Patents by Inventor Shozo Kambara

Shozo Kambara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a sputtering target and sputtering target
    Patent number: 9017493
    Abstract: [Object] To provide a method of manufacturing a sputtering target and a sputtering target that are capable of achieving refinement and uniformity of crystal grains. [Solving Means] A method of manufacturing a sputtering target according to an embodiment of the present invention includes forging an ingot formed of metal by applying a stress in a first axis direction (z-axis direction) and a plane direction (xy-plane direction) orthogonal to the first axis direction. The ingot is additionally forged by applying a stress in a second axis direction (axial directions c11, c12, c21, c22) obliquely intersecting with a direction parallel to the first axis direction. The ingot is heat-treated at a temperature equal to or higher than a recrystallization temperature thereof. In such a manner, since slip deformation can be caused not only in the first axis direction and the plane direction orthogonal thereto but also in the second axis direction, the high density and uniformity of an internal stress can be achieved.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: April 28, 2015
    Assignee: Ulvac, Inc.
    Inventors: Junichirou Hagihara, Shuichi Higashi, Shozo Kambara
  • Method of Manufacturing a Sputtering Target and Sputtering Target
    Publication number: 20120132523
    Abstract: [Object] To provide a method of manufacturing a sputtering target and a sputtering target that are capable of achieving refinement and uniformity of crystal grains. [Solving Means] A method of manufacturing a sputtering target according to an embodiment of the present invention includes forging an ingot formed of metal by applying a stress in a first axis direction (z-axis direction) and a plane direction (xy-plane direction) orthogonal to the first axis direction. The ingot is additionally forged by applying a stress in a second axis direction (axial directions c11, c12, c21, c22) obliquely intersecting with a direction parallel to the first axis direction. The ingot is heat-treated at a temperature equal to or higher than a recrystallization temperature thereof. In such a manner, since slip deformation can be caused not only in the first axis direction and the plane direction orthogonal thereto but also in the second axis direction, the high density and uniformity of an internal stress can be achieved.
    Type: Application
    Filed: August 10, 2010
    Publication date: May 31, 2012
    Applicant: ULVAC, INC.
    Inventors: Junichirou Hagihara, Shuichi Higashi, Shozo Kambara