Abstract: A method for producing a ceramic matrix composite is provided with: weaving a fabric from fibers of SiC; infiltrating SiC into pores in the fabric by vapor phase infiltration; executing solid phase infiltration by immersing the fabric after the vapor phase infiltration in an immersion liquid including a solvent, a SiC powder and a glass powder to infiltrate SiC and glass into the fabric; and executing liquid phase infiltration by immersing the fabric after the solid phase infiltration in an immersion liquid including a solvent and an organic silicon polymer and calcine the immersed fabric to infiltrate SiC into the fabric.

Abstract: A ceramic matrix composite component includes a first substrate and a second substrate each formed of a silicide-containing ceramic matrix composite, silicon carbide layers respectively coating a bonding surface of the first substrate and a bonding surface of the second substrate, and a bonding layer formed of a silicon-containing alloy and provided between the silicon carbide layer coating the bonding surface of the first substrate and the silicon carbide layer coating the bonding surface of the second substrate.

Abstract: A pair of electrodes is connected to a test specimen in order to apply an electric current to the test specimen in the direction of a conductive fiber of each conductive fiber woven fabric of a plurality of prepregs as targets for verification of the presence or absence of waviness, among a plurality of prepregs constituting the test specimen composed of a conductive composite material, and then a magnetic field sensor is relatively scanned over the test specimen, while applying an electric current between the pair of electrodes, to determine a portion of the test specimen where a magnetic field variation is detected by the scanning of the magnetic field sensor as a portion where waviness of the conductive fibers of the conductive fiber woven fabric of the plurality of prepregs as targets for verification of the presence or absence of waviness is present. Thus, it is possible to grasp, for example, the condition of fibers of the conductive composite material in the test specimen as a whole.

Abstract: A clip includes a pair of holding members arranged oppositely to one another to be capable of holding an elastic body therebetween, a base member, to which end portions of one side of the pair of holding members are coupled and at least one of the holding members is pivotably coupled, set on an object to be fixed, and pressing members provided on the holding members for pressing/retaining the elastic member between the pair of holding members.

Abstract: A pair of electrodes is connected to a test specimen in order to apply an electric current to the test specimen in the direction of a conductive fiber of each conductive fiber woven fabric of a plurality of prepregs as targets for verification of the presence or absence of waviness, among a plurality of prepregs constituting the test specimen composed of a conductive composite material, and then a magnetic field sensor is relatively scanned over the test specimen, while applying an electric current between the pair of electrodes, to determine a portion of the test specimen where a magnetic field variation is detected by the scanning of the magnetic field sensor as a portion where waviness of the conductive fibers of the conductive fiber woven fabric of the plurality of prepregs as targets for verification of the presence or absence of waviness is present. Thus, it is possible to grasp, for example, the condition of fibers of the conductive composite material in the test specimen as a whole.

Abstract: A battery cover includes side walls that cover four side faces of the battery, and a first spacer provided at a top portion of the side walls for providing a space between the battery and the side wall.

Abstract: A clip includes a pair of holding members arranged oppositely to one another to be capable of holding an elastic body therebetween, a base member, to which end portions of one side of the pair of holding members are coupled and at least one of the holding members is pivotably coupled, set on an object to be fixed, and pressing members provided on the holding members for pressing/retaining the elastic member between the pair of holding members.

Abstract: A structure, for use in a processing chamber of a plasma processing apparatus in which a plasma process is performed on a target substrate, includes a base member at least having a first surface and a second surface; and a thermally sprayed insulating film covering the first surface. Further, the structure includes an insulating protection member covering the second surface and made of a material having a linear expansion coefficient different from that of the base member; and an insulating layer interposed between the thermally sprayed insulating film and the insulating protection member to prevent a contact therebetween. The thermally sprayed insulating film, the insulating protection member and the insulating layer constitute an insulating surface covering the first surface and the second surface.

Abstract: A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel.

Abstract: A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel.

Abstract: A foam filling member having a foaming base material in sheet form which is simplified in structure so that it can be formed into a predetermined shape corresponding to a shape of a space of a structure with an improved working efficiency and can also be placed in a space of the structure with an improved working efficiency, without any need of the sticking to a wall surface of a partition wall defining the space of the structure. Incisions 4, 5, 6, 7, cut in partway along a thickness direction of the foaming base material 2 along a bending portion and cuts 9, 10 passing through in the thickness direction are formed in the foaming base material 2. By simply bending or folding the foaming base material 2 along the incisions 4, 5, 6, 7 and the cuts 9, 10, the foam filling member 1 can be formed in a three-dimensional shape corresponding to an interior space of a pillar and thus can be set in place in the interior space.

Abstract: A shield plate includes a flat plate shaped member; and a stress-concentrating portion which is formed over the entire surface of the flat plate shaped member and bends when an external force is applied.

Abstract: A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel.

Abstract: A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel.

Abstract: A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel.

Abstract: A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel.

Abstract: The plasma processing apparatus includes: a chamber including an upper electrode and a lower electrode; a matching box electrically connected to the lower electrode, wherein the matching box is freely attached and detached with respect to the lower electrode and supplies a radio frequency (RF) power to the lower electrode; and an air cylinder fixed at the chamber and pulling up the matching box to a position where the matching box is connected to the lower electrode. The lower electrode and the matching box are electrically connected to each other via a cylindrical female terminal connected to one of the lower electrode and the matching box and a male terminal connected to other one of the lower electrode and the matching box and inserted in an inner diameter surface of the female terminal, and at least one of the female terminal and the male terminal includes an elastic conductor covering a contact surface that contacts other one of the female terminal and the male terminal.

Abstract: A foam filling member having a foaming base material in sheet form which is simplified in structure so that it can be formed into a predetermined shape corresponding to a shape of a space of a structure with an improved working efficiency and can also be placed in a space of the structure with an improved working efficiency, without any need of the sticking to a wall surface of a partition wall defining the space of the structure. Incisions 4, 5, 6, 7, cut in partway along a thickness direction of the foaming base material 2 along a bending portion and cuts 9, 10 passing through in the thickness direction are formed in the foaming base material 2. By simply bending or folding the foaming base material 2 along the incisions 4, 5, 6, 7 and the cuts 9, 10, the foam filling member 1 can be formed in a three-dimensional shape corresponding to an interior space of a pillar and thus can be set in place in the interior space.

Abstract: The susceptor of a plasma treating device, or the electrostatic chuck of a substrate table, is formed by ceramic thermal spray method. A thermally sprayed ceramic layer is pore-sealed by methacrylic resin. Resin raw material mainly containing methyl methacrylate is applied to and impregnated into the thermally sprayed ceramic layer and then is cured to thereby fill pores between ceramic particles in the thermally sprayed ceramic layer with methacrylic resin. Methacrylic resin raw material solution, which does not produce pores at curing, can complete perfect pore sealing.

Abstract: A foam filling member having a foaming base material in sheet form which is simplified in structure so that it can be formed into a predetermined shape corresponding to a shape of a space of a structure with an improved working efficiency and can also be placed in a space of the structure with an improved working efficiency, without any need of the sticking to a wall surface of a partition wall defining the space of the structure. Incisions 4, 5, 6, 7, cut in partway along a thickness direction of the foaming base material 2 along a bending portion and cuts 9, 10 passing through in the thickness direction are formed in the foaming base material 2. By simply bending or folding the foaming base material 2 along the incisions 4, 5, 6, 7 and the cuts 9, 10, the foam filling member 1 can be formed in a three-dimensional shape corresponding to an interior space of a pillar and thus can be set in place in the interior space.