Abstract: A method for manufacturing a semiconductor substrate, including: applying a composition for forming a resist underlayer film directly or indirectly to a substrate to form a resist underlayer film directly or indirectly on the substrate; forming a resist pattern directly or indirectly on the resist underlayer film; and performing etching using the resist pattern as a mask. The composition for forming a resist underlayer film contains: a polymer having a repeating unit represented by formula (1) and a solvent. Ar1 is a divalent group including an aromatic ring having 5 to 40 ring atoms; and R0 is a monovalent group including an aromatic ring having 5 to 40 ring atoms and includes at least one group selected from the group consisting of groups represented by formula (2-1) and groups represented by formula (2-2).

Abstract: An inner surface finishing tool enables machining of a workpiece made of a material machinable with a relatively large burnishing amount while reducing deformation at the opening of the workpiece or deterioration of its geometrical tolerance during machining of the inner peripheral surface. The tool includes a mandrel rotatable relative to the workpiece and includes a polygonal member, and a frame that is cylindrical and fitted onto the mandrel in a rotatable manner and has an axis extending in an axial direction of the mandrel and holds a plurality of first rollers and a plurality of second rollers rollable on an outer peripheral surface of the mandrel. The polygonal member rotates the plurality of second rollers to move inward and outward in a radial direction of the frame.

Abstract: An inner surface finishing tool enables machining of a workpiece made of a material machinable with a relatively large burnishing amount while reducing deformation at the opening of the workpiece or deterioration of its geometrical tolerance during machining of the inner peripheral surface. The tool includes a mandrel rotatable relative to the workpiece and includes a polygonal member, and a frame that is cylindrical and fitted onto the mandrel in a rotatable manner and has an axis extending in an axial direction of the mandrel and holds a plurality of first rollers and a plurality of second rollers rollable on an outer peripheral surface of the mandrel. The polygonal member rotates the plurality of second rollers to move inward and outward in a radial direction of the frame.

Abstract: Provided is a roller burnishing tool device including a shank; a housing connected to the shank, a connected position of the housing relative to the shank being adjustable; a roller support member supported to be capable of rotating relative to the housing and attached to follow a movement of the housing in a case of adjusting the connected position; tapered rollers supported by the roller support member; a mandrel having a tapered portion matched with the tapered rollers and movable relative to the roller support member; and a tool diameter following mechanism connecting the shank and the mandrel, having a lead groove formed spirally in a front portion of the shank, a pin member capable of moving along the lead groove, a pin member insertion hole formed in the mandrel to insert the pin member therein, and a biasing unit biasing the mandrel forward.

Abstract: Provided is a roller burnishing tool device including a shank; a housing connected to the shank, a connected position of the housing relative to the shank being adjustable; a roller support member supported to be capable of rotating relative to the housing and attached to follow a movement of the housing in a case of adjusting the connected position; tapered rollers supported by the roller support member; a mandrel having a tapered portion matched with the tapered rollers and movable relative to the roller support member; and a tool diameter following mechanism connecting the shank and the mandrel, having a lead groove formed spirally in a front portion of the shank, a pin member capable of moving along the lead groove, a pin member insertion hole formed in the mandrel to insert the pin member therein, and a biasing unit biasing the mandrel forward.

Abstract: A combined processing tool includes a shank of a cylindrical shape, a mandrel fixed to the shank, a frame rotation-universally fitted outside the mandrel, a burnishing unit for performing a burnishing to an inner peripheral surface of a workpiece by rolling members, a dimple forming unit for performing a dimple forming to the surface of the workpiece by surface compression members so as to universally appear from and disappear in the frame, a body fixed to a top portion of the shank, and a skiving unit for performing a cutting, wherein, on an outer peripheral region of the mandrel, an outer peripheral surface 31c and a concave and convex shape area which consists of concave parts and convex parts alternately arranged along an outer peripheral direction of the mandrel are formed, and wherein the concave and convex parts are alternately engaged in the compression members with being rotated.

Abstract: A dimple-forming burnishing tool allowing easy adjustment of a dimple shape is provided. The dimple-forming burnishing tool has a mandrel attached on a rear-end side thereof to a processing machine for rotation, and a cylindrical frame rotatably externally fitted on a tip side of the mandrel and holding a rolling element and a pressing element that are driven by rotation of the mandrel, for forming dimples in an inner surface of a workpiece by rotating the mandrel with the frame disposed inside the inner surface of the workpiece. In the dimple-forming burnishing tool, the mandrel includes a dimple adjusting mechanism. The dimple adjusting mechanism includes: a rolling element rotating portion causing the rolling element to rotate without moving in and out radially of the frame; and a pressing element in-and-out rotating portion causing the pressing element to rotate while moving in and out radially of the frame.

Abstract: A dimple-forming burnishing tool allowing easy adjustment of a dimple shape is provided. The dimple-forming burnishing tool has a mandrel attached on a rear-end side thereof to a processing machine for rotation, and a cylindrical frame rotatably externally fitted on a tip side of the mandrel and holding a rolling element and a pressing element that are driven by rotation of the mandrel, for forming dimples in an inner surface of a workpiece by rotating the mandrel with the frame disposed inside the inner surface of the workpiece. In the dimple-forming burnishing tool, the mandrel includes a dimple adjusting mechanism. The dimple adjusting mechanism includes: a rolling element rotating portion causing the rolling element to rotate without moving in and out radially of the frame; and a pressing element in-and-out rotating portion causing the pressing element to rotate while moving in and out radially of the frame.

Abstract: A combined processing tool includes a shank of a cylindrical shape, a mandrel fixed to the shank, a frame rotation-universally fitted outside the mandrel, a burnishing unit for performing a burnishing to an inner peripheral surface of a workpiece by rolling members, a dimple forming unit for performing a dimple forming to the surface of the workpiece by surface compression members so as to universally appear from and disappear in the frame, a body fixed to a top portion of the shank, and a skiving unit for performing a cutting, wherein, on an outer peripheral region of the mandrel, an outer peripheral surface 31c and a concave and convex shape area which consists of concave parts and convex parts alternately arranged along an outer peripheral direction of the mandrel are formed, and wherein the concave and convex parts are alternately engaged in the compression members with being rotated.