Patents by Inventor Shirley S. Chu

Shirley S. Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for production of polysilanes and polygermanes, and deposition of hydrogenated amorphous silicon, alloys thereof, or hydrogenated amorphous germanium
    Patent number: 4792460
    Abstract: A process is provided for forming high purity polysilanes or polygermanes by electric discharge wherein the monosilane or monogermane is provided in a gaseous mixture with a carrier gas at atmospheric pressure. The polysilanes or polygermanes produced at atmospheric pressure are further deposited by various means onto a substrate as hydrogenated amorphous silicon or germanium. The polysilane may also be used for the deposition of hydrogenated amorphous silicon alloys.
    Type: Grant
    Filed: July 15, 1986
    Date of Patent: December 20, 1988
    Assignee: Electric Power Research Institute, Inc.
    Inventors: Ting L. Chu, Shirley S. Chu