Patents by Inventor Shou-Gwo Wuu

Shou-Gwo Wuu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10515990
    Abstract: Semiconductor devices and methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: December 24, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Publication number: 20190140004
    Abstract: Semiconductor devices and methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Application
    Filed: December 17, 2018
    Publication date: May 9, 2019
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Patent number: 10157942
    Abstract: Semiconductor devices and methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: December 18, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Patent number: 10074680
    Abstract: A CMOS image sensor and a method of forming are provided. The CMOS image sensor may include a device wafer. A conductive feature may be formed on a back-side surface of the device wafer. The device wafer may include a pixel formed therein. A passivation layer may be formed over the back-side surface of the device wafer and the conductive feature. A grid film may be formed over the passivation layer. The grid film may be patterned to accommodate a color filter. The grid film pattern may align the color filter to corresponding pixel in the device wafer. A portion of the grid film formed over the conductive feature may be reduced to be substantially planar with portions of the grid film adjacent to the conductive feature. The patterning and reducing may be performed according to etching processes, chemical mechanical processes, and combinations thereof.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: September 11, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsien Tseng, Nai-Wen Cheng, Shou-Gwo Wuu, Ming-Tsong Wang, Tung-Ting Wu
  • Patent number: 9837458
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; a photo-sensitive structure formed in the semiconductor layer; a multi-layer interconnect (MLI) structure disposed on the semiconductor layer; a color filter disposed on the MLI structure and disposed above the photo-sensitive structure; and a microlens disposed over the color filter and disposed above the photo-sensitive structure.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: December 5, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Publication number: 20170317123
    Abstract: Semiconductor devices and methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Application
    Filed: July 17, 2017
    Publication date: November 2, 2017
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Patent number: 9711548
    Abstract: Methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: July 18, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Publication number: 20170033138
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; a photo-sensitive structure formed in the semiconductor layer; a multi-layer interconnect (MLI) structure disposed on the semiconductor layer; a color filter disposed on the MLI structure and disposed above the photo-sensitive structure; and a microlens disposed over the color filter and disposed above the photo-sensitive structure.
    Type: Application
    Filed: October 17, 2016
    Publication date: February 2, 2017
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Patent number: 9496302
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; and an image sensor formed in the semiconductor layer.
    Type: Grant
    Filed: February 20, 2014
    Date of Patent: November 15, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Patent number: 9478630
    Abstract: A device includes a dielectric layer, and a heavily doped semiconductor layer over the dielectric layer. The heavily doped semiconductor layer is of a first conductivity type. A semiconductor region is over the heavily doped semiconductor layer, wherein the semiconductor region is of a second conductivity type opposite the first conductivity type. A Lateral Insulated Gate Bipolar Transistor (LIGBT) is disposed at a surface of the semiconductor region.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: October 25, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhy-Jyi Sze, Biay-Cheng Hseih, Shou-Gwo Wuu
  • Publication number: 20160197110
    Abstract: Methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Application
    Filed: March 15, 2016
    Publication date: July 7, 2016
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Publication number: 20160190190
    Abstract: A CMOS image sensor and a method of forming are provided. The CMOS image sensor may include a device wafer. A conductive feature may be formed on a back-side surface of the device wafer. The device wafer may include a pixel formed therein. A passivation layer may be formed over the back-side surface of the device wafer and the conductive feature. A grid film may be formed over the passivation layer. The grid film may be patterned to accommodate a color filter. The grid film pattern may align the color filter to corresponding pixel in the device wafer. A portion of the grid film formed over the conductive feature may be reduced to be substantially planar with portions of the grid film adjacent to the conductive feature. The patterning and reducing may be performed according to etching processes, chemical mechanical processes, and combinations thereof.
    Type: Application
    Filed: March 4, 2016
    Publication date: June 30, 2016
    Inventors: Chien-Hsien Tseng, Nai-Wen Cheng, Shou-Gwo Wuu, Ming-Tsong Wang, Tung-Ting Wu
  • Patent number: 9324833
    Abstract: Methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Grant
    Filed: March 6, 2015
    Date of Patent: April 26, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Patent number: 9299740
    Abstract: A CMOS image sensor and a method of forming are provided. The CMOS image sensor may include a device wafer. A conductive feature may be formed on a back-side surface of the device wafer. The device wafer may include a pixel formed therein. A passivation layer may be formed over the back-side surface of the device wafer and the conductive feature. A grid film may be formed over the passivation layer. The grid film may be patterned to accommodate a color filter. The grid film pattern may align the color filter to corresponding pixel in the device wafer. A portion of the grid film formed over the conductive feature may be reduced to be substantially planar with portions of the grid film adjacent to the conductive feature. The patterning and reducing may be performed according to etching processes, chemical mechanical processes, and combinations thereof.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: March 29, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsien Tseng, Nai-Wen Cheng, Shou-Gwo Wuu, Ming-Tsong Wang, Tung-Ting Wu
  • Patent number: 9299734
    Abstract: A method of preparing an active pixel cell on a substrate includes exerting a first stress on the substrate by forming a shallow trench isolation (STI) structure in the substrate. The method further includes testing the stressed substrate using Raman spectroscopy at a plurality of locations on the stress substrate. The method further includes depositing a stress layer having a second stress on the substrate. The stress layer covers devices of the active pixel cell that are on the substrate and the devices include a photodiode next to the STI and a transistor, and the deposition of the stress layer results in the second stress being exerted on the substrate, the second stress countering the first stress.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: March 29, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ru-Shang Hsiao, Nai-Wen Cheng, Chung-Te Lin, Chien-Hsien Tseng, Shou-Gwo Wuu
  • Patent number: 9257463
    Abstract: A device includes a semiconductor substrate, a well region in the semiconductor substrate, and a Metal-Oxide-Semiconductor (MOS) device. The MOS device includes a gate dielectric overlapping the well region, a gate electrode over the gate dielectric, and a source/drain region in the well region. The source/drain region and the well region are of opposite conductivity types. An edge of the first source drain region facing away from the gate electrode is in contact with the well region to form a junction isolation.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: February 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsien Tseng, Shou-Gwo Wuu, Chia-Chan Chen, Kuo-Yu Wu, Dao-Hong Yang, Ming-Hao Chung
  • Patent number: 9196646
    Abstract: The present disclosure provides an image sensor semiconductor device. A semiconductor substrate having a first-type conductivity is provided. A plurality of sensor elements is formed in the semiconductor substrate. An isolation feature is formed between the plurality of sensor elements. An ion implantation process is performed to form a doped region having the first-type conductivity substantially underlying the isolation feature using at least two different implant energy.
    Type: Grant
    Filed: May 10, 2013
    Date of Patent: November 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Cheng Liu, Ching-Hung Cheng, Chien-Hsien Tseng, Chia-Hao Hsu, Feng-Jia Shiu, Shou-Gwo Wuu
  • Publication number: 20150179761
    Abstract: Methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.
    Type: Application
    Filed: March 6, 2015
    Publication date: June 25, 2015
    Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
  • Publication number: 20150140741
    Abstract: A device includes a dielectric layer, and a heavily doped semiconductor layer over the dielectric layer. The heavily doped semiconductor layer is of a first conductivity type. A semiconductor region is over the heavily doped semiconductor layer, wherein the semiconductor region is of a second conductivity type opposite the first conductivity type. A Lateral Insulated Gate Bipolar Transistor (LIGBT) is disposed at a surface of the semiconductor region.
    Type: Application
    Filed: December 3, 2014
    Publication date: May 21, 2015
    Inventors: Jhy-Jyi Sze, Biay-Cheng Hseih, Shou-Gwo Wuu
  • Patent number: 9012967
    Abstract: Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: April 21, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Ching Lin, Chun-Yao Chen, Chen-Jong Wang, Shou-Gwo Wuu, Chung S. Wang, Chien-Hua Huang, Kun-Lung Chen, Ping Yang