Abstract: An electronic component handling apparatus includes: a moving device that presses a device under test (DUT) against a socket of a test head. The moving device includes: a pusher that contacts the DUT; and a heater that heats the DUT through the pusher. The pusher includes: an internal space; and a first flow path that communicates with the internal space. Fluid from the test head is supplied to the internal space through the first flow path.

Abstract: An electronic component handling apparatus includes: a moving device that presses a device under test (DUT) against a socket of a test head. The moving device includes: a pusher that contacts the DUT; and a heater that heats the DUT through the pusher. The pusher includes: an internal space; and a first flow path that communicates with the internal space. Fluid from the test head is supplied to the internal space through the first flow path.

Abstract: A calibration board mounted on a socket when calibrating an electronic device test apparatus for testing an IC by bringing ball contacts of the IC into electrical contact with contact terminals of the socket includes calibration terminals for electrically contacting the contact terminals; and a board comprising an insulating member and provided with the calibration terminals, wherein the calibration terminals have spherical members sticking out from the board toward the contact terminals so as to correspond to the shapes of the contact terminals.

Abstract: A socket for an inspection apparatus for connecting an inspection circuit board and an inspected device includes: a plate-like housing including a first surface opposed to a surface on which a terminal of the inspected device is disposed and a second surface opposed to a surface on which an electrode of the inspection circuit board is disposed, the housing having a terminal-receiving holes which extends through the housing in the thickness direction thereof; and a connection terminal attached to the housing for electrically conducting the terminal of the inspected device and the electrode of the inspection circuit board, the connection terminal including a elastically deformable one-piece member which is a bent elongated member and being held in the terminal-receiving hole in the housing so as to be movable in the thickness direction of the housing.