioned between the loading/unloading areas are alternately arranged along the transfer route in series, and the processing apparatus is connected with a side surface of the transfer module at a position facing each of the loading/unloading areas.

Abstract: An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2) of which inside is held in vacuum, a placing section (3) that is disposed inside the vacuum section (2) and is capable of placing a workpiece thereon, a linear motor 4) that includes coils (415) and makes the placing section (3) travel within the vacuum section, wherein air is placed inside the placing section (3) while being isolated from the vacuum section (2), and the coils (415) of the linear motor (4) are disposed inside the placing section (3).

Abstract: A processing apparatus for processing a substrate G includes a processing chamber for processing the substrate; a depressurizing mechanism reducing an internal pressure of the processing chamber; and a transfer mechanism disposed in the processing chamber to transfer the substrate, wherein the transfer mechanism includes: a guide member; a stage for holding the substrate; a driving member for moving the stage; and a movable member supporting the stage and moving along the guide member. The guide member and the movable member are maintained so as not to contact each other by a repulsive force of magnets.

Abstract: A deposition system is provided to avoid cross contamination in each layer formed in a manufacturing process of organic electroluminescent device, etc., and also provided to reduce footprint. Provided is an apparatus 13 for forming a film onto a substrate which includes a first deposition mechanism 35 for forming a first layer and a second deposition mechanism 36 for forming a second layer in a processing chamber 30. The apparatus 13 further includes an exhaust opening 31 through which inside of the processing chamber 30 is evacuated, and the first deposition mechanism 35 is positioned closer to the exhaust opening 31 than the second deposition mechanism 36. The first layer, for example, is formed on the substrate by an evaporation method by the first deposition mechanism 35 and the second layer, for example, is formed on the substrate by a sputtering method by the second deposition mechanism 36.

Abstract: A saddle type, off-road vehicle comprises a frame, including upper, lower and rear portions, an engine supported by the frame, a pair of rear wheels disposed on opposite sides of the main frame. The lower portion of the frame extends rearwardly and upwardly behind the engine and the rear portion of the frame extends substantially horizontally therefrom, while the upper portion of the frame extending rearwardly downwardly behind the seat terminates in the vicinity of a junction between the lower and rear portions of the frame.

Abstract: A saddle type, off-road vehicle, comprising a frame, an engine supported on the frame, at least one front wheel, a pair of rear wheels disposed on opposite sides of the frame, and a storage receptacle provided on the vehicle having at least a portion thereof positioned above the rear frame. The storage receptacle is positioned rearwardly of the major part of the frame and above the rear axle.

Abstract: A saddle type, off-road vehicle, comprising a frame, an engine supported on the frame, at least one front wheel, a pair of rear wheels disposed on opposite sides of the frame, and a storage receptacle having at least a portion thereof positioned above the rear frame. The storage receptacle having at least a portion thereof positioned rearwardly of the seat and the storage receptacle having an opening defined in an upper surface thereof, including a lid means for opening and closing the upper surface of the storage receptacle.

Abstract: A container for use in transporting refrigerated and/or frozen merchandise by transporting vehicle or the like together with other normal parcels and packages comprising an insulated container in which the refrigerated/frozen merchandise is stored and which is designed to be loaded onto and to be unloaded from the transporting vehicle or the like, and two refrigerating units for refrigerating the interior space thereof while at a warehouse or other facility and while carried on the transporting vehicle or the like. One of the refrigerating units is assembled on the transporting vehicle or the like and connectable with the container for the circulation of air between the container and the refrigerating unit. The other refrigerating unit is disposed on the container and operated by commercial electric power.

Abstract: A front brake apparatus in a motorized three-wheeled vehicle of the type that a wheel hub supported rotatably on a front wheel axle is provided with a brake drum fixed thereto. A brake panel fixed to the front wheel axle is so provided as to be positioned axially outside the brake drum. The brake panel is provided with brake shoes arranged to be brought into internal contact with the brake drum. The invention is characterized in that the brake panel is provided with a drum cover which extends to cover a surrounding portion of the brake drum and serves to tightly seal the surrounding portion through a seal member. The seal member is positioned in an inside space defined by a wheel rim attached to the wheel hub.

Abstract: A vehicle frame construction in a buggy with a riding saddle, includes a main frame extending longitudinally along a central axis of the buggy, the main frame having front and rear ends, and a pair of down tubes disposed one on each side of the main frame and having one ends fixed to sides of the front end of the main frame and opposite ends fixed to sides of the rear end of the main frame. Each of the down tubes is composed of a downwardly directed portion extending downwardly from the front end of the main frame and in a forward direction of the buggy, a horizontal portion extending substantially horizontally from the downwardly directed portion in a rearward direction of the buggy, and an upwardly directed portion extending substantially vertically upwardly from the horizontal portion to the rear end of the main frame.