Abstract: A fuel cell system includes a control unit that detects an abnormality of a flow dividing valve provided in a bypass channel for an oxidation gas by using a detected opening degree detected by a valve opening degree detection sensor that detects the opening degree of the flow dividing valve. When the detected abnormality is an opening abnormality that is failure to open and the flow dividing valve can close, the control unit sends a closing command for making the opening degree smaller than a current opening degree to a valve driving motor. Either when the detected abnormality is a closing abnormality that is failure to close and the flow dividing valve can open or when the detected abnormality is an opening-closing abnormality that is failure both to close and to open, the control unit sends a maintaining command for maintaining the opening degree to the valve driving motor.

Abstract: A fuel cell system has a first boost converter of a fuel cell, a second boost converter of a secondary battery, and a control unit. Output sides of the first boost converter and the second boost converter are connected so as to be the same potential. The control unit is configured to, when detecting failure of the second boost converter, cause input and output sides of the second boost converter to conduct, estimate an open circuit voltage of the secondary battery based on a state of charge, and execute electric power consumption by an accessory that operates by electric power supplied from the fuel cell when determining that the first boost converter is not able to boost the output voltage of the fuel cell to the open circuit voltage, and stops the electric power consumption by the accessory when determining that the first boost converter is able to boost.

Abstract: A fuel cell system includes: a fuel cell; a first valve device provided at an oxidation gas supply channel; a second valve device provided at an oxidation off-gas discharge channel; a third valve device provided at a bypass channel; an abnormality detection unit configured to detect an abnormality; and a control unit. The control unit causes the fuel cell to initiate fail-safe power generation if (i) a different abnormality from a valve opening abnormality is detected in the first valve device, (ii) the different abnormality is detected in the second valve device, or (iii) any abnormality is detected in the third valve device. During the fail-safe power generation, if any abnormality is additionally detected in any valve device different from the valve device in which an abnormality is already detected, the control unit stops power generation by the fuel cell.

Abstract: A fuel cell system includes: a fuel cell in which a plurality of cells is stacked; a cathode gas supply unit that supplies a cathode gas to the fuel cell; a voltage sensor that measures the voltage of the fuel cell; and a control unit that maintains the voltage of the fuel cell within a predetermined voltage range by controlling a supply amount of the cathode gas during low-load operation in which a load is lower than in normal operation. The control unit determines that there is a cross-leakage abnormality in the fuel cell when the supply amount of the cathode gas required to maintain the voltage of the fuel cell within the predetermined voltage range exceeds a predetermined criterial threshold value during the low-load operation.

Abstract: A fuel cell system includes: a fuel cell; a first valve device provided at an oxidation gas supply channel; a second valve device provided at an oxidation off-gas discharge channel; a third valve device provided at a bypass channel; an abnormality detection unit configured to detect an abnormality; and a control unit. The control unit causes the fuel cell to initiate fail-safe power generation if (i) a different abnormality from a valve opening abnormality is detected in the first valve device, (ii) the different abnormality is detected in the second valve device, or (iii) any abnormality is detected in the third valve device. During the fail-safe power generation, if any abnormality is additionally detected in any valve device different from the valve device in which an abnormality is already detected, the control unit stops power generation by the fuel cell.

Abstract: A fuel cell system includes a control unit that detects an abnormality of a flow dividing valve provided in a bypass channel for an oxidation gas by using a detected opening degree detected by a valve opening degree detection sensor that detects the opening degree of the flow dividing valve. When the detected abnormality is an opening abnormality that is failure to open and the flow dividing valve can close, the control unit sends a closing command for making the opening degree smaller than a current opening degree to a valve driving motor. Either when the detected abnormality is a closing abnormality that is failure to close and the flow dividing valve can open or when the detected abnormality is an opening-closing abnormality that is failure both to close and to open, the control unit sends a maintaining command for maintaining the opening degree to the valve driving motor.

Abstract: A fuel cell system includes: a fuel cell in which a plurality of cells is stacked; a cathode gas supply unit that supplies a cathode gas to the fuel cell; a voltage sensor that measures the voltage of the fuel cell; and a control unit that maintains the voltage of the fuel cell within a predetermined voltage range by controlling a supply amount of the cathode gas during low-load operation in which a load is lower than in normal operation. The control unit determines that there is a cross-leakage abnormality in the fuel cell when the supply amount of the cathode gas required to maintain the voltage of the fuel cell within the predetermined voltage range exceeds a predetermined criterial threshold value during the low-load operation.

Abstract: A fuel cell system has a first boost converter of a fuel cell, a second boost converter of a secondary battery, and a control unit. Output sides of the first boost converter and the second boost converter are connected so as to be the same potential. The control unit is configured to, when detecting failure of the second boost converter, cause input and output sides of the second boost converter to conduct, estimate an open circuit voltage of the secondary battery based on a state of charge, and execute electric power consumption by an accessory that operates by electric power supplied from the fuel cell when determining that the first boost converter is not able to boost the output voltage of the fuel cell to the open circuit voltage, and stops the electric power consumption by the accessory when determining that the first boost converter is able to boost.

Abstract: A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.

Abstract: A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.

Abstract: A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.

Abstract: A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.

Abstract: An image generated by the detected signals of a scanning electron microscope is divided, for example, into a plurality of rectangular small areas with the boundaries parallel to the y-axis. The relative height in the boundary is obtained by conducting one dimensional integration for respectively boundaries. Thereafter, the relative height difference between the boundaries is determined by conducting one dimensional integration for each area in the direction perpendicular to the boundary. Thereby, the surface three dimensional topography having less distortion can be measured, even in case errors are included in the normal distribution which indicates the surface topography of the specimen, by adjusting and determining the height in the area by the interporating operation.