Abstract: A collecting device includes a collecting path for a developer, at least one transport member that is disposed in the collecting path and that transports the developer by rotating, a driving unit that drives, by receiving electric power, the transport member in such a manner that the transport member rotates, a detecting unit that detects a load applied to the driving unit due to transportation of the developer, and a control unit that controls the driving unit based on the load detected by the detecting unit.

Abstract: An evaluating method includes an evaluating step of evaluating a pharmacological action of an immune checkpoint inhibitor in a subject to be evaluated, using (i) a concentration value of at least one metabolite among Glu, Arg, Orn, Cit, His, Val, Phe, Tyr, Met, Pro, Asn, Leu, Lys, Thr, Ile, Gln, Ala, Ser, a-ABA, Trp, Gly, AnthA, hAnthA, hIAA, hKyn, hTrp, IAA, ILA, Kyn, KynA, NFKyn, NP, PA, QA, Serot, and XA in blood of the subject to be evaluated, or (ii) a value of a formula calculated using the concentration value and the formula including an explanatory variable to be substituted with the concentration value.

Abstract: Provided are a vacuum chuck member and a vacuum chuck method that are capable of suppressing misalignment of a substrate when a wafer having a significant deflection or warpage is chucked and held. In a state in which a wafer W is placed on the upper surface side of a base 1, the pressure in an inner space S1 surrounded by the upper surface of the base 1, the lower surface of the wafer W, and the inner side surface of an inner annular rib 21 is reduced through a first air passage 101. Subsequently, the pressure in an outer space S2 surrounded by the upper surface of the base 1, the lower surface of the wafer W, the outer side surface of the inner annular rib 21, and the inner side surface of an outer annular rib 22 is reduced through a second air passage 102.

Abstract: There is provided a cleaning method of a substrate processing apparatus comprising cleaning an inside of an exhaust pipe through which a gas of an inside of a processing container is exhausted. The cleaning the inside of the exhaust pipe includes: removing a deposit on a downstream side of an opening/closing valve in the exhaust pipe by supplying a first exhaust pipe cleaning gas containing fluorine to the downstream side of the opening/closing valve in the exhaust pipe in a state in which the opening/closing valve provided in a middle of the exhaust pipe is closed; and removing a deposit on an upstream side of the opening/closing valve in the exhaust pipe by supplying a second exhaust pipe cleaning gas not containing fluorine as a gas constituent element to the inside of the processing container in a state in which the opening/closing valve is opened.

Abstract: A method of evaluating pancreatic cancer includes (I) an obtaining step of obtaining amino acid concentration data on a concentration value of an amino acid in blood collected from a subject to be evaluated, and (II) an evaluating step of evaluating a state of pancreatic cancer in the subject by calculating a value of a formula using the amino acid concentration data of the subject obtained at the obtaining step and the formula previously established for evaluating the state of pancreatic cancer, including an explanatory variable to be substituted with the concentration value of the amino acid.

Abstract: Provided are a substrate holding device and a substrate holding method that enhance the precision of the shape of a substrate while holding the substrate. The substrate holding device includes a first holding member 1, including a plate-shaped first base 10, and a second holding member 2, including a thin plate-shaped second base 20. The first base 10 has an airway 102 extending to the upper surface of the first base 10. The second base 20 has a through hole 202 extending in a thick direction of the second base 20 at a center portion of the second base 20. The second base 20 includes, on the upper surface of the second base 20, multiple protrusions 211, which protrude upward, and at least one annular ridge 212, which protrudes upward in a substantially annular shape coaxial with the first base 10 and surrounds an upper opening of the through hole 202 and the multiple protrusions 211.

Abstract: A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.

Abstract: A substrate holding device includes a base body that has a flat plate-like shape and that includes gas passages that open in an upper surface of the base body, and a plurality of protrusions that protrude from the upper surface of the base body. At least an upper part of each of the protrusions has a conical frustum shape having a base angle of 70° or more and 85° or less.

Abstract: A substrate is arranged above a base body such that the substrate comes into contact with an upper end of a support member. Subsequently, vacuum suction is performed on an internal space of the support member through an auxiliary vacuum suction path so that the upper end of the support member is displaced to a height position equal to the height positions of upper ends of multiple protruding portions. Then, vacuum suction is performed, through a vacuum suction path, on a space of which the top and the bottom are defined by the base body and the substrate so that the substrate is brought into contact with the upper ends of the multiple protruding portions.

Abstract: There is provided a cleaning method of a substrate processing apparatus comprising cleaning an inside of an exhaust pipe through which a gas of an inside of a processing container is exhausted. The cleaning the inside of the exhaust pipe includes: removing a deposit on a downstream side of an opening/closing valve in the exhaust pipe by supplying a first exhaust pipe cleaning gas containing fluorine to the downstream side of the opening/closing valve in the exhaust pipe in a state in which the opening/closing valve provided in a middle of the exhaust pipe is closed; and removing a deposit on an upstream side of the opening/closing valve in the exhaust pipe by supplying a second exhaust pipe cleaning gas not containing fluorine as a gas constituent element to the inside of the processing container in a state in which the opening/closing valve is opened.

Abstract: A substrate is arranged above a base body such that the substrate comes into contact with an upper end of a support member. Subsequently, vacuum suction is performed on an internal space of the support member through an auxiliary vacuum suction path so that the upper end of the support member is displaced to a height position equal to the height positions of upper ends of multiple protruding portions. Then, vacuum suction is performed, through a vacuum suction path, on a space of which the top and the bottom are defined by the base body and the substrate so that the substrate is brought into contact with the upper ends of the multiple protruding portions.

Abstract: Provided are a substrate holding device and a substrate holding method that enhance the precision of the shape of a substrate while holding the substrate. The substrate holding device includes a first holding member 1, including a plate-shaped first base 10, and a second holding member 2, including a thin plate-shaped second base 20. The first base 10 has an airway 102 extending to the upper surface of the first base 10. The second base 20 has a through hole 202 extending in a thick direction of the second base 20 at a center portion of the second base 20. The second base 20 includes, on the upper surface of the second base 20, multiple protrusions 211, which protrude upward, and at least one annular ridge 212, which protrudes upward in a substantially annular shape coaxial with the first base 10 and surrounds an upper opening of the through hole 202 and the multiple protrusions 211.

Abstract: Provided are a vacuum chuck member and a vacuum chuck method that are capable of suppressing misalignment of a substrate when a wafer having a significant deflection or warpage is chucked and held. In a state in which a wafer W is placed on the upper surface side of a base 1, the pressure in an inner space S1 surrounded by the upper surface of the base 1, the lower surface of the wafer W, and the inner side surface of an inner annular rib 21 is reduced through a first air passage 101. Subsequently, the pressure in an outer space S2 surrounded by the upper surface of the base 1, the lower surface of the wafer W, the outer side surface of the inner annular rib 21, and the inner side surface of an outer annular rib 22 is reduced through a second air passage 102.

Abstract: A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.

Abstract: A substrate holding device includes a base body that has a flat plate-like shape and that includes gas passages that open in an upper surface of the base body, and a plurality of protrusions that protrude from the upper surface of the base body. At least an upper part of each of the protrusions has a conical frustum shape having a base angle of 70° or more and 85° or less.

Abstract: A method of evaluating pancreatic cancer includes (I) an obtaining step of obtaining amino acid concentration data on a concentration value of an amino acid in blood collected from a subject to be evaluated, and (II) an evaluating step of evaluating a state of pancreatic cancer in the subject by calculating a value of a formula using the amino acid concentration data of the subject obtained at the obtaining step and the formula previously established for evaluating the state of pancreatic cancer, including an explanatory variable to be substituted with the concentration value of the amino acid.

Abstract: Disclosed is a semiconductor IC device using a low-price oscillator, which is capable of bidirectional communication with a host and features a low price. In bidirectional communication between a host and a device, the device comprises a synchronization establishment unit, a frequency difference detector, a frequency generator, and an oscillator providing a reference signal. The synchronization establishment unit to which an output signal from the host is inputted outputs a received signal, a synchronization establishment signal and a reception data. The frequency difference detector detects a frequency difference between a received signal and a transmitting signal, and outputs a frequency coordination signal to the frequency generator. The number of frequency division of the frequency generator is controlled by the frequency coordination signal, and the frequency generator is capable of matching the frequency of the transmitting signal which is an output signal with the frequency of the received signal.

Abstract: Disclosed is a semiconductor IC device using a low-price oscillator, which is capable of bidirectional communication with a host and features a low price. In bidirectional communication between a host and a device, the device comprises a synchronization establishment unit, a frequency difference detector, a frequency generator, and an oscillator providing a reference signal. The synchronization establishment unit to which an output signal from the host is inputted outputs a received signal, a synchronization establishment signal and a reception data. The frequency difference detector detects a frequency difference between a received signal and a transmitting signal, and outputs a frequency coordination signal to the frequency generator. The number of frequency division of the frequency generator is controlled by the frequency coordination signal, and the frequency generator is capable of matching the frequency of the transmitting signal which is an output signal with the frequency of the received signal.

Abstract: A method and apparatus for displaying on a display screen the controlling circuit in a plant controlling system for controlling a plant by a controller using a microcomputer. The display screen is segmented into a software region and a hardware region. The software circuit which is realized by software is displayed in the software region, and the hardware circuit related to the software circuit is displayed in the hardware region. The information, which is plotted during the interactive process and is displayed in the software regions, is automatically translated into a program for controlling the controller. Operation data of the plant is also given on the display screen. Desired circuit elements of the software circuit may be selected to change parameters of the circuit elements. Maintenance work can be carried out while observing the indication on the display screen without any aid of documents such as the maintenance manual or the like.