Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.

Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.

Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.

Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.

Abstract: Stages are disclosed for used in a charged-particle-beam (CPB) microlithography apparatus for holding a reticle or substrate (wafer) without affecting the charged particle beam. An exemplary stage, which can be a reticle stage or wafer stage, includes at least one actuator situated and configured to move the reticle or substrate relative to the stage. The actuator is non-magnetic and is configured to exhibit at least two degrees of freedom relative to the stage to cause movement of the reticle or substrate. An exemplary actuator is a piezoelectric element configured as a hollow cylinder or integrated into an assembly including multiple levers connected together by flexures. The actuators can cause the reticle or wafer to be moved linearly and/or rotated relative to the stage. For example, the wafer can be rotated using multiple actuators, and any deviation in wafer rotation can be compensated for by an adjustment to the CPB optical system.

Abstract: A static air-bearing provides a gas layer between two relatively movable parts (fixed part and movable part) and a predetermined clearance between the two parts, to a stage apparatus, and to an optical apparatus, and provides a static air-bearing, a stage apparatus, and an optical apparatus each of which can limit its size and can make pipe arrangement easy. The static air-bearing comprising a fixed part 4 and a movable part 3 movably disposed along the fixed part 4 and maintaining a predetermined clearance between the fixed part 4 and the movable part 3 by an air layer between the fixed part 4 and the movable part 3, the movable part 3 having a bearing pad 3a that blows air into the air layer between the fixed part 4 and the movable part 3 and an air exhaust groove 3c that exhausts the air blown out of the bearing pad 3a, and the fixed part 4 having an air exhaust port 4a that is disposed at a position facing the air exhaust groove 3c.