Abstract: A rotational speed-detecting device of the present invention drives a sensor means 11, which includes a detecting unit that connects magneto-electric elements in series. A comparison voltage generator connects comparison voltage resistors in series, and is connected in parallel with the detecting unit, with a constant voltage by a constant-voltage control means 13, to which constant voltage is supplied by a constant-voltage generating means 14. The constant voltage means 14 controls a constant current of the constant-current means 15 with an on-and-off output from a comparison means 12 so as to superpose and flow a rectangular wave current in a power supply line between Vcc and VR.

Abstract: The present invention relates to a direct connector type magnetic revolution sensor for detecting the number of revolutions of a rotating axis in for example an automotive transmission, and intended to present reliable, yet inexpensive, magnetic revolution sensors, with which the varying connector specifications are easily met by using a detection block as the common component.The magnetic revolution sensor comprises a detection block(2); a cap(1) for protecting the block; and a connector block(3) having a flange(3a) on which a space for installing said detection block(2) and said cap(1) is provided, as well as connector terminals(10) in the other end thereon separated by said flange(3a). The detection block(2) attached on said installing space being electrically coupled with said connector terminals (10). The detection block, a key component for the reliability, is used as the common constituent component having an established reliability.

Abstract: An acceleration sensor includes a case having a bottom part, a pair of opposed walls substantially perpendicular to the bottom part, and a pair of first projections located on the bottom part. The sensor further includes a detection section attached to the case via the pair of first projections for detecting an acceleration and outputting a signal indicating the acceleration, and a spacer located on the bottom part of the case. In addition, the sensor includes an amplifier circuit board attached to the case in the state of being opposed to the detection section with the spacer interposed therebetween and having an amplifier on a substrate thereof for amplifying the signal output by the detection section. Relay terminals are provided for electrically connecting the detection section and the amplifier circuit board, together with output terminals electrically connected to the amplifier circuit board for supplying the amplified signal to an external circuit.

Abstract: A turbo vacuum pump has a housing provided with a suction port and a discharge port, an evacuation pump disposed in the housing for compressing a gas suctioned through the suction port and discharging the compressed gas through the discharge port, and a motor for driving the evacuation pump, the motor and the evacuation pump having a common rotor. The rotor is supported at its both axial ends by bearings. A spiral grooved dynamic seal is disposed in the vicinity of the suction port and at the opposite side of the suction port to the evacuation pump. The diameter of the spiral grooved dynamic seal, at the smallest, is greater than the outside diameter of the final stage impeller of the evacuation pumps.

Abstract: A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.

Abstract: A turbo vacuum pump has a housing provided with a suction port and a discharge port, an evacuation pump disposed in the housing for compressing a gas sucked through the suction port and discharging the compressed gas through the discharge port, and a motor for driving the evacuation pump, the motor and the evacuation pump having a common rotor. The rotor is supported at its both axial ends by bearings. A spiral grooved dynamic seal is disposed in the vicinity of the suction port and at the opposite side of the suction port to the evacuation pump. The diameter of the spiral grooved dynamic seal, at the smallest, is greater than the outside diameter of the final stage impeller of the evacuation pump.

Abstract: A toner comprises a first particle having a predetermined volume average diameter and including thermoplastic binding resin and a colorant mixed into the thermoplastic binding resin to apply a color thereto. Wax of a second particle whose volume average diameter is considerably smaller than that of the first particle, is attached to the first particle by mechanical pressure. A nonmagnetic particle of a third particle is attached to the wax. The volume average diameter of the third particle is considerably smaller than that of the second particle. The attachment of the nonmagnetic particle decreases the area of an exposed surface of the wax, thereby preventing the wax from being attached to other wax and preventing the wax from contacting another toner.

Abstract: An evacuation system in an ultra-high vacuum sputtering apparatus capable of shortening the pumping time of the system. A main pump, composed of a turbo-molecular pump and a baffle is positioned upstream of a main pump and cooled to a temperature in which argon gas is not absorbed and only water is absorbed. The pump and a vacuum chamber are separated by a valve. A pipeline circulates a heating medium to rapidly heat and cool the vacuum chamber for enabling a gas discharge from the vacuum chamber whereby the pumping time can be reduced and the overall production of the system can be increased.

Abstract: Synchrotron radiation is generated when a base of charged particles is bent by a bending magnet. The synchrotron radiation passes down a lead-out duct as the total number of pumps is limited by the size of the apparatus and many pumps are needed in order to achieve a good vacuum. An ion pump has a main magnetic field, normally generated by a magnet of the ion pump which controls the behavior of the electrons in the ion pump. However, the leakage magnetic field of the bending magnet affects the ion pump, and therefore the ion pump is arranged so that its main magnetic field is aligned with the leakage magnetic field at the ion pump, or at least with a main component thereof. In this way, the effect of the leakage magnetic field on the ion pump is reduced. Indeed, it is possible to use the leakage magnetic field as the main magnetic field of the ion pump.

Abstract: A synchrotron radiation source and a method of making the same. As assembly of a beam absorber for absorbing synchrotron radiation beams and a piping for cooling the beam absorber is mounted in a charged particle beam duct of a bending section of the synchrotron radiation source for bending a charged particle beam. Fixed to at least one straight duct that is connectable to either of the opposite ends of the charged particle beam duch is a piping guide duct through which the beam absorber cooling piping is drawn to the outside, so that the assembly of the beam absorber and the beam absorber cooling piping can readily be mounted in the synchrotron radiation source.

Abstract: An analysis system in which air in a specimen exchange chamber is evacuated by an oil-sealed rotary vacuum pump and which employs electron incorporates a purge gas supply means at the inlet side of the oil-sealed rotary vacuum pump. The purge gas supply means supplies a small quantity of purge gas when the air in the specimen exchange chamber is evacuated to the almost ultimate pressure of the pump.

Abstract: According to the turbo molecular pump of the present invention, a regenerative pump is constructed by arcuate eddy current grooves having a predetermined angle with respect to the surface of the outer periphery of a rotor and which are circumferentially engraved in array in the rotor and an arcuate ventilating channel engraved in the circumferential direction in a stator, and a partition is defined in the stator circumferentially partitioning the ventilating channel, so that the working range on the low vacuum side may be extended.

Abstract: In a molecular beam epitaxy apparatus, the loading chamber for introducing the substrates is made separable from both the preparation chamber for cleaning the substrates and the growth chamber for forming thin films onto the respective substrates, so that the evacuation of the loading chamber is possible even when the loading chamber is separated from the apparatus, thus improving the productivity thereof.

Abstract: A rotary substrate holder of a molecular beam epitaxy apparatus including leads-cum-posts serving both as leads for passing a current to a heater for heating a substrate and as posts for supporting the heater. By this arrangement, heat transferred from the heater to a bearing disposed in the vicinity of the heater is minimized in amount, thereby prolonging the service life of the holder and minimizing a heat loss thereof.

Abstract: A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

Abstract: A centrifugal blower including a casing formed with a discharge port and a suction port, and an impeller mounted in the casing and having a plurality of backwardly curved vanes arranged circumferentially of the impeller. The suction port has a semicircular suction member located in spaced juxtaposed relation to a semicircular curled portion formed at the forward end of a shroud of the impeller. An annular guide plate may be attached to the inner side of the suction member and formed at its open end with a wall portion disposed along the shroud which is formed at its forward end with an annular wall extending into a space defined between the suction member and the guide plate. Hair may be provided on one of opposed wall surfaces of the suction member and the annular wall of the shroud.

Abstract: A vaneless diffuser disposed on the outer periphery of an impeller of a centrifugal compressor and including a pair of opposed diffuser plates of a disk shape defining therebetween a fluid channel is formed with a plurality of guide vanes extending from the inlet of the diffuser to its outlet. The guide vanes which are disposed on at least one of the pair of diffuser plates and extend immediately from the outlet of the impeller in the direction of flow of a fluid through the fluid channel has a height smaller than one-half the width of the fluid channel and gradually decreasing in going from the inlet of the diffuser toward its outlet.

Abstract: A centrifugal compressor includes an impeller and a diffuser arranged around the outer periphery of the impeller and including a pair of annular, spaced diffuser plates defining a diffuser channel therebetween. A plurality of guide vanes are provided on at least one of the pair of diffuser plates to guide a low flow angle portion of a fluid flow introduced into the diffuser channel from the outlet of the impeller. The guide vanes each extend from the inlet of the diffuser channel to a position which does not exceed about one half the distance between the inlet and the outlet of the diffuser channel and have a height which is less than one half the spacing between the pair of diffuser plates.

Abstract: In an impeller of a centrifugal blower of the backward type having a relatively large blade inlet width as contrasted with the diameter of the impeller, blades are each shaped, as seen from the axial direction of a rotary shaft, in a concave curve with respect of rotation of the impeller, each of the blades has a larger inlet diameter on the shroud plate side than on the hub plate side, and each of the blades has a leading edge shaped, in a meridional plane, in a smooth convex curve directed radially inwardly of the impeller. By these structural features, it is possible to bring the inlet blade angle into agreement with the inlet relative flow angle at each point of the leading edge of each blade and to reduce the rate of a reduction in the velocity of flow on the shroud plate side.

Abstract: A centrifugal compressor includes an impeller and a diffuser arranged around the outer periphery of the impeller and including a pair of annular, spaced diffuser plates defining a diffuser channel therebetween. A plurality of guide vanes are provided on at least one of the pair of diffuser plates to guide a low flow angle portion of a fluid flow introduced into the diffuser channel from the outlet of the impeller. The guide vanes each extend from the inlet of the diffuser channel to a position which does not exceed about one half the distance between the inlet and the outlet of the diffuser channel and have a height which is less than one half the spacing between the pair of diffuser plates.