Abstract: A first ground elimination portion 3a formed in a ground layer is formed in a size such that a characteristic impedance determined by the first ground elimination portion 3a and component pads 1a is higher than a characteristic impedance determined by a ground conductor 2a and a transmission line 1b. When an outer shapes of the component pads 1a are projected on the ground layer, the center of a region interposed between the conductor pads 1a is positioned at the center of the first ground elimination portion 3a.

Abstract: A cylinder which can precisely feed a piston rod 3 into three different positions. The cylinder includes a spring receiving member 14 which is placed coaxially with the piston rod in a piston room. Movement of the piston 4 is limited by one end of the piston room and a stopper 8 formed on the piston rod which prevents the piston from moving in the opposite direction. A first spring member 15 is disposed in the cylinder tube 2 to separate the spring receiving member from the piston. A hollow 9 is formed on the periphery of the piston rod at a further position from the piston than the stopper and a stop pin 11 in the cylinder tube 2 which is biased in the direction of the hollow by a second spring member 12 engages with the hollow. A load port utilizes the cylinder for a production system.

Abstract: It is therefore a primary object of the invention to provide a bread paper container that improves shortcomings of metal can, to apply lighter and safer material, the processes of filling, ferment, toasting etc. is finished in succession in this paper container, no contamination issue during whole process. To apply paper as material of the container, the issues of garbage process and environmental protection also better than the metal can. In order to achieve the objective set forth, a bread paper container in accordance with the present invention applies thermostability paper as material that is lighter than metal, the paper container weight only 1/4 of traditional metal can, no finger cutting issues by metal can.

Abstract: A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of the closed type clean container for mounting and housing wafers (4) on any one of or a plurality of shelves among a plurality of internal shelves is made tightly contact to a port door (13) of a load port (12), comprising a swinging member (22) coupled to the port door so as to swing around predetermined horizontal axes parallel to the port door, a pair of sensor portions (20) fixed to the swinging member and mutually separated as well as protruding towards the clean container from the swinging member above the port door, a light emitting device (20a) and light receiving device (20b) fixed one each to the pair of sensor portions and facing each other, and swinging drive means (25) for rotating the swinging member around the horizontal axis to an angle where the wafers enter between the light emitting device and the lig

Abstract: A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of the closed type clean container for mounting and housing wafers (4) on any one of or a plurality of shelves among a plurality of internal shelves is made tightly contact to a port door (13) of a load port (12), comprising a swinging member (22) coupled to the port door so as to swing around predetermined horizontal axes parallel to the port door, a pair of sensor portions (20) fixed to the swinging member and mutually separated as well as protruding towards the clean container from the swinging member above the port door, a light emitting device (20a) and light receiving device (20b) fixed one each to the pair of sensor portions and facing each other, and swinging drive means (25) for rotating the swinging member around the horizontal axis to an angle where the wafers enter between the light emitting device and the lig