Abstract: The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.

Abstract: The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit.

Abstract: The present invention is a system including: an imprint unit transferring a transfer pattern to a coating film on a substrate using a template to form a predetermined pattern in the coating film; a treatment station connected to the imprint unit and performing a predetermined treatment on the template; a template carry-in/out station connected to the treatment station, capable of keeping templates, and carrying the template in/out from/to the treatment station; a carry line provided through the imprint unit and carrying the template between the imprint unit and the treatment station; and a substrate carry-in/out station connected to the imprint unit, capable of keeping substrates, and carrying the substrate in/out from/to the imprint unit.

Abstract: The present invention is an imprint system including an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film, the imprint system including: a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side; and a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side at a predetermined timing.

Abstract: In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.

Abstract: An ultra-high pressure mercury lamp in which the tungsten comprising the electrodes is prevented from spraying during starting and operation, and blackening on the inside wall of the arc tube is prevented is achieved in that at least one of the electrodes has an axial part which is made essentially of tungsten and a starting part which is made essentially of tungsten, at least one of the axial part and of the starting part containing an electron emission material with a smaller work function than tungsten such that the value of S/A in mm2/% by weight is in the range 1?S/A?1×104, S in mm2 designating the surface area of the part of the electrode projecting into the arc tube containing the electron emission material and A in % by weight indicating the concentration of the electron emission material in this part.

Abstract: A light source device which can also advantageously control the growth of the projection using the DMD type is achieved in a light source device which has an ultrahigh pressure dicharge lamp) in which the silica glass discharge vessel is filled with greater than or equal to 0.15 mg/mm3 mercury and bromine; a feed device; an oval reflector; and a color wheel by the electrode on the side of the opening of the oval reflector of the discharge lamp having an increased diameter, and the relation 0./06<W/I2<0.96 between the volume W (mm3) of the tip area with increased diameter and the current value I being satisfied.

Abstract: An ultra-high pressure mercury lamp in which the tungsten comprising the electrodes is prevented from spraying during starting and operation, and blackening on the inside wall of the arc tube is prevented is achieved in that at least one of the electrodes has an axial part which is made essentially of tungsten and a starting part which is made essentially of tungsten, at least one of the axial part and of the starting part containing an electron emission material with a smaller work function than tungsten such that the value of S/A in mm2/% by weight is in the range 1?S/A?×104, S in mm2 designating the surface area of the part of the electrode projecting into the arc tube containing the electron emission material and A in % by weight indicating the concentration of the electron emission material in this part.

Abstract: Scribe lines are formed in advance at cutting locations on both surfaces of a panel formed by bonding an upper substrate and a lower substrate to each other via a sealing material, and a laser beam is applied to each of the scribe lines on both surfaces, by which a liquid crystal panel having a product size is obtained.

Abstract: Scribe lines are formed in advance at cutting locations on both surfaces of a panel formed by bonding an upper substrate and a lower substrate to each other via a sealing material, and a laser beam is applied to each of the scribe lines on both surfaces, by which a liquid crystal panel having a product sized is obtained.