Patents by Inventor Shouta Umezaki

Shouta Umezaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate liquid processing apparatus
    Patent number: 9842751
    Abstract: Disclosed is a substrate liquid processing apparatus. The apparatus includes: a substrate holding unit configured to hold a substrate horizontally; a nozzle configured to eject a processing liquid in a transversal direction toward a liquid arrival target position set on the substrate held by the substrate holding unit from an ejection port which is located at an injection position spaced away from the liquid arrival target position by a predetermined distance horizontally; and a liquid receiving unit provided below the nozzle to receive the processing liquid dropping from the ejection port of the nozzle.
    Type: Grant
    Filed: October 26, 2015
    Date of Patent: December 12, 2017
    Assignee: Tokyo Electron Limited
    Inventors: Shouta Umezaki, Yoshihiro Kai, Kazuki Kosai, Mitsuo Tanaka
  • SUBSTRATE LIQUID PROCESSING APPARATUS
    Publication number: 20160114345
    Abstract: Disclosed is a substrate liquid processing apparatus. The apparatus includes: a substrate holding unit configured to hold a substrate horizontally; a nozzle configured to eject a processing liquid in a transversal direction toward a liquid arrival target position set on the substrate held by the substrate holding unit from an ejection port which is located at an injection position spaced away from the liquid arrival target position by a predetermined distance horizontally; and a liquid receiving unit provided below the nozzle to receive the processing liquid dropping from the ejection port of the nozzle.
    Type: Application
    Filed: October 26, 2015
    Publication date: April 28, 2016
    Inventors: Shouta Umezaki, Yoshihiro Kai, Kazuki Kosai, Mitsuo Tanaka