Patents by Inventor Shjui Moriya

Shjui Moriya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas supply system
    Patent number: 5307568
    Abstract: A gas supply system includes a gas source containing a process gas to be supplied in a reduced-pressure container, a piping unit including a metallic pipe through which the process gas circulates and arranged between the gas supply source and the reduced-pressure container, and a duct formed of a metallic and/or nonmetallic pipe and arranged between the piping unit and the reduced-pressure container. At least part of the duct is formed of an austenitic stainless steel containing 6% or more of molybdenum by weight.
    Type: Grant
    Filed: September 9, 1992
    Date of Patent: May 3, 1994
    Assignee: Tokyo Electron Limited
    Inventors: Takenobu Matsuo, Tsuyoshi Wakabayashi, Shjui Moriya