Patents by Inventor Shmuel Shmulik Nakash

Shmuel Shmulik Nakash has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck and a method for supporting a wafer
    Patent number: 8804299
    Abstract: An electrostatic chuck includes an isolating substrate that surrounds at least one electrode; multiple protrusions having upper portions arranged to contact a wafer; and at least one discharging element positioned between the at least one electrode and the upper portions of the multiple protrusions; which discharging element, once coupled to a discharging circuit, is arranged to discharge charge accumulated in the isolating substrate.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: August 12, 2014
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Guy Eytan, Shmuel Shmulik Nakash, Konstantin Chirko
  • ELECTROSTATIC CHUCK AND A METHOD FOR SUPPORTING A WAFER
    Publication number: 20120262834
    Abstract: An electrostatic chuck includes an isolating substrate that surrounds at least one electrode; multiple protrusions having upper portions arranged to contact a wafer; and at least one discharging element positioned between the at least one electrode and the upper portions of the multiple protrusions; which discharging element, once coupled to a discharging circuit, is arranged to discharge charge accumulated in the isolating substrate.
    Type: Application
    Filed: February 13, 2012
    Publication date: October 18, 2012
    Inventors: Guy Eytan, Shmuel Shmulik Nakash, Konstantin Chirko