Abstract: A stage apparatus includes: a stage; a linear motor configured to drive the stage; a magnetic shield unit configured to surround the linear motor to shield a magnetic field generated by a magnet of the linear motor; and a degaussing coil located in a space surrounded by the magnetic shield unit and configured to degauss the magnetic shield unit.

Abstract: An optical-path conversion device includes: a plate-shaped phase modulation mask in which a plurality of phase modulation parts are discretely formed for providing phase modulation to light passing through, and a first light-transmission part is formed for transmitting the light; and a plate-shaped light-shielding member in which a plurality of light-shielding parts are discretely formed for blocking the light, and a second light-transmission part is formed for transmitting the light, in which the phase modulation mask and the light-shielding member overlap each other at least in part, when viewed in an incident direction of the light, and at least one of the phase modulation mask and the light-shielding member is movable in an intersection direction which intersects with the incident direction.

Abstract: An imprinting method forms a predetermined pattern in a resist surface of a substrate coated with a photo-curing type resist by using a mold having a pattern of projections and recesses formed in a transfer surface. The method includes an alignment step, a press step, a UV irradiation step, and a release step. The steps are performed in plural units selected from independent units, composite units, and combinations of independent units and composite units. The mold and the substrate are paired with each other and conveyed between the units. An imprinting apparatus includes plural units which perform the steps in the imprinting method and which are selected from independent units in each of which one step is executed, composite units in each of which plural of steps are executed, and combinations of independent units and composite units; and conveying devices which convey the mold and the substrate.

Abstract: A method for manufacturing with high productivity a magnetic recording medium having an MgO film is disclosed which uses a DC sputtering method. The method suppresses oxygen deficiency in the MgO film, and the MgO film has high crystallinity. The method includes at least a process of forming an intermediate layer of MgO on a nonmagnetic base by a reactive DC sputtering method that uses a target containing Mg and MgO in an oxygen-containing gas, and a process of forming a magnetic recording layer containing an L10 ordered alloy on the intermediate layer.

Abstract: A light reduction device for adjusting an amount of light reaching an imaging device includes: a light shielding plate in which light shielding parts are discretely formed for blocking the light, and a light transmission part is formed for transmitting the light; a first light reduction plate in which light reduction parts are discretely formed for reducing the amount of the light passing through, and a light transmission part is formed for transmitting the light; and a moving unit configured to move at least one of the light shielding plate and the first light reduction plate in a first direction which intersects with an incident direction of the light, in which the light shielding plate and the first light reduction plate overlap each other at least in part, when viewed from the incident direction of the light.

Abstract: A magnetic recording medium includes a substrate having sequentially formed thereon a magnetic layer; a protective layer having a thickness ranging from 1.0 nm to 2.5 nm and being composed of an amorphous metal layer having a thickness of at least 0.3 nm formed on the magnetic layer, and a carbon layer composed of amorphous carbon having a thickness of at least 0.3 nm formed on the amorphous metal layer; and a lubricating layer, wherein the carbon layer includes nitrogen atoms in a surface thereof in which a ratio of number of nitrogen atoms to total number of carbon atoms, nitrogen atoms, and oxygen atoms is 14 atomic % or less. Recording performance is improved by reducing the thickness of the protective layer thereof. A method of manufacturing the magnetic recording medium includes performing a nitrogen plasma treatment on a surface of the carbon layer that is effective to adjust the ratio.

Abstract: A method for manufacturing discrete track media and patterned media is disclosed which enables a magnetic recording layer having excellent magnetic characteristics to be obtained without imparting damage to a crystal orientation control layer which is at the surface when forming the magnetic recording layer. The method for manufacturing magnetic recording media comprises a process of forming a soft magnetic layer on a substrate; a process of forming a first crystal orientation control layer on the soft magnetic layer; a process of providing a depression in at least a portion of the first crystal orientation control layer; a process of performing heat treatment of the first crystal orientation control layer; and a process of forming a magnetic recording layer on the first crystal orientation control layer.

Abstract: A lens unit according to the present invention includes: a first lens group and a second lens group being disposed in series on the same optical axis to have a light-converging function, the first lens group and the second lens group each including at least one lens; a first lens barrel 1 retaining the first lens group; a second lens barrel 2 retaining the second lens group and encasing at least a portion of the first lens barrel; and an adjustment mechanism for adjusting relative positioning along an optical axis direction, tilt between respective optical axes, and mutual radial deviation, of the first lens barrel and the second lens barrel.

Abstract: A set of compound lenses according to the present invention forms, on an imaging device, an optical image of an object. The set of compound lenses includes a focus lens group including one or more lenses; a driving unit shifting a range of focus by moving the focus lens group within a predetermined range during an exposure period; and a correcting lens group correcting a shift in a position of an image formed on the imaging device to one pixel or less, the shift occurring when the focus lens group moves within the predetermined range.

Abstract: An optical-path conversion device includes: a plate-shaped phase modulation mask in which a plurality of phase modulation parts are discretely formed for providing phase modulation to light passing through, and a first light-transmission part is formed for transmitting the light; and a plate-shaped light-shielding member in which a plurality of light-shielding parts are discretely formed for blocking the light, and a second light-transmission part is formed for transmitting the light, in which the phase modulation mask and the light-shielding member overlap each other at least in part, when viewed in an incident direction of the light, and at least one of the phase modulation mask and the light-shielding member is movable in an intersection direction which intersects with the incident direction.

Abstract: A magnetic recording medium has both satisfactory SNRs at high frequencies and satisfactory squash resistance, and is suitable for higher density recording. The magnetic recording medium includes at least a soft magnetic underlayer and a magnetic recording layer on a non-magnetic substrate. The soft magnetic underlayer includes a first soft magnetic layer, a second soft magnetic layer, an exchange coupling control layer, a third soft magnetic layer, and a fourth soft magnetic layer stacked in this order from the non-magnetic substrate side. The first and fourth soft magnetic layers both have a characteristic frequency of relative permeability higher than a higher one of characteristic frequencies of relative permeability of the second and third soft magnetic layers, and the second and third soft magnetic layers both have a relative permeability higher than a higher one of the relative permeabilities of the first and fourth soft magnetic layers.

Abstract: A magnetic recording medium permits high recording densities while simultaneously satisfying requirements for the high-frequency SNR characteristic and the Squash characteristic. The magnetic recording medium includes at least a soft magnetic underlayer and a magnetic recording layer on a nonmagnetic substrate. The soft magnetic underlayer has a stacked structure that includes a soft magnetic layer on the nonmagnetic substrate side, an exchange coupling control layer, and a soft magnetic layer on the magnetic recording layer side. The soft magnetic layer on the magnetic recording layer side has a higher relative permeability characteristic frequency (the frequency at which the relative permeability is reduced by 50% compared with the relative permeability at 10 MHz) than the soft magnetic layer on the nonmagnetic substrate side, and the soft magnetic layer on the nonmagnetic substrate side has a higher relative permeability than the soft magnetic layer on the magnetic recording layer side.

Abstract: A light reduction device for adjusting an amount of light reaching an imaging device includes: a light shielding plate in which light shielding parts are discretely formed for blocking the light, and a light transmission part is formed for transmitting the light; a first light reduction plate in which light reduction parts are discretely formed for reducing the amount of the light passing through, and a light transmission part is formed for transmitting the light; and a moving unit configured to move at least one of the light shielding plate and the first light reduction plate in a first direction which intersects with an incident direction of the light, in which the light shielding plate and the first light reduction plate overlap each other at least in part, when viewed from the incident direction of the light.

Abstract: The present invention provides an exposure apparatus which forms a pattern on a substrate, the apparatus including an electron optical system configured to guide a charged particle beam onto the substrate, a stage configured to hold the substrate, an electromagnetic actuator configured to drive the stage, a magnetic shield which is placed in the stage so as to surround the electromagnetic actuator, a measurement member configured to measure a position of the stage, a coil member configured to generate a magnetic field on a path of the charged particle beam between the electron optical system and the substrate, and a control member configured to control the coil member so as to reduce a fluctuation of the magnetic field on the path, the magnetic field on the path fluctuating while the stage being driven by the electromagnetic actuator, based on the position of the stage measured by the measurement member.

Abstract: Spin coating method for a recording medium having a hole in the center, including moving a tip of a feeding nozzle to an initial position at a distance X above a recording surface and a distance A radially apart from a periphery of the hole, feeding a coating liquid onto the recording surface for a predetermined period of time while rotating the recording medium at a predetermined speed, and moving the tip from the initial position along a radial direction towards an outer periphery of the recording medium while keeping the tip above the recording surface at the distance X. X satisfies X?2 [3 r ?/(2 g C)]1/3, where ? and C respectively are surface tension and density of the coating liquid, r is the outer radius of the feeding nozzle, and g is the acceleration of gravity. A satisfies A?r+X/3.

Abstract: Disclosed are a magnetic recording medium for a heat-assisted recording device which has a high SNR at high density and a manufacturing method thereof. The magnetic recording medium includes, in the order recited: a non-magnetic substrate; a magnetic recording layer; a protective layer; and a liquid lubricating layer. The magnetic recording layer has a granular structure formed by a magnetic portion and a non-magnetic portion that surrounds the magnetic portion, the non-magnetic portion having a volume percentage based on the total volume of the granular structure ranging from 15 vol % to 30 vol % and including a carbon-based material. The magnetic recording medium has a surface having an arithmetic mean roughness Ra and an average length of roughness curve elements RSm such that Ra/RSm ranges from 0.05 to 0.15.

Abstract: A method for manufacturing with high productivity a magnetic recording medium having an MgO film is disclosed which uses a DC sputtering method. The method suppresses oxygen deficiency in the MgO film, and the MgO film has high crystallinity. The method includes at least a process of forming an intermediate layer of MgO on a nonmagnetic base by a reactive DC sputtering method that uses a target containing Mg and MgO in an oxygen-containing gas, and a process of forming a magnetic recording layer containing an L10 ordered alloy on the intermediate layer.

Abstract: The present invention provides an imprinting apparatus in which stampers, after a transfer step, can be readily and quickly detached from a substrate and an atmosphere in the imprinting apparatus is kept clean. The imprinting device has an ejecting mechanism for separating a recording medium substrate from a first stamper and a second stamper the ejecting mechanism being formed including a sleeve and a coil spring that are movably provided in a movable die base with an exhausting duct, and also including a sleeve and a coil spring that are movably provided in a fixed die base with an exhausting duct.

Abstract: An optical biological information measuring apparatus includes a measuring surface to be placed on the surface of a living body, a mark display section which displays a mark at a region to be measured on the surface of the living body, a light-emitting section which irradiates the living body with light of a predetermined wavelength and a light-receiving section which receives light irradiated onto the living body and returned from the living body, and measures information on the living body based on the received light. The optical biological information measuring apparatus is capable of measuring biological information with improved alignment accuracy.

Abstract: A magnetic transfer master substrate includes a non-magnetic base having depressed portions formed on a surface thereof corresponding to an information signal array, a ferromagnetic body formed in the depressed portions and having a top portion thereof protruding above the surface of the non-magnetic base, and a non-magnetic protective film covering the surface of the non-magnetic base, except for the depressed portion thereof, and also covering a side portion of the ferromagnetic body. A section through the ferromagnetic body, taken perpendicularly to the substrate, includes a round corner, a curvature of which has a radius of no less than 1 nm and no more than 10 nm. The apex of the top portion of the ferromagnetic body protrudes above the surface of the non-magnetic base by 2 nm or more, and protrudes above the surface of the non-magnetic protective film by a distance less than the radius of the curvature.