Abstract: There is provided an EUV transmissive membrane including: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.

Abstract: A first electrode and a second electrode, and a ceramic structural body into which a gas is introduced, and which is configured to introduce into water an active species produced by a plasma which is generated between the first electrode and the second electrode are provided. The ceramic structural body and at least one electrode from among the first electrode and the second electrode are formed together in an integrated manner.

Abstract: A pulsed voltage is repeatedly applied between a first electrode and a second electrode to which a gas is supplied, a plasma is generated between the first electrode and the second electrode, and an active species is produced in the plasma. The energy necessary for plasma generation is set to a value greater than or equal to 1.8 W/cm3 and less than or equal to 8.5 W/cm3.

Abstract: An electric discharger includes: an inductor, a first semiconductor switch, and a second semiconductor switch which are connected in series between opposite terminals of a DC power supply unit; and a reactor connected to output terminals of the inductor. Induced energy is stored in the inductor when the first semiconductor switch is turned on. The inductor generates a high voltage when the first semiconductor switch is turned off. The reactor is discharged under the high voltage. The reactor has a pair of electrodes, a dielectric body and a space, the dielectric body and the space being disposed between the electrodes. The first semiconductor switch is turned on again when charging of the dielectric body of the reactor under the high voltage is substantially finished.

Abstract: An electric discharger includes: an inductor, a first semiconductor switch, and a second semiconductor switch which are connected in series between opposite terminals of a DC power supply unit; and a reactor connected to output terminals of the inductor. Induced energy is stored in the inductor when the first semiconductor switch is turned on. The inductor generates a high voltage when the first semiconductor switch is turned off. The reactor is discharged under the high voltage. The reactor has a pair of electrodes, a dielectric body and a space, the dielectric body and the space being disposed between the electrodes. The first semiconductor switch is turned on again when charging of the dielectric body of the reactor under the high voltage is substantially finished.

Abstract: A spatial light modulator includes at least a photoconductive layer, one transparent electrode film provided on one surface of the photoconductive layer, a light blocking layer provided on the other surface of the photoconductive layer, a dielectric multilayered film provided on the light blocking layer, a light modulation layer provided on the dielectric multilayered film, and the other transparent electrode film provided on the surface of the light modulation layer, said light modulation layer consisting of a liquid crystal material for changing intensity, phase or running direction of read-out light by applying a voltage, wherein the light blocking layer is an amorphous film consisting essentially of 5-45 atomic % of germanium, 17.5-92.5 atomic % of carbon and 2.5-77.5 atomic % of silicon. Thereby, the magnification of the intensity of read-out light to intensity of write-in light can be increased.

Abstract: A fuel system includes a motor-driven pump which pressurizes a source of fuel to a predetermined pressure level and delivers the pressurized fuel to an engine-driven pump which, in turn, communicates with high-pressure fuel injectors for supplying high-pressure fuel into respective cylinders of an engine during normal engine operation. A low-pressure fuel injector is provided which is connected to the discharge side of the motor-driven pump for supplying low-pressure fuel into an engine intake manifold near its entrance only during the engine is being cranked.

Abstract: A fuel supply system of an internal combustion engine for an automotive vehicle, comprising engine load detecting means operative to detect load on the internal combustion engine and to produce an output signal representative of the detected engine load; an electrically-operated fuel-injection nozzle assembly projecting into a combustion chamber of a power cylinder of the engine and operative to inject fuel into the combustion chamber; and an electric control unit electrically connected to the engine load detecting means and the fuel-injection nozzle assembly and operative to produce control signals to determine the durations of fuel injection and the fuel injection timings of the nozzle assembly on the basis of the signals, the fuel injection timings being determined to occur in the presence of a relatively low gas pressure in the combustion chamber.

Abstract: An electronically controlled fuel injection system for an internal combustion engine which determines the pulsewidth of a drive signal to be applied to a plurality of fuel injection valves, each located within an intake manifold, which in turn determines the fuel injection amount per engine revolution according to the engine operating conditions, the air-fuel mixture ratio being smoothly changed from a lean air-fuel mixture ratio to a richer air-fuel mixture ratio when the engine load changes from a partial load to a full load. Therefore, fuel consumption is remarkably reduced without worsening the handling of the vehicle in which the fuel injection system is incorporated.